1. Improved thermal stability and power consumption performances of Ge1Sb9 phase change thin films via doping yttrium.
- Author
-
Xu, Shengqing, Wu, Weihua, Gu, Han, Zhou, Xiaochen, Shen, Bo, and Zhai, Jiwei
- Subjects
- *
THIN films , *PHASE change materials , *PHASE change memory , *THERMAL stability , *YTTRIUM , *PHASE transitions - Abstract
The effect of yttrium doping on the phase transition properties and crystal structure of Ge1Sb9 thin films was studied. Y-doped Ge1Sb9 thin films have higher crystallization temperature (218 °C) and data retention capacity (141.2 °C for 10 years), revealing that Y doping improves amorphous thermal stability. X-ray diffraction and X-ray photoelectron spectroscopy analysis show that the addition of yttrium could inhibit grain growth and restrict the grain size due to the formation of amorphous Y and Ge components. X-ray reflectivity results show that yttrium doping results in less volume change, which predicts the enhanced performance stability of the device. A T-shaped phase change memory cell based on the Y0.26(Ge1Sb9)0.74 films exhibits a faster operation speed (100 ns) and lower power consumption (2.4 × 10−10 J) than traditional Ge2Sb2Te5 materials. The results reveal that Y-doped Ge1Sb9 is a phase change memory material with good structural properties and device performance. [ABSTRACT FROM AUTHOR]
- Published
- 2022
- Full Text
- View/download PDF