Search

Your search keyword '"Víctor J. Rico"' showing total 6 results
Start Over Author "Víctor J. Rico" Journal plasma processes and polymers
6 results on '"Víctor J. Rico"'

1. Stoichiometric Control of SiOxThin Films Grown by Reactive Magnetron Sputtering at Oblique Angles

Author

Ramón Escobar-Galindo, Aurelio García-Valenzuela, Agustín R. González-Elipe, Elena Guillén, Rafael Alvarez, Carmen López-Santos, Francisco J. Ferrer, Víctor J. Rico, Mercedes Alcon-Camas, and Alberto Palmero

Subjects
010302 applied physics, Reactive magnetron, Materials science, Polymers and Plastics, Oblique case, 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Engineering physics, Sputtering, 0103 physical sciences, Christian ministry, Thin film, 0210 nano-technology, Silicon oxide, Stoichiometry
Abstract

The authors thank the Junta de Andalucia (P12-FQM-2265) and the Spanish Ministry of Economy and Competitiveness (Projects MAT2013-42900-P, MAT2013-40852-R, MINECO-CSIC 201560E055) for financial support.

Published
2016

2. High-Rate Deposition of Stoichiometric Compounds by Reactive Magnetron Sputtering at Oblique Angles

Author

Mercedes Alcon-Camas, Alberto Palmero, Elena Guillén, Francisco J. Ferrer, Carmen López-Santos, Víctor J. Rico, Ramón Escobar-Galindo, Rafael Alvarez, Aurelio García-Valenzuela, and Agustín R. González-Elipe

Subjects
010302 applied physics, Materials science, Polymers and Plastics, Metallurgy, 02 engineering and technology, Sputter deposition, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Titanium oxide, Amorphous solid, Sputtering, 0103 physical sciences, Deposition (phase transition), Growth rate, Composite material, Thin film, 0210 nano-technology, Stoichiometry
Abstract

Target poisoning in reactive magnetron sputtering deposition of thin films is an undesired phenomenon, well known for causing a drastic fall of the process efficiency. We demonstrate that when this technique is operated at oblique angles, films with composition raging from pure metallic to stoichiometric compound can be grown in non-poisoned conditions, thus avoiding most of the associated drawbacks. We have employed amorphous TiOx, although the presented results can be easily extrapolated to other materials and conditions. It is found that the proposed method improves 400% the growth rate of TiO2 thin films.

Published
2016

3. Modulating Low Energy Ion Plasma Fluxes for the Growth of Nanoporous Thin Films

Author

Francisco J. Ferrer, Víctor J. Rico, Alberto Palmero, Agustín R. González-Elipe, Rafael Alvarez, Carmen López-Santos, and José Cotrino

Subjects
Low energy, Materials science, Polymers and Plastics, Nanoporous, Nanotechnology, Christian ministry, Plasma, Thin film, Condensed Matter Physics, Ion
Abstract

The authors thank the Junta de Andalucia (P12-FQM-2265 and P10-FQM-6900) and the Ministry of Science and Innovation (Projects CONSOLIDER CSD2008-00023, MAT2013-42900-P, MAT2013-40852-R) for financial support.

Published
2015

4. On the Deposition Rates of Magnetron Sputtered Thin Films at Oblique Angles

Author

Maria C. López-Santos, José Miguel García-Martín, Agustín R. González-Elipe, José Cotrino, Rafael Alvarez, Alberto Palmero, Francisco J. Ferrer, and Víctor J. Rico

Subjects
Materials science, Optics, Polymers and Plastics, business.industry, Cavity magnetron, Oblique case, Sputter deposition, Thin film, Condensed Matter Physics, business, Engineering physics, Deposition (chemistry)
Abstract

We thank the Junta de Andalucia (Projects P09-CTS-5189, TEP5283, P12-FQM-2265 and FQM-6900) and the Spanish MINECO (Projects CONSOLIDER CSD2008-00023, MAT2010-21228, MAT2010-18447, MAT2011-29194-C02-01) for financial support.

Published
2014

5. Cover Picture: Plasma Process. Polym. 10∕2016

Author

Rafael Alvarez, Mercedes Alcon-Camas, Aurelio García-Valenzuela, Alberto Palmero, Elena Guillén, Francisco J. Ferrer, Víctor J. Rico, Carmen López-Santos, Agustín R. González-Elipe, and Ramón Escobar-Galindo

Subjects
010302 applied physics, Materials science, Polymers and Plastics, 0103 physical sciences, Process (computing), Mechanical engineering, Cover (algebra), Plasma, Condensed Matter Physics, 01 natural sciences, 010305 fluids & plasmas
Published
2016

6. Cover Picture: Plasma Process. Polym. 6∕2014

Author

José Cotrino, Maria C. López-Santos, Agustín R. González-Elipe, Alberto Palmero, Rafael Alvarez, José Miguel García-Martín, Francisco J. Ferrer, and Víctor J. Rico

Subjects
Materials science, Polymers and Plastics, Process (computing), Mechanical engineering, Cover (algebra), Plasma, Condensed Matter Physics
Published
2014

Catalog

Books, media, physical & digital resources
See catalog results