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In microfluidic chips, glass free-form microchannels have obvious advantages in thermochemical stability and biocompatibility compared to polymer-based channels, but they face challenges in processing morphology and quality. Hence, picosecond laser etching with galvanometer scanning is proposed to machine spiral microfluidic channels on a glass substrate. The objective is to disperse and sort microparticles from a glass microchip that is difficult to cut. First, the micropillar array and the spiral microchannel were designed to disperse and sort the particles in microchips, respectively; then, a scanning path with a scanning interval of 5 μm was designed according to the spot diameter in picosecond laser etching; next, the effects of laser power, scanning speed and accumulation times were experimentally investigated regarding the morphology of spiral microchannels; finally, the microfluidic flowing test with 5 μm and 10 μm microparticles was performed to analyze the dispersing and sorting performance. It was shown that reducing the laser power and accumulation times alongside increasing the scanning speed effectively reduced the channel depth and surface roughness. The channel surface roughness reached about 500 nm or less when the laser power was 9 W, the scanning speed was 1000 mm/s, and the cumulative number was 4. The etched micropillar array, with a width of 89 μm and an interval of 97 μm, was able to disperse the different microparticles into the spiral microchannel. Moreover, the spiral-structured channel, with an aspect ratio of 0.51, significantly influenced the velocity gradient distribution, particle focusing, and stratification. At flow rates of 300–600 μL/min, the microparticles produced stable focusing bands. Through the etched microchip, mixed 5 μm and 10 μm microparticles were sorted by stable laminar flow at flow rates of 400–500 μL/min. These findings contribute to the design and processing of high-performance glass microfluidic chips for dispersion and sorting. [ABSTRACT FROM AUTHOR]

Investigating the optimal laser processing parameters for industrial purposes can be time-consuming. Moreover, an exact analytic model for this purpose has not yet been developed due to the complex mechanisms of laser processing. The main goal of this study was the development of a backpropagation neural network (BPNN) with a grey wolf optimization (GWO) algorithm for the quick and accurate prediction of multi-input laser etching parameters (energy, scanning velocity, and number of exposures) and multioutput surface characteristics (depth and width), as well as to assist engineers by reducing the time and energy require for the optimization process. The Keras application programming interface (API) Python library was used to develop a GWO-BPNN model for predictions of laser etching parameters. The experimental data were obtained by adopting a 30 W laser source. The GWO-BPNN model was trained and validated on experimental data including the laser processing parameters and the etching characterization results. The R2 score, mean absolute error (MAE), and mean squared error (MSE) were examined to evaluate the prediction precision of the model. The results showed that the GWO-BPNN model exhibited excellent accuracy in predicting all properties, with an R2 value higher than 0.90. [ABSTRACT FROM AUTHOR]

A novel five-surface phosphor-in-glass (FS-PiG) structure for high illumination and excellent color uniformity in large-view scale LEDs for sensor light source application is demonstrated. YAG phosphor (Y3Al5O12:Ce3+) was uniformly mixed with ceramic and sintered at 680 °C to form a phosphor wafer. Sophisticated laser engraving was employed on the phosphor wafer to form saddle-shaped large-view scale FS-PiG LEDs. The performance of the FS-PiG LEDs exhibited an illumination of 401 lm, average color temperature (CCT) of 5488 K ± 110 K, and color coordinates (CIE) of (0.3179 ± 0.003, 0.3352 ± 0.003). In contrast to convention single-surface phosphor-in-glass (SS-PiG) LEDs, the performance exhibited an illumination of 380 lm, average CCT of 5830 K ± 758 K, and CIE of (0.3083 ± 0.07, 0.3172 ± 0.07). These indicated that the performance of the FS-PiG LEDs was higher than the SS-PiG LEDs for illumination, CCT, and CIE by 1.7, 7, and 23 times, respectively. Furthermore, the FS-PiG LEDs demonstrate a lower lumen loss of 2% and a reduced chromaticity shift of 5.4 × 10−3 under accelerated aging at 350 °C for 1008 h, owing to the high ceramic melting temperature of up to 510 °C. In this study, the proposed FS-PiG large-view scale LEDs with excellent optical performance and high reliability may be promising candidates to replace the conventional phosphor-in-organic silicone material used in high-power LEDs for the next generation of sensor light sources, display, and headlight applications. [ABSTRACT FROM AUTHOR]

Hydrophobic surfaces have attracted great attention due to their ability to repel water, and metallic surfaces are particularly significant as they have several benefits, for example they self-clean and do not corrode in marine environments, but also have several applications in the aircraft, building and automobile industries. Tungsten is an ideal material for metallic surfaces due to its remarkable mechanical properties. However, conventional micromachining methods of micro- or nanostructures, including mechanical fabrication and laser and wet etching are incapable of balancing functionality, consistency and cost. Inspired by the etching process of silicon, deep etching of bulk tungsten has been developed to achieve versatile microstructures with the advantages of high efficiency, large scale and low cost. In this article, fabrication methods of tungsten-based hydrophobic surfaces using an ICP deep etching process were proposed. Micro- or hierarchical structure arrays with controllable sidewall profiles were fabricated by optimizing etching parameters, which then exhibited hydrophobicity with contact angles of up to 131.8°. [ABSTRACT FROM AUTHOR]

A perfluoropolyether (PFPE)-based microfluidic device with cross-junction microchannels was fabricated with the purpose of producing uniform droplets. The microchannels were developed using CO2 laser engraving. PFPE was chosen as the main material because of its excellent solvent resistance. Polyethylene glycol diacrylate (PEGDA) was mixed with PFPE to improve the hydrophilic properties of the inner surface of the microchannels. The microchannels of the polydimethylsiloxane microfluidic device had a blackened and rough surface after laser engraving. By contrast, the inner surface of the microchannels of the PFPE-PEGDA microfluidic device exhibited a smooth surface. The lower power and faster speed of the laser engraving resulted in the development of microchannels with smaller dimensions, less than 30 μm in depth. The PFPE and PFPE-PEGDA microfluidic devices were used to produce uniform water and oil droplets, respectively. We believe that such a PFPE-based microfluidic device with CO2-laser-engraved microchannels can be used as a microfluidic platform for applications in various fields, such as biological and chemical analysis, extraction, and synthesis. [ABSTRACT FROM AUTHOR]

This research focuses on the manufacturing of a glass interposer that has gone through glass via (TGV) connection holes. Glass has unique properties that make it suitable for 3D integrated circuit (IC) interposers, which include low permittivity, high transparency, and adjustable thermal expansion coefficient. To date, various studies have suggested numerous techniques to generate holes in glass. In this study, we adopt the selective laser etching (SLE) technique. SLE consists of two processes: local modification via an ultrashort pulsed laser and chemical etching. In our previous study, we found that the process speed can be enhanced by changing the local modification method. For further enhancement in the process speed, in this study, we focus on the chemical etching process. In particular, we try to find a proper etchant for TGV formation. Here, four different etchants (HF, KOH, NaOH, and NH4F) are compared in order to improve the etching speed. For a quantitative comparison, we adopt the concept of selectivity. The results show that NH4F has the highest selectivity; therefore, we can tentatively claim that it is a promising candidate etchant for generating TGV. In addition, we also observe a taper angle variation according to the etchant used. The results show that the taper angle of the hole is dependent on the concentration of the etchant as well as the etchant itself. These results may be applicable to various industrial fields that aim to adjust the taper angle of holes. [ABSTRACT FROM AUTHOR]

Selective laser etching is a promising candidate for the mass production of glass interposers. It comprises two steps: local modification by an ultrashort-pulsed laser and chemical etching of the modified volume. According to previous studies, when an ultrashort-pulsed laser beam is irradiated on the sample, electron excitation occurs, followed by phonon vibration. In general, the electron excitation occurs for less than a few tens of picoseconds and phonon vibration occurs for more than 100 picoseconds. Thus, in order to compare the electric absorption and thermal absorption of photons in the commercial glass, we attempt to implement an additional laser pulse of 213 ps and 10 ns after the first pulse. The modified glass sample is etched with 8 mol/L KOH solution with 110 °C to verify the effect. Here, we found that the electric absorption of photons is more effective than the thermal absorption of them. We can claim that this result helps to enhance the process speed of TGV generation. [ABSTRACT FROM AUTHOR]

Trapezoidal cross-sectional spiral microfluidic channels showed high resolution and throughput in cell separation in bio-applications. The main challenges are the complexity and high cost of the fabrication process of trapezoidal cross-sectional channels on the micro-scale. In this work, we present the application of grayscale in microfluidic channel design to overcome the complexity of the fabrication process. We also use direct engraving with a CO2 laser beam on polymethyl methacrylate (PMMA) material to drastically reduce the microfluidic chip's cost (to <30 cents) and fabrication time (to 20 min). The capability of the present fabrication methodology for cell sorting applications is demonstrated through experimental tests for the separation of white blood cells (WBCs) from whole blood at different dilution factors. The experimental results indicated that an 800 µL/min flow rate provided the optimal separation efficiency using the fabricated chip. A 90.14% separation efficiency at 1% hematocrit diluted blood sample was reported. [ABSTRACT FROM AUTHOR]

A perfluoropolyether (PFPE)-based microfluidic device with cross-junction microchannels was fabricated with the purpose of producing uniform droplets. The microchannels were developed using CO2 laser engraving. PFPE was chosen as the main material because of its excellent solvent resistance. Polyethylene glycol diacrylate (PEGDA) was mixed with PFPE to improve the hydrophilic properties of the inner surface of the microchannels. The microchannels of the polydimethylsiloxane microfluidic device had a blackened and rough surface after laser engraving. By contrast, the inner surface of the microchannels of the PFPE-PEGDA microfluidic device exhibited a smooth surface. The lower power and faster speed of the laser engraving resulted in the development of microchannels with smaller dimensions, less than 30 μm in depth. The PFPE and PFPE-PEGDA microfluidic devices were used to produce uniform water and oil droplets, respectively. We believe that such a PFPE-based microfluidic device with CO2-laser-engraved microchannels can be used as a microfluidic platform for applications in various fields, such as biological and chemical analysis, extraction, and synthesis.

In laser etching of ITO glass, the warpage due to workpiece positioning causes breakpoint or deformation of micron-scale etching circuits. Based on traditional laser etching, a micro-airflow array pressurization is proposed by using a micro-flow air bearing through airflow positioning. The objective is to achieve high-precision laser etching by pressurized micro-deformation of ITO glass during positioning. First, the micro-air flow and pressurized micro-deformation were modelled in relation to the airflow pressure and etching gap in order to analyze the flatness variation behavior. Then, the surface flatness was investigated in relation to the airflow parameters and relative bearing location. Finally, the critical value of the pressurization parameter were calculated using a data-twin and were applied to industrial ITO glass etching. It is shown that the uniform flow pressure distribution and surface central micro-deformation were formed by positive airflow pressure in the airflow area. The airflow pressure and etching gap could promote surface flatness, while excessive values could result in excessive deformation. Under the micro flow pressure, the initial flatness of the workpiece was able to be compensated within the critical pressurization parameter. By controlling the micro flow stress, the micro-airflow array pressurization could reduce the flatness to 22 μm with stress of 10.7–12.6 Pa. In industrial production, the surface fine circuits can be laser etched with an optimized micro flow pressure, which solves the problems of local breaks or deformed circuits due to the conventional etching process and the structural layout. [ABSTRACT FROM AUTHOR]

The self-cleaning ability of superhydrophobic metal surfaces has attracted extensive attention. The preparation of superhydrophobic material using the coating method is a common processing method. In this experiment, aluminum fins were processed by laser etching and perfluorinated two-step coating. The aluminum surface was modified using a femtosecond laser and 1H,1H,2H,2H- perfluorooctane triethoxysilane (PFOTES). A superhydrophobic aluminum surface with excellent mechanical stability and self-cleaning properties was obtained with the superhydrophobic contact angle (WCA) of 152.8° and the rolling angle (SA) of 0.6°. The results show that the superhydrophobic surface has an excellent cleaning effect compared with an ordinary surface in unit time. Then, a wear resistance test of the superhydrophobic surface was carried out by using the physical wear method. The results show that physical wear had a low influence on the hydrophobic property of the specimen surface. Finally, the Vickers hardness analysis found that the superhydrophobic surface hardness was significantly better than the ordinary surface hardness compared with the superhydrophobic surface hardness. Based on the excellent self-cleaning properties, wear resistance, and robustness of superhydrophobic materials, the laser-etched and perfluorinated superhydrophobic aluminum fins designed and manufactured in this study have broad application prospects in improving the heat transfer efficiency of finned heat exchangers. [ABSTRACT FROM AUTHOR]

Due to material plastic deformation and current leakage at high temperatures, SOI (silicon-on-insulator) and SOS (silicon-on-sapphire) pressure sensors have difficulty working over 500 °C. Silicon carbide (SiC) is a promising sensor material to solve this problem because of its stable mechanical and electrical properties at high temperatures. However, SiC is difficult to process which hinders its application as a high-temperature pressure sensor. This study proposes a piezoresistive SiC pressure sensor fabrication method to overcome the difficulties in SiC processing, especially deep etching. The sensor was processed by a combination of ICP (inductive coupled plasma) dry etching, high-temperature rapid annealing and femtosecond laser deep etching. Static and dynamic calibration tests show that the accuracy error of the fabricated sensor can reach 0.33%FS, and the dynamic signal response time is 1.2 μs. High and low temperature test results show that the developed sensor is able to work at temperatures from −50 °C to 600 °C, which demonstrates the feasibility of the proposed sensor fabrication method. [ABSTRACT FROM AUTHOR]

The proposed lubrication theory of textured journal bearing is a major innovation in the study of the tribological properties of surface morphology. When it comes to the study of surface topography, it is essential to consider the effect of surface roughness when analyzing the characteristics of journal bearing. In this paper, a Reynolds equation containing longitudinal roughness is established for journal bearing and solved by the finite difference principle to obtain the bearing load and friction characteristics. Subsequently, a combination of laser etching and ultrasonic vibration milling processes was used to prepare 5 µm, 20 µm, and 40 µm bearing friction subsets with square micro-texture surfaces. The analysis of the results shows that the surface roughness distributed in the non-texture region can substantially increase the oil film pressure. When the roughness profile and the surface weave work together, the presence of a surface texture with an optimum depth of 5 µm within a roughness range of less than 1.6 µm can improve the load-bearing characteristics by a maximum of 43%. In the study of the preparation of textured bearing friction substrate, it was found that laser etching can ablate the surface of the friction substrate to a depth greater than 20 µm with the ideal effect, while the surface texturing to a depth of 5 µm is more suitable using an ultrasonic vibration processing process. In the simplified journal bearing operating condition, the frictional wear test shows that if the effect of roughness is considered, the frictional force of the depth of 20 µm and 40 µm is significantly reduced and changes less with increasing load, while the frictional force of the textured frictional pair with a depth of 5 µm is improved but significantly affected by the load carrying capacity. Therefore, when the difference between the roughness profile and the depth of the texture is of a small order of magnitude, it indicates that the effect caused by the roughness factor is not negligible. [ABSTRACT FROM AUTHOR]

Transparent and high-hardness materials have become the object of wide interest due to their optical and mechanical properties; most notably, concerning technical glasses and crystals. A notable example is sapphire—one of the most rigid materials having impressive mechanical stability, high melting point and a wide transparency window reaching into the UV range, together with impressive laser-induced damage thresholds. Nonetheless, using this material for 3D micro-fabrication is not straightforward due to its brittle nature. On the microscale, selective laser etching (SLE) technology is an appropriate approach for such media. Therefore, we present our research on C-cut crystalline sapphire microprocessing by using femtosecond radiation-induced SLE. Here, we demonstrate a comparison between different wavelength radiation (1030 nm, 515 nm, 343 nm) usage for material modification and various etchants (hydrofluoric acid, sodium hydroxide, potassium hydroxide and sulphuric and phosphoric acid mixture) comparison. Due to the inability to etch crystalline sapphire, regular SLE etchants, such as hydrofluoric acid or potassium hydroxide, have limited adoption in sapphire selective laser etching. Meanwhile, a 78% sulphuric and 22% phosphoric acid mixture at 270 °C temperature is a good alternative for this process. We present the changes in the material after the separate processing steps. After comparing different processing protocols, the perspective is demonstrated for sapphire structure formation. [ABSTRACT FROM AUTHOR]

To ensure the consistency of laser engraving depth in chemical milling, the precise control of 5-axis variable-angle laser engraving was the focus of research. Based on the energy conservation principle, the depth model of 5-axis variable-angle laser engraving is established, and the relationships among the laser engraving depth, laser power, scanning velocity, and beam axis angle are proposed. A depth-constraint real-time adaptive control method of laser power is proposed considering the variable scanning velocity and beam axis angles. The depth model parameters are identified by an orthogonal experiment, and a variable-angle laser engraving experiment with adaptive control of laser power is carried out. The coefficient of determination of the proposed depth model is 0.977, which means that the engraving depth model established in this paper predicts the engraving depth effectively and reliably. The depth-constraint adaptive control method of laser power obtains stable and uniform machining results under abrupt changes in scanning velocity and beam axis angles. [ABSTRACT FROM AUTHOR]

Indium tin oxide (ITO)-based digital microfluidics (DMF) with unique optical and electrical properties are promising in the development of integrated, automatic and portable analytical systems. The fabrication technique using laser direct etching (LDE) on ITO glass has the advantages of being rapid, low cost and convenient. However, the fabrication resolution of LDE limits the minimum line width for patterns on ITO glasses, leading to a related wider lead wire for the actuating electrodes of DMF compared with photolithography. Therefore, the lead wire of electrodes could affect the droplet motion on the digital microfluidic chip due to the increased contact line with the droplet. Herein, we developed a finite element model of a DMF with improved efficiency to investigate the effect of the lead wire. An optimized electrode pattern was then designed based on a theoretical analysis and validated by a simulation, which significantly decreased the deformation of the droplets down to 0.012 mm. The performance of the optimized electrode was also verified in an experiment. The proposed simulation method could be further extended to other DMF systems or applications to provide an efficient approach for the design and optimization of DMF chips. [ABSTRACT FROM AUTHOR]

Wearable fabric sensors have attracted enormous attention due to their huge potential in human health and activity monitoring, human–machine interaction and the Internet of Things (IoT). Among natural fabrics, bast fabric has the advantage of high strength, good resilience and excellent permeability. Laser engraving, as a high throughput, patternable and mask-free method, was demonstrated to fabricate fabric sensors. In this work, we developed a simplified, cost-effective and environmentally friendly method for engraving ramie fabric (a kind of bast fabric) directly by laser under an ambient atmosphere to prepare strain and humidity sensors. We used carboxymethylcellulose (CMC) to pretreat ramie fabric before laser engraving and gained laser-carbonized ramie fabrics (LCRF) with high conductivity (65 Ω sq−1) and good permeability. The strain and humidity sensors had high sensitivity and good flexibility, which can be used for human health and activity monitoring. [ABSTRACT FROM AUTHOR]

Carbon origami enables the fabrication of lightweight and mechanically stiff 3D complex architectures of carbonaceous materials, which have a high potential to impact a wide range of applications positively. The precursor materials and their inherent microstructure play a crucial role in determining the properties of carbon origami structures. Here, non-porous polyaramid Nomex sheets and macroporous fibril cellulose sheets are explored as the precursor sheets for studying the effect of precursor nature and microstructure on the material and structural properties of the carbon origami structures. The fabrication process involves pre-creasing precursor sheets using a laser engraving process, followed by manual-folding and carbonization. The cellulose precursor experiences a severe structural shrinkage due to its macroporous fibril morphology, compared to the mostly non-porous morphology of Nomex-derived carbon. The morphological differences further yield a higher specific surface area for cellulose-derived carbon. However, Nomex results in more crystalline carbon than cellulose, featuring a turbostratic microstructure like glassy carbon. The combined effect of morphology and glass-like features leads to a high mechanical stiffness of 1.9 ± 0.2 MPa and specific modulus of 2.4 × 104 m2·s−2 for the Nomex-derived carbon Miura-ori structure, which are significantly higher than cellulose-derived carbon Miura-ori (elastic modulus = 504.7 ± 88.2 kPa; specific modulus = 1.2 × 104 m2·s−2) and other carbonaceous origami structures reported in the literature. The results presented here are promising to expand the material library for carbon origami, which will help in the choice of suitable precursor and carbon materials for specific applications. [ABSTRACT FROM AUTHOR]

Wearable fabric sensors have attracted enormous attention due to their huge potential in human health and activity monitoring, human–machine interaction and the Internet of Things (IoT). Among natural fabrics, bast fabric has the advantage of high strength, good resilience and excellent permeability. Laser engraving, as a high throughput, patternable and mask-free method, was demonstrated to fabricate fabric sensors. In this work, we developed a simplified, cost-effective and environmentally friendly method for engraving ramie fabric (a kind of bast fabric) directly by laser under an ambient atmosphere to prepare strain and humidity sensors. We used carboxymethylcellulose (CMC) to pretreat ramie fabric before laser engraving and gained laser-carbonized ramie fabrics (LCRF) with high conductivity (65 Ω sq−1) and good permeability. The strain and humidity sensors had high sensitivity and good flexibility, which can be used for human health and activity monitoring.

Recently published studies have shown that microfluidic devices fabricated by in-house three-dimensional (3D) printing, computer numerical control (CNC) milling and laser engraving have a good quality of performance. The 3-in-1 3D printers, desktop machines that integrate the three primary functions in a single user-friendly set-up are now available for computer-controlled adaptable surface processing, for less than USD 1000. Here, we demonstrate that 3-in-1 3D printer-based micromachining is an effective strategy for creating microfluidic devices and an easier and more economical alternative to, for instance, conventional photolithography. Our aim was to produce plastic microfluidic chips with engraved microchannel structures or micro-structured plastic molds for casting polydimethylsiloxane (PDMS) chips with microchannel imprints. The reproducability and accuracy of fabrication of microfluidic chips with straight, crossed line and Y-shaped microchannel designs were assessed and their microfluidic performance checked by liquid stream tests. All three fabrication methods of the 3-in-1 3D printer produced functional microchannel devices with adequate solution flow. Accordingly, 3-in-1 3D printers are recommended as cheap, accessible and user-friendly tools that can be operated with minimal training and little starting knowledge to successfully fabricate basic microfluidic devices that are suitable for educational work or rapid prototyping.

Femtosecond laser engraving offers appealing advantages compared to regular laser engraving such as higher precision and versatility. In particular, the inscription of deep patterns exhibits an increasing interest in industry. In this work, an optimization protocol based on constraining overlap ratio and scan number is demonstrated. The proposed method allows changing overlap ratio while maintaining depth in the same range, which reduces the sampling number. This study WAS applied to stainless steel 316 L and sapphire for engravings deeper than 100 μm. Results exhibit overall depths higher than threshold values and allowed to determine optimized engraving quality, for instance, roughness in steel can be reduced while maintaining depth and taper angle by reducing overlap ratio. The optimized laser parameters such as roughness and taper angle factors for sapphire were also found to be as follows: 200 kHz, 86% overlap and 12 J/cm2. As a demonstration, a logo engraving is illustrated at the end.

Microfluidic automation technology is at a stage where the complexity and cost of external hardware control often impose severe limitations on the size and functionality of microfluidic systems. Developments in autonomous microfluidics are intended to eliminate off-chip controls to enable scalable systems. Timing is a fundamental component of the digital logic required to manipulate fluidic flow. The authors present a self-driven pneumatic ring oscillator manufactured by assembling an elastomeric sheet of polydimethylsiloxane (PDMS) between two laser-engraved polymethylmethacrylate (PMMA) layers via surface activation through treatment with 3-aminopropyltriethoxysilane (APTES). The frequency of the fabricated oscillators is in the range of 3-7.5 Hz with a maximum of 14 min constant frequency syringe-powered operation. The control of a fluidic channel with the oscillator stages is demonstrated. The fabrication process represents an improvement in manufacturability compared to previous molding or etching approaches, and the resulting devices are inexpensive and portable, making the technology potentially applicable for wider use. [ABSTRACT FROM AUTHOR]

Microfluidic automation technology is at a stage where the complexity and cost of external hardware control often impose severe limitations on the size and functionality of microfluidic systems. Developments in autonomous microfluidics are intended to eliminate off-chip controls to enable scalable systems. Timing is a fundamental component of the digital logic required to manipulate fluidic flow. The authors present a self-driven pneumatic ring oscillator manufactured by assembling an elastomeric sheet of polydimethylsiloxane (PDMS) between two laser-engraved polymethylmethacrylate (PMMA) layers via surface activation through treatment with 3-aminopropyltriethoxysilane (APTES). The frequency of the fabricated oscillators is in the range of 3–7.5 Hz with a maximum of 14 min constant frequency syringe-powered operation. The control of a fluidic channel with the oscillator stages is demonstrated. The fabrication process represents an improvement in manufacturability compared to previous molding or etching approaches, and the resulting devices are inexpensive and portable, making the technology potentially applicable for wider use.

In order to engrave gravure plate with fine lines structures, conventional art used lithography with dry/wet etching. Lithography with dry/wet etching method allows to engrave lines with smooth concave shape, but its disadvantages include difficulty in controlling aspect ratio, high and uniform in large size process, substrate material limitation due to etching solution availability, and process complexity. We developed ultra-fast laser technology to directly engrave a stainless plate, a gravure plate, to be used for fabricating 23 in. metal-mesh touch panel by gravure offset printing process. The technology employs high energy pulse to ablate materials from a substrate. Because the ultra-fast laser pulse duration is shorter than the energy dissipation time between material lattices, there is no heating issue during the ablation process. Therefore, no volcano-type protrusion on the engraved line edges occurs, leading to good printing quality. After laser engraving, we then reduce surface roughness of the gravure plate using electro-polishing process. Diamond like carbon (DLC) coating layer is then added onto the surface to increase scratch resistance. We show that this procedure can fabricate gravure plate for gravure offset printing process with minimum printing linewidth 10.7 μm. A 23 in. metal-mesh pattern was printed using such gravure plate and fully functional touch panel was demonstrated in this work. [ABSTRACT FROM AUTHOR]

Miniaturized flexible microsupercapacitors (MSCs) that can be integrated into self-powered sensing systems, detecting networks, and implantable devices have shown great potential to perfect the stand-alone functional units owing to the robust security, continuously improved energy density, inherence high power density, and long service life. This review summarizes the recent progress made in the development of flexible MSCs and their application in integrated wearable electronics. To meet requirements for the scalable fabrication, minimization design, and easy integration of the flexible MSC, the typical assembled technologies consist of ink printing, photolithography, screen printing, laser etching, etc., are provided. Then the guidelines regarding the electrochemical performance improvement of the flexible MSC by materials design, devices construction, and electrolyte optimization are considered. The integrated prototypes of flexible MSC-powered systems, such as self-driven photodetection systems, wearable sweat monitoring units are also discussed. Finally, the future challenges and perspectives of flexible MSC are envisioned. [ABSTRACT FROM AUTHOR]

Recently published studies have shown that microfluidic devices fabricated by in-house three-dimensional (3D) printing, computer numerical control (CNC) milling and laser engraving have a good quality of performance. The 3-in-1 3D printers, desktop machines that integrate the three primary functions in a single user-friendly set-up are now available for computer-controlled adaptable surface processing, for less than USD 1000. Here, we demonstrate that 3-in-1 3D printer-based micromachining is an effective strategy for creating microfluidic devices and an easier and more economical alternative to, for instance, conventional photolithography. Our aim was to produce plastic microfluidic chips with engraved microchannel structures or micro-structured plastic molds for casting polydimethylsiloxane (PDMS) chips with microchannel imprints. The reproducability and accuracy of fabrication of microfluidic chips with straight, crossed line and Y-shaped microchannel designs were assessed and their microfluidic performance checked by liquid stream tests. All three fabrication methods of the 3-in-1 3D printer produced functional microchannel devices with adequate solution flow. Accordingly, 3-in-1 3D printers are recommended as cheap, accessible and user-friendly tools that can be operated with minimal training and little starting knowledge to successfully fabricate basic microfluidic devices that are suitable for educational work or rapid prototyping. [ABSTRACT FROM AUTHOR]

A quartz crystal resonator (QCR) is an indispensable electronic component in the field of the modern electronics industry. By designing and depositing electrodes of different shapes and thicknesses on a quartz wafer with a certain fundamental frequency, the desired target frequency can be obtained. Affected by factors such as the deposition equipment, mask, wafer size and placement position, it is difficult to accurately obtain the target frequency at a given time, especially for mass-produced QCRs. In this work, a laser with a wavelength of 532 nm was used to thin the electrodes of a QCR with a fundamental frequency of 10 MHz. The electrode surface was etched through a preset processing pattern to form a processing method of local thinning of the electrode surface. At the same time, the effect of laser etching on silicon dioxide and resonator performance was analyzed. Satisfactory trimming frequency-increasing results were achieved, such as a frequency modulation accuracy of 1 ppm, frequency distribution with good consistency and equivalent parameters with small changes, by the laser partial etching of the resonator electrode. However, when the surface electrode was etched into using through-holes, the attenuation amplitude of the equivalent parameter became larger, especially in terms of the quality factor (Q), which decreased from 63 K to 1 K, and some resonators which had a serious frequency drift of >40%. In this case, a certain number of QCRs were no longer excited to vibrate, which was due to the disappearance of the piezoelectric effect caused by the local thermal phase change in the quartz wafer. [ABSTRACT FROM AUTHOR]

With the increasing application field, a higher requirement is put forward for the mass spectrometer. The reduction in size will inevitably cause a loss of precision; therefore, it is necessary to develop a high-performance miniature mass spectrometer. Based on the researches of rectangular ion trap, the relationship between mass resolution and structural parameters of the ion trap array was analyzed by further simulation. The results indicate that, considering the balance of mass resolution and extraction efficiency, the preferable values for the field radius of exit direction y0 and ion exit slot width s0 are 1.61 mm and 200 μm, respectively. Afterwards, a miniature four-channel ion trap array (MFITA) was fabricated, by using MEMS and laser etching technology, and mass spectrometry experiments were carried out to demonstrate its performance. The mass resolution of butyl diacetate with m/z = 230 can reach 324. In addition, the consistency of four channels is verified within the error tolerance, by analyzing air samples. Our work can prove the correctness of the structural design and the feasibility of MEMS preparation for MFITA, which will bring meaningful guidance for its future development and optimization. [ABSTRACT FROM AUTHOR]

Femtosecond laser engraving offers appealing advantages compared to regular laser engraving such as higher precision and versatility. In particular, the inscription of deep patterns exhibits an increasing interest in industry. In this work, an optimization protocol based on constraining overlap ratio and scan number is demonstrated. The proposed method allows changing overlap ratio while maintaining depth in the same range, which reduces the sampling number. This study WAS applied to stainless steel 316 L and sapphire for engravings deeper than 100 μ m. Results exhibit overall depths higher than threshold values and allowed to determine optimized engraving quality, for instance, roughness in steel can be reduced while maintaining depth and taper angle by reducing overlap ratio. The optimized laser parameters such as roughness and taper angle factors for sapphire were also found to be as follows: 200 kHz, 86% overlap and 12 J/cm 2 . As a demonstration, a logo engraving is illustrated at the end. [ABSTRACT FROM AUTHOR]

Nested structures inside the hard material play a pivotal role in the microfluidics systems, such as the microvalve and the micropump. In this article, we demonstrate a novel and facile method of fabricating nested structures inside the fused silica with a two-step process femtosecond laser wet etching (FLWE) process. Inside fused silica, a spherical structure was made with a diameter of nearly 80 µm in a square chamber. In addition, we designed a simple microvalve with this sphere controlling the current's flow. The novel microvalve structure can be easily integrated into the functional microfluidics systems and will be widely applied in the Lab-on-chip (LOC) system. [ABSTRACT FROM AUTHOR]

We describe the manufacture of low-cost microfluidic systems to produce nanoscale liposomes with highly uniform size distributions (i.e., low polydispersity indexes (PDI)) and acceptable colloidal stability. This was achieved by exploiting a Y-junction device followed by a serpentine micromixer geometry to facilitate the diffusion between the mixing phases (i.e., continuous and dispersed) via advective processes. Two different geometries were studied. In the first one, the microchannels were engraved with a laser cutting machine on a polymethyl methacrylate (PMMA) sheet and covered with another PMMA sheet to form a two-layer device. In the second one, microchannels were not engraved but through-hole cut on a PMMA sheet and encased by a top and a bottom PMMA sheet to form a three-layer device. The devices were tested out by putting in contact lipids dissolved in alcohol as the dispersed phase and water as the continuous phase to self-assemble the liposomes. By fixing the total flow rate (TFR) and varying the flow rate ratio (FRR), we obtained most liposomes with average hydrodynamic diameters ranging from 188 ± 61 to 1312 ± 373 nm and 0.30 ± 0.09 PDI values. Such liposomes were obtained by changing the FRR from 5:1 to 2:1. Our results approached those obtained by conventional bulk synthesis methods such as a thin hydration bilayer and freeze-thaw, which produced liposomes with diameters ranging from 200 ± 38 to 250 ± 38 nm and 0.30 ± 0.05 PDI values. The produced liposomes might find several potential applications in the biomedical field, particularly in encapsulation and drug delivery. [ABSTRACT FROM AUTHOR]

Paper-based microfluidic devices are an attractive platform for developing low-cost, point-of-care diagnostic tools. As paper-based devices' detection chemistries become more complex, more complicated devices are required, often entailing the sequential delivery of different liquids or reagents to reaction zones. Most research into flow control has been focused on introducing delays. However, delaying the flow can be problematic due to increased evaporation leading to sample loss. We report the use of a CO2 laser to uniformly etch the surface of the paper to modify wicking speeds in paper-based microfluidic devices. This technique can produce both wicking speed increases of up to 1.1× faster and decreases of up to 0.9× slower. Wicking speeds can be further enhanced by etching both sides of the paper, resulting in wicking 1.3× faster than unetched channels. Channels with lengthwise laser-etched grooves were also compared to uniformly etched channels, with the most heavily grooved channels wicking 1.9× faster than the fastest double-sided etched channels. Furthermore, sealing both sides of the channel in packing tape results in the most heavily etched channels, single-sided, double-sided, and grooved, wicking over 13× faster than unetched channels. By selectively etching individual channels, different combinations of sequential fluid delivery can be obtained without altering any channel geometry. Laser etching is a simple process that can be integrated into the patterning of the device and requires no additional materials or chemicals, enabling greater flow control for paper-based microfluidic devices. [ABSTRACT FROM AUTHOR]