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Your search keyword '"Phillips, Mark"' showing total 90 results

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90 results on '"Phillips, Mark"'

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1. Soft x-ray: novel metrology for 3D profilometry and device pitch overlay

3. The compact Doppler magnetograph (CDM) for solar polar missions and space weather research

4. STROBE-X: capturing the universe in motion

6. Qualification of small alignment mark by on-product overlay performance

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