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Abstract: Polycrystalline piezoelectric ZnO thin films are deposited using RF magnetron sputtering on different substrate materials including SiO2/Si(100) and diamond-like carbon (DLC) coated on silicon substrates from target ZnO. The effect of substrate temperature, RF power, Ar/O2 ratio on structure, grain size, micro-morphology and full-width at half-maximum (FWHM) of ZnO thin film has been discussed. According to the peak angles shifting towards the powder value at different deposited condition, the film stress has been calculated. The result shows that the compressive stress of ZnO film decreases with increase of substrate temperature and it is smallest with increase of deposited power. The ZnO film which has pillar crystal structures has been obtained which is deposited on both the SiO2/Si and the DLC/Si substrates. [Copyright &y& Elsevier]

Pb(Zr0.52Ti0.48)O3 (PZT) films have been fabricated on Pt/Ti/SiO2/Si substrates with a new chemical solution deposition technique, in which each layer of PbZrO3 (PZ) and PbTiO3 (PT) was heated to 600°C as soon as it was spin coated. The fabrication of the homogeneous PZT film was finished through the reaction between the PT and PZ layers and without post-annealing. By surveying the variations of the surface micrographs during the deposition process, an island–column hybrid growth mode could be concluded. The low-temperature fabrication brings about enhanced fatigue resistance because of the suppression of the formation of the oxygen vacancies. Measurements of the ferroelectric properties suggest a promising application for the ferroelectric memory devices. [Copyright &y& Elsevier]

SrBi2Ta2O9 (SBT) thin films fabricated by pulsed-laser deposition, on the same substrates and under different deposition conditions, were found showing different textures. The influence of the deposition condition on the texture of the SBT films can be explained by the variations in two aspects. One is the interactions between the plume and the substrate, the other is the composition of the laser-deposited film. The relations between the texture and the ferroelectric property of the films were also discussed. It was found that the ferroelectric properties, such as the polarization and the coercive field, had a strong dependence on the texture of the SBT films. These results are of interest for the fabrication of ferroelectric memories with fatigue-free SBT thin films. [Copyright &y& Elsevier]