1. Low-loss microwave filters on CMOS-grade standard silicon substrate with low-k BCB dielectric.
- Author
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Leung, Lydia L. W., Chen, Kevin J., Huo, Xiao, and Chan, Philip C. H.
- Subjects
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MICROWAVE filters , *MICROWAVE devices , *WAVEGUIDES , *DIELECTRICS , *STRIP transmission lines - Abstract
Benzocyclobutene (BCB), a low-k, photosensitive, easily patterned material is used as the interfacing layer that isolates the passive components from the lossy, low-resistivity silicon. Its performance is further improved by reducing the conductive loss with an electroplated and highly-conductive metal, namely, copper. Standard 50-Ω microstrip lines and a microstrip-transmission-line-based microwave filter, exhibiting insertion losses of 0.8 dB and 1.1 dB at 10 GHz, respectively, are demonstrated. © 2004 Wiley Periodicals, Inc. Microwave Opt Technol Lett 40: 9–11, 2004; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.11271 [ABSTRACT FROM AUTHOR]
- Published
- 2004
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