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This paper reports a 3-dimentional (3D) pressure sensor based on surface acoustic wave (SAW) resonators. The SAW resonators were designed and fabricated on 128°Y-X LiNbO3 substrate using the MEMS technology. The pressure sensing structure was 3D-printed using polyactic acid plastic, and two SAW resonators were integrated in the 3D-printed chamber structure for both temperature and pressure sensing. The SAW-based gas pressure sensors demonstrate a sensitivity of 589 ppm/MPa at the pressure range of 100-600 kPa and temperature of 40 °C.

Clean energy is a major trend. The importance of photovoltaic power generation is also growing. Photovoltaic power generation is mainly affected by the weather. It is full of uncertainties. Previous work has relied chiefly on historical photovoltaics data for time series forecasts. However, unforeseen weather conditions can sometimes skew. Consequently, a spatial‐temporal‐meteorological‐long short‐term memory prediction model (STM‐LSTM) is proposed to compensate for the shortage of photovoltaic prediction models for uncertainties. This model can simultaneously process satellite image data, historical meteorological data, and historical power generation data. In this way, historical patterns and meteorological change information are extracted to improve the accuracy of photovoltaic prediction. STM‐LSTM processes raw satellite data to obtain cloud image data. It can extract cloud motion information using the dense optical flow method. First, the cloud images are processed to extract cloud position information. By adaptive attentive learning of images in different bands, a better representation for subsequent tasks can be obtained. Second, it is important to process historical meteorological data to learn meteorological change patterns. Last but not least, the historical photovoltaic power generation sequences are combined to obtain the final photovoltaic prediction results. After a series of experimental validation, the performance of the proposed STM‐LSTM model has a good improvement compared with the baseline model. [ABSTRACT FROM AUTHOR]

This paper reports a MEMS capacitive pressure sensor (CPS) based on the operating principle of touch mode. The CPS was designed and fabricated using wafer-level self-packaged MEMS processes. The variable capacitance sensing structure was vacuum-sealed in a cavity using the Si–glass anodic bonding technique, and the embedded Al feedthrough lines at the Si–glass interface were used to realize the electrical connections between the parallel plate electrodes and the electrode pads through Al vias. The optimal design of the CPS structure was performed to trade-off the performance and reliability using finite element simulation. The CPS based on a circular-shaped diaphragm with a radius of 2000 µm and a thickness of 40 µm exhibits good comprehensive performance with a sensitivity of 52.3 pF/MPa and a nonlinearity of 2.7%FS in the pressure range of 100–500 kPa when the ambient temperature is less than 50 °C. [ABSTRACT FROM AUTHOR]

In this work, metal-insulator-semiconductor (MIS) capacitor structure was used to investigate the dielectric charging and discharging in the capacitive radio frequency microelectromechanical switches. The insulator in MIS structure is silicon nitride films (SiN), which were deposited by either low pressure chemical vapor deposition (LPCVD) or plasma enhanced chemical vapor deposition (PECVD) processes. Phosphorus or boron ions were implanted into dielectric layer in order to introduce impurity energy levels into the band gap of SiN. The relaxation processes of the injected charges in SiN were changed due to the ion implantation, which led to the change in relaxation time of the trapped charges. In our experiments, the space charges were introduced by stressing the sample electrically with dc biasing. The effects of implantation process on charge accumulation and dissipation in the dielectric are studied by capacitance-voltage (C-V) measurement qualitatively and quantitatively. The experimental results show that the charging and discharging behavior of the ion implanted silicon nitride films deposited by LPCVD is quite different from the one deposited by PECVD. The charge accumulation in the dielectric film can be reduced by ion implantation with proper dielectric deposition method. [ABSTRACT FROM AUTHOR]

The weak photon absorption and high recombination rate of electron-hole pairs in disordered zinc oxide nanowires (ZNWs) limit its application in UV photodetection. This limitation can be overcome by introducing graphene sheets to the ZNWs. Herein we report a high-performance photodetector based on one-dimensional (1D) wide band-gap semiconductor disordered ZNWs composited with reduced graphene oxide (RGO) for ultraviolet (UV) photoresponse enhancement. The RGO/ZNWs composites have been successfully synthetized through UV-assisted photochemical reduction of GO in ZNWs suspension. The material characterizations in morphology, Raman scattering, and Ultraviolet-visible light absorption verified the formation of graphene sheets attached in ZNWs network and the enhancement of UV absorption due to the introduction of graphene. In comparison with photodetectors based on pure ZNWs, the photodetectors based on RGO/ZNWs composite exhibit enhanced photoresponse with photocurrent density of 5.87 mA•cm-2, on/off current ratio of 3.01 x 104, and responsivity of 1.83 A•W-1 when a UV irradiation of 3.26 mW•cm-2 and 1.0 V bias were used. Theory analysis is also presented to get insight into the inherent mechanisms of separation and transportation of photo-excited carriers in RGO/ZNWs composite. [ABSTRACT FROM AUTHOR]

Si OCN ceramics are formed by the thermal decomposition of a polyvinylsilazane precursor in the presence of a dicumyl peroxide ( DP) thermal initiator with different concentrations. The Si OCN ceramics pyrolyzed at 1000°C with different concentrations of DP are characterized with X-ray diffraction, transmission electron microscope, electron paramagnetic resonance, and UV-visible spectroscopy. We find that the structure and optical band gap of the Si OCN ceramics can be changed by altering the concentration of DP. There is a critical concentration, at which the structural and optical behavior varied in different ways as a function of the concentration of DP. The detailed mechanism is discussed. [ABSTRACT FROM AUTHOR]

We report a facile route to synthesize Si CO nanospheres using Pluronic F127/polyvinylsilazane ( PVSZ) mixed micelles as a template, in which PVSZ selectively swells with the PEO core of the F127 micelles. The thermal degradation of the F127/ PVSZ mixed micelles leads to the formation of Si CO nanospheres. The size of the resultant Si CO nanospheres can be tuned in the range from 25 nm to 75 nm by controlling annealing time at 70°C. [ABSTRACT FROM AUTHOR]

Abstract: Transparent conducting oxides CdIn2O4 thin films were prepared by radio-frequency reactive sputtering from a Cd–In alloy target in Ar+O2 atmosphere. By transmission spectrum and Hall measurement for different samples prepared at different substrate temperatures, it could be found that the carrier concentration would increase with the decrease of substrate temperature, but absorption edge showed an abrupt variation from a blue shift to a red shift. Theoretically, the paper formulated the effect of high-density point defects on band structures; it embodied the formation of band tailing, Burstein-Moss shift and band-gap narrowing. The density of holes will influence the magnitude of optical band gap and transmittance of light. Since extrapolation method does not fit degenerate semiconductor materials, a more accurate method of obtaining optical band gap is curve fitting. In addition, ionized impurities scattering is the main damping mechanism of the free electrons in CdIn2O4 films, the density of ionized impurities induced by altering substrate temperature will affect the carriers mobility. [Copyright &y& Elsevier]

This paper presents the design, fabrication, and characterization of a middle-infrared (MIR) linear variable optical filter (LVOF) and thermopile detectors that will be used in a miniaturized mixed gas detector for CH4/CO2/CO measurement. The LVOF was designed as a tapered-cavity Fabry-Pérot optical filter, which can transform the MIR continuous spectrum into multiple narrow band-pass spectra with peak wavelength in linear variation. Multi-layer dielectric structures were used to fabricate the Bragg reflectors on the both sides of tapered cavity as well as the antireflective film combined with the function of out-of-band rejection. The uncooled thermopile detectors were designed and fabricated as a multiple-thermocouple suspension structure using micro-electro-mechanical system technology. Experimentally, the LVOF exhibits a mean full-width-at-half-maximum of 400 nm and mean peak transmittance of 70% at the wavelength range of 2.3~5 μm. The thermopile detectors exhibit a responsivity of 146 μV/°C at the condition of room temperature. It is demonstrated that the detectors can achieve the quantification and identification of CH4/CO2/CO mixed gas. [ABSTRACT FROM AUTHOR]

High frequency surface acoustic wave (SAW) technology offers many opportunities for aerospace applications in passive wireless sensing and communication. This paper presents the design, simulation, fabrication, and test of an L-band SAW resonator based on 128° Y-X LiNbO3 substrate. The design parameters of SAW resonator were optimized by the finite element (FEM) method and the coupling-of-mode (COM) theory. Electron-beam lithography (EBL) technology was used to fabricate the submicron-scale of interdigital transducers (IDTs) and grating reflectors. The effects of some key EBL processes (e.g., the use of electron beam resist, the choice of metal deposition methods, the charge-accumulation effect, and the proximity-effect) on the fabrication precision of SAW devices were discussed. Experimentally, the LiNbO3-based SAW resonators fabricated using improved EBL technology exhibits a Rayleigh wave resonance peaks at 1.55 GHz with return loss about −12 dB, and quality factor Q is 517. Based on this SAW resonator, the temperature and strain sensing tests were performed, respectively. The experimental results exhibit a well linear dependence of temperature/strain on frequency-shift, with a temperature sensitivity of 125.4 kHz/°C and a strain sensitivity of −831 Hz/με, respectively. [ABSTRACT FROM AUTHOR]

This paper presents a passive wireless polymer-derived silicon carbonitride (SiCN) ceramic sensor based on cavity radio frequency resonator together with integrated slot antenna. The effect of the cavity sensor dimensions on the Q-factor and resonant frequency is investigated by numerical simulation. A sensor with optimal dimensions is designed and fabricated. It is demonstrated that the sensor signal can be wirelessly detected at distances up to 20 mm. Given the high-temperature stability of the SiCN, the sensor is very promising for high-temperature wireless sensing applications. [ABSTRACT FROM AUTHOR]

Abstract A comprehensive comparison study of the UV–visible photoresponse properties of non-aligned carbothermal ZnO nanowires (ZNWs) composited with reduced graphene oxide (RGO) and single-walled carbon nanotubes (SWCNTs) is presented. The RGO/ZNWs composites (GZWs) and SWCNTs/ZNWs composites (CZWs) have been successfully synthetized through UV-assisted photochemical reduction of GO in ZNWs suspension and ultrasonic stirring technology, respectively. The optimal contents of RGO and SWCNTs incorporated into ZNWs were determined for achieving maximum photoresponse, respectively. Experimentally, the optimal GZWs and CZWs exhibit significant enhancement in photoelectric properties than pure ZNWs. It is demonstrated that the GZWs-based photodetector has higher photoresponsivity (∼16 AW-1) than CZWs-based photodetector under low UV irradiation (<10 μWcm−2) and at 1.0 V bias, while the CZWs-based photodetector has higher on/off current ratio (8.41 × 104) and faster response time (1.99 s of rise-time and 0.39 s of decay-time) than GZWs-based one. The detail physics mechanism on the effects of RGO and SWCNTs on photoelectric characteristics of ZNWs is presented with the interface charge transfer due to the chemisorption and photo-desorption of oxygen. Graphical abstract Image 1 [ABSTRACT FROM AUTHOR]

2-Dimensional (2D) wide band-gap semiconductor molybdenum disulfide (MoS2) nanosheets as an ultraviolet (UV) photo-conductive material were used in surface acoustic wave (SAW) resonators for UV light sensing. A SAW resonator based on zinc oxide (ZnO) piezoelectric film deposited on glass through radio frequency (RF) magnetron sputtering technique was prepared, in which the sub-microscale gold/chromium (Au/Cr) interdigital transducers (IDTs) and grating reflectors were fabricated onto the ZnO surfaces using the electron beam lithography and lift-off techniques to form the IDTs/ZnO/glass-based SAW resonator with a working frequency at ∼1.02 GHz. The MoS 2 nanosheets prepared by electrochemical lithiation process were coated on IDTs region to form a highly sensitive SAW UV sensor, exhibiting an interesting photoresponse behavior to UV radiation. A maximum frequency shift of ∼3.5 MHz was found under 365 nm UV radiation with power intensity of 1.466 mW/cm 2 , which is attributed to the high resonant frequency (in GHz) and high specific surface area of photo-conductive MoS 2 nanosheets. It is suggested that the adsorption and desorption of oxygen on MoS 2 nanosheets play the dominant roles in the frequency-upshift due to mass loading effect and acoustoelectric effect, meanwhile, acoustoelectric effect also creates the SAW attenuation. [ABSTRACT FROM AUTHOR]