1. High-sensitivity chip calorimeter platform for sub-nano watt thermal measurement.
- Author
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Koh, Joonyoung, Lee, Wonhee, and Shin, Jung H.
- Subjects
- *
CALORIMETERS , *VANADIUM compounds , *ELECTRIC properties of thin films , *MICROFLUIDIC devices , *ELECTRIC properties of silicon nitride - Abstract
High sensitivity, on-chip calorimeter platform using V 2 O 5 thin film thermistor was developed. Integration of a V 2 O 5 thermistor with a high temperature sensitivity of −2.2%/K with a vacuum insulated, suspended SiN membrane structure enabled a low thermal conductance of 12 μW/K and a direct detection of 10 nW of heat with an estimated detection limit of 570 pW. We also investigated the feasibility of integrating the platform with a microfluidic system, and, suggest that, based on numerical simulations, a further 5-fold lowering of detection limit may be possible. [ABSTRACT FROM AUTHOR]
- Published
- 2016
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