9 results on '"Beckx, Stephan"'
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2. Silicon-on-insulator nanophotonics.
3. Overbake: sub-40-nm gate patterning with ArF lithography and binary masks.
4. Low-loss photonic wires and compact ring resonators in silicon-on-insulator.
5. Low Loss Nanophotonic Waveguides and Ring Resonators in Silicon-on-Insulator.
6. Status 157-nm lithography development at IMEC.
7. Large-scale production techniques for photonic nanostructures.
8. Profile control of novel non-Si gates using BCl3/N2 plasma.
9. Influence of oxide hard mask on profiles of sub-100 nm Si and SiGe gates.
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