5 results on '"Shinya Kumagai"'
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2. T1601-3-4 Aperture Effect in Spray Coating of Photoresist
3. T1602-3-1 Metal-Induced Lateral Crystallization Using Ni Ferritin Supramolecules to Increase Tensile Stress in Si Film for MEMS
4. J1101-1-2 An Understanding the Pull-in Phenomenon through the Simulation of Micro Mirror of Gap-closing Electrostatic Type by Macro Model
5. T0502-2-5 Flow Analysis for Spray Coating of Photoresist
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