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Your search keyword '"Jonathan Faugier-Tovar"' showing total 8 results
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8 results on '"Jonathan Faugier-Tovar"'

5. Modular and versatile characterization test bench for optical phased arrays

Author

Jean B. Hue, Vincent Moulin, Kim Abdoul-Carime, Nacer Aitmani, Laura Boutafa, Olivier Castany, Baptiste Delplanque, Jonathan Faugier-Tovar, Daivid Fowler, Sylvain Guerber, Gilles Lasfargues, Jérôme Meilhan, Laurent Mendizabal, Thierry Mourier, Nadia Miloud-Ali, Frédéric Sermet, Sylvain Stanchina, Bertrand Szelag, Léopold Virot, and François Simoens

Published
2022
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8. Advanced roughness characterization for 300mm Si photonics patterning and optimization

Author

Jonathan Faugier-Tovar, Remi Le Tiec, Shimon Levi, Tristan Dewolf, Angela Kravtsov, Cyril Vannuffel, Cecilia Dupre, Quentin Wilmart, Olga Novak, and Stephanie Garcia

Subjects
Scanner, Materials science, Silicon photonics, business.industry, Optoelectronics, Wafer, Surface finish, Photonics, business, Lithography, Immersion lithography, Characterization (materials science)
Abstract

Roughness has always been a key detractor of the optical losses within the silicon photonics devices. With scaling at 300mm wafer, there is an introduction of new tools such immersion lithography scanner, OPC technique that can help to drive furthermore the optical losses reduction. This study will detail the work done on characterizing multiple steps of the process (Lithography, Etch, Annealing) and using roughness tools such LER (Line Edge Roughness), LWR (Line Width Roughness) and finally PSD (Power Spectral Density) to understand the main detractor of the optical losses at each step. These data will be extracted using SEM imaging from VeritySEM 6i.

Published
2021
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