Search

Your search keyword '"Yang, Yansong"' showing total 14 results
Start Over Author "Yang, Yansong" Journal journal of microelectromechanical systems
14 results on '"Yang, Yansong"'

2. Sealed-Cavity Bulk Acoustic Resonator for Subsequent Fabrication and Higher Order Mode

Author

Xu, Jiashuai, Liu, Zong, Zheng, Junyan, Qian, Fangsheng, Wong, Man, and Yang, Yansong

Abstract

This focuses on developing a new platform for the thin-film bulk acoustic wave (BAW) resonator, which features predefined sealed cavities, self-formed acoustic boundaries, and compatibility with subsequent fabrication. Different from conventional BAW resonator fabrication methods, this work has simplified fabrication by using silicon migration technology: building freely predefined cavities with self-formed acoustic boundaries without patterning the piezoelectric layer in only two steps (etching and annealing). Additionally, the sealed cavity is sturdy enough to be compatible with subsequent hetero-integrating with other devices. For higher frequency and better electromechanical coupling ( $K^{2}$ ), the proposed platform can excite the second-order asymmetric Lamb wave mode (A2) in scandium-doped aluminum nitride (Al1–xScxN) film with an optimized stress field. The fabricated devices demonstrate S1 and A2 resonant modes at 1.58 GHz and 3.52 GHz with electromechanical coupling coefficients of 1.47% and 5.12%, respectively. [2023-0185]

Published
2024
Full Text
View/download PDF

13. High Q Antisymmetric Mode Lithium Niobate MEMS Resonators With Spurious Mitigation.

Author

Yang, Yansong, Lu, Ruochen, and Gong, Songbin

Subjects
*MEMS resonators, *ACOUSTIC surface waves, *LAMB waves, *ACOUSTIC resonators, *LITHIUM niobate, *WIRELESS communications, *THIN films
Abstract

This paper reports on the demonstrations of first-order antisymmetric Lamb wave (A1) mode resonator as a new platform for front-end filtering of the fifth-generation (5G) wireless communication. The sub-6 GHz resonance in this work is achieved by employing the A1 mode in the micromachined Y-cut Lithium Niobate (LiNbO3) thin films. The spurious modes mitigation is achieved by optimizing the distribution of the electric field. The demonstrated figure-of-merit (FoM = Q ⋅ kt2) of 435 marks the first time that a new resonator technology with the FoMs exceeds those of surface acoustic wave (SAW) resonators and thin-film bulk acoustic resonators (FBARs) in the sub-6 GHz (1–6 GHz) frequency range. [2019-0241] [ABSTRACT FROM AUTHOR]

Published
2020
Full Text
View/download PDF

Catalog

Books, media, physical & digital resources
See catalog results