35 results on '"jean-yves Rauch"'
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2. Proposal for a complete 3D surface reconstruction using images from a scanning electron microscope (SEM)
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Mayra Yucely Beb, Sounkalo Dembélé, Akkiz Bekel, Isabelle Jouffroy-Bapicot, Sébastien Thibaud, Nadine Piat, Olivier Lehmann, Jean-Yves Rauch, Patrick Rougeot, Louis-Marie Lebas, Cyril Langlois, Lucian Roiban, Clémentine Fellah, Gilles Cuny, and Karine Masenelli-Varlot more...
- Abstract
A three-dimensional model enables the development of accurate solutions to have more information about the thickness, texture, and characteristics of small-size samples for education and metrology applications. This project proposes an idea to obtain a complete 3D surface reconstruction using the application of Pollen 3D for the scanning electron microscope (SEM) images with high magnification. The main objective is to have a set of images of the complete 360° rotation of the sample with a robot inside the chamber of the SEM. Simulation SEM images with Blender (open source application) are proposed for results validation. more...
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- 2022
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3. NanoRobotic Structures with Embedded Actuation via Ion Induced Folding
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Amine Benouhiba, Joël Agnus, Jean-Yves Rauch, Léo Wurtz, Cédric Clévy, Kanty Rabenorosoa, Université Bourgogne Franche-Comté [COMUE] (UBFC), and Femto-st, AS2M
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Chromium ,Materials science ,Fabrication ,[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,Nanotechnology ,[INFO.INFO-DS] Computer Science [cs]/Data Structures and Algorithms [cs.DS] ,02 engineering and technology ,[SPI.MAT] Engineering Sciences [physics]/Materials ,010402 general chemistry ,01 natural sciences ,Focused ion beam ,[SPI]Engineering Sciences [physics] ,Planar ,General Materials Science ,ComputingMilieux_MISCELLANEOUS ,[SPI.ACOU] Engineering Sciences [physics]/Acoustics [physics.class-ph] ,business.industry ,Mechanical Engineering ,Folding (DSP implementation) ,Equipment Design ,Robotics ,021001 nanoscience & nanotechnology ,Silicon Dioxide ,0104 chemical sciences ,3. Good health ,Nanostructures ,[SPI.AUTO] Engineering Sciences [physics]/Automatic ,Mechanics of Materials ,Grippers ,Nanorobotics ,Photonics ,0210 nano-technology ,business ,Microfabrication ,Aluminum - Abstract
4D structures are tridimensional structures with time-varying abilities that provide high versatility, sophisticated designs, and a broad spectrum of actuation and sensing possibilities. The downsizing of these structures below 100 μm opens up exceptional opportunities for many disciplines, including photonics, acoustics, medicine, and nanorobotics. However, it requires a paradigm shift in manufacturing methods, especially for dynamic structures. A novel fabrication method based on ion-induced folding of planar multilayer structures embedding their actuation is proposed-the planar structures are fabricated in bulk through batch microfabrication techniques. Programmable and accurate bidirectional foldings (-70° - +90°) of Silica/Chromium/Aluminium (SiO2 /Cr/Al) multilayer structures are modeled, experimentally demonstrated then applied to embedded electrothermal actuation of controllable and dynamic 4D nanorobotic structures. The method is used to produce high-performances case-study grippers for nanorobotic applications in confined environments. Once folded, a gripping task at the nano-scale is demonstrated. The proposed fabrication method is suitable for creating small-scale 4D systems for nanorobotics, medical devices, and tunable metamaterials, where rapid folding and enhanced dynamic control are required. more...
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- 2021
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4. Tuning the Optical Properties of WO3 Films Exhibiting a Zigzag Columnar Microstructure
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Jean-Marc Cote, Vincent Tissot, Charalampos Sakkas, Jean-Yves Rauch, J. Gavoille, and Nicolas Martin
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GLAD ,refractive index ,porosity ,Materials science ,Surfaces and Interfaces ,Molar absorptivity ,Microstructure ,Molecular physics ,Surfaces, Coatings and Films ,Tilt (optics) ,Zigzag ,lcsh:TA1-2040 ,Sputtering ,Attenuation coefficient ,WO3 films ,Materials Chemistry ,zigzag columns ,Thin film ,lcsh:Engineering (General). Civil engineering (General) ,Refractive index - Abstract
Tungsten oxide WO3 thin films are deposited by DC reactive magnetron sputtering. The Reactive Gas Pulsing Process (RGPP) associated with the GLancing Angle Deposition method (GLAD) are implemented to produce zigzag columnar structures. The oxygen injection time (tON time) and the pulsing period are kept constant. Three tilt angles α are used: 75, 80, and 85° and the number of zigzags N is progressively changed from N = 0.5, 1, 2, 4, 8 to 16. For each film, refractive index, extinction coefficient, and absorption coefficient are calculated from optical transmission spectra of the films measured in the visible region from wavelength values only. Absorption and extinction coefficients monotonously drop as the number of zigzags increases. Refractive indices are the lowest for the most grazing tilt angle α = 85°. The highest refractive index is nevertheless obtained for a number of zigzags close to four. This optimized optical property is directly correlated to changes of the microstructure, especially a porous architecture, which is favored for high tilt angles, and tunable as a function of the number of zigzags. more...
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- 2021
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5. Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer
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Nicolas Defrance, Jean-Yves Rauch, Emmanuelle Algre, J.-C. Gerbedoen, Etienne Herth, and Patrick Delobelle
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010302 applied physics ,Diffraction ,Materials science ,02 engineering and technology ,Surfaces and Interfaces ,Nitride ,Nanoindentation ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,Piezoelectricity ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Resonator ,Residual stress ,0103 physical sciences ,Materials Chemistry ,PMUT ,Electrical and Electronic Engineering ,Composite material ,Thin film ,0210 nano-technology - Abstract
This paper presents a method to determine the mechanical properties of piezoelectric thin films. The vibrational behavior of microcantilevers and clamped–clamped beams actuated by aluminum nitride (AlN) piezoelectric films were analyzed in order to investigate the suitability of these devices as characterization tools. Different geometries of resonators composed of a free-standing structure made up of a TiPt/AlN/TiPt piezoelectric stack were tested. The out-of-plane motion of the resonators was assessed by laser Doppler vibrometry. An AlN Young’s modulus of about 200GPa was extracted from resonance-frequency measurements by means of Comsol software simulations that allow taking into account AlN underetching. This value of Young’s modulus was compared to the one measured by a nanoindentationtechnique. The quality of crystallinity was also assessed using X-ray diffraction (XRD) measurements. We then estimated the residual stress (about 200MPa) using an interferometry measurement. more...
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- 2015
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6. Nanoscale silver depositions inhibit microbial colonization and improve biocompatibility of titanium abutments
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Shantanu Jambhekar, Jean-Yves Rauch, Dhananjay Bodas, Mohit Kheur, Jyutika M. Rajwade, Supriya Kheur, and Nimisha Singh
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Staphylococcus aureus ,Materials science ,Silver ,Biocompatibility ,Simulated body fluid ,Gingiva ,chemistry.chemical_element ,Nanotechnology ,02 engineering and technology ,Corrosion ,03 medical and health sciences ,0302 clinical medicine ,Colloid and Surface Chemistry ,Dental Abutments ,X-ray photoelectron spectroscopy ,Anti-Infective Agents ,Sputtering ,Candida albicans ,Humans ,Physical and Theoretical Chemistry ,Titanium ,Photoelectron Spectroscopy ,030206 dentistry ,Surfaces and Interfaces ,General Medicine ,Fibroblasts ,021001 nanoscience & nanotechnology ,chemistry ,0210 nano-technology ,Antibacterial activity ,Biotechnology ,Nuclear chemistry - Abstract
Although titanium dental implants are biocompatible, exhibit excellent corrosion resistance and high mechanical resistance, the material fails in providing resistance to infection because it exhibits poor antimicrobial activity. To address these issues, we deposited silver onto titanium abutments (Grade 5 titanium discs) using direct current (DC) sputtering and assessed the antimicrobial activity and biocompatibility of the modified implant material. Atomic absorption spectrometry and X-ray photoelectron spectroscopy were employed to investigate the concentration and elemental composition of the deposited silver. As expected, silver deposited using DC plasma was uniform and good control over the deposition could be achieved by varying the sputtering time. Moderate biocompatible responses (up to 69% viability) were observed in primary human gingival fibroblast cells incubated in the presence of Ti sputtered with Ag for 5min. Silver deposited titanium (Ti-Ag) showed excellent antibacterial effects on Pseudomonas aeruginosa and Streptococcus mutans at a very low concentration (Ag content 1.2 and 2.1μg/mm2). However, higher concentration of silver (6μg/mm2) was required to achieve a reduction in cell viability of Staphylococcus aureus and Candida albicans. The silver sputtered Ti abutments could maintain a long-term antibacterial activity as evidenced by the release of silver up to 22days in simulated body fluid. Our study illustrates that silver deposited titanium is indeed a promising candidate for soft tissue integration on dental abutments and prevents initial microbial adhesion. more...
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- 2017
7. Improvement of ozone detection with GLAD WO3 films
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Jean-Baptiste Sanchez, Franck Berger, Nicolas Martin, Julien Ollitrault, and Jean-Yves Rauch
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Glancing angle deposition ,Materials science ,Ozone ,Mechanical Engineering ,Analytical chemistry ,Tungsten oxide ,Condensed Matter Physics ,Microstructure ,chemistry.chemical_compound ,Electrical resistance and conductance ,chemistry ,Mechanics of Materials ,Sputtering ,General Materials Science ,Thin film ,Porosity - Abstract
Tungsten oxide WO 3 thin films were prepared by dc reactive magnetron sputtering. The GLancing Angle Deposition (GLAD) technique was implemented to transform the typical dense microstructure into an inclined columnar and porous architecture. The incident angle α of the sputtered particles was 0° and 70° leading to a column tilt angle β of 0° and 40°, respectively. Conventional and inclined WO 3 films were sputter deposited on a commercial hotplate system. Ozone gas was periodically injected from 0 to 220 ppb and the variation of electrical conductance of the system was measured vs. time at 250 °C. The conventional WO 3 films exhibited a significant change of electrical conductance as a function of the ozone injection. GLAD WO 3 films with a columnar angle β =40° were even more sensitive to the ozone pulses and the speed of response or recovery was significantly enhanced. This ozone detection improvement was mainly attributed to the more porous structure of WO 3 films produced by the GLAD method. more...
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- 2015
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8. Light coupling with a nonlinear prism
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Kien Phan, Huy, Jassem, Safioui, Vincent, Huet, Jean-Yves, Rauch, Patrice, Féron, and Mathieu, Chauvet
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We propose the use of a prism with nonlinear optical properties to improve the prism-coupling method. The principle is based on the inscription of an adapted waveguide inside this prism by beam self-trapping to enhance the coupling efficiency and stability. The experimental demonstration is realized with a prism diced from a LiNbO3 wafer to couple light into a resonator. more...
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- 2015
9. Thin amorphous silicon oxide ICPECVD layer on gold surface for surface plasmon resonance measurements
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Jean-Yves Rauch, Rabah Zeggari, Etienne Herth, Fabien Remy-Martin, Wilfrid Boireau, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS) more...
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[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,010302 applied physics ,Amorphous silicon ,Materials science ,Thin layers ,[INFO.INFO-DS]Computer Science [cs]/Data Structures and Algorithms [cs.DS] ,technology, industry, and agriculture ,Analytical chemistry ,Oxide ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,[SPI.AUTO]Engineering Sciences [physics]/Automatic ,[SPI.MAT]Engineering Sciences [physics]/Materials ,chemistry.chemical_compound ,chemistry ,Plasma-enhanced chemical vapor deposition ,0103 physical sciences ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,Surface plasmon resonance ,0210 nano-technology ,Refractive index ,Plasmon ,Localized surface plasmon - Abstract
International audience; The present study demonstrates that thin layers of amorphous silicon oxide (SiOx) grown by inductively-coupled plasma enhanced chemical vapor deposition (ICPECVD) technology at lower temperatures can be successfully combined with biosensors. In particular, gold-amorphous silica (Au/SiOx) interfaces were investigated for their potential applications as a low-cost Surface Plasmon Resonance (SPR) sensor chip. We report here on the fabrication and characterization of stable and good reliabilities of SiOx deposited at 80°C at different pressures. The refractive index (n) of SiOx varied from 1.456 to 1.462. The results show that the sensitivity and minimum light reflectivity at the resonance angle is extremely sensitive to any changes in the index of refraction and any changes in optical thickness. more...
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- 2015
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10. Comparative study of mechanical and tribological properties of CNx and DLC films deposited by PECVD technique
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J.M. Cattenot, Jean-Yves Rauch, Nicolas Martin, and J. Takadoum
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Materials science ,Diamond-like carbon ,Analytical chemistry ,Surfaces and Interfaces ,General Chemistry ,Condensed Matter Physics ,Surfaces, Coatings and Films ,chemistry.chemical_compound ,Carbon film ,X-ray photoelectron spectroscopy ,chemistry ,Plasma-enhanced chemical vapor deposition ,Materials Chemistry ,Composite material ,Fourier transform infrared spectroscopy ,Carbon nitride ,Tribometer ,High-speed steel - Abstract
Diamond-like carbon and carbon nitride films were deposited on high speed steel substrates by plasma enhanced chemical vapour deposition technique. X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy were used to investigate the different bondings. Adhesion of the films to the substrate was investigated by the scratch test technique. The mechanical properties were investigated by nano-indentation and the tribological behaviours were tested using a ball-on-disk tribometer. Effect of annealing on adhesion and mechanical properties was also investigated. more...
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- 2003
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11. Structure and composition of TixAl1−xN thin films sputter deposited using a composite metallic target
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C. Rousselot, Nicolas Martin, and Jean-Yves Rauch
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Diffraction ,Materials science ,Composite number ,Analytical chemistry ,chemistry.chemical_element ,Surfaces and Interfaces ,General Chemistry ,Crystal structure ,Condensed Matter Physics ,Surfaces, Coatings and Films ,chemistry ,Sputtering ,Physical vapor deposition ,Materials Chemistry ,Thin film ,Tin ,Spectroscopy - Abstract
An original composite target configuration with various STi/(STi+SAl) area ratios was used to prepare hard TixAl1−xN thin films by r.f. reactive magnetron sputtering. The crystallographic structure of the films deposited on high-speed steel and glass substrates was determined by X-ray diffraction. Homogeneity was investigated from compositions and depth profile measurements carried out by Rutherford backscattering spectroscopy, electron probe microanalysis and glow discharge optical emission spectroscopy. The modulation of the Ti and Al area ratios of the target produced changes of the structure from the fcc TiN to the hexagonal AlN phase and simultaneously, a gradual modification of the TixAl1−xN metal concentration from x=0 to 1. The mechanical behaviours such as hardness and scratch tests were also determined and correlated with the evolution of the structural and compositional properties. more...
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- 2002
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12. Light funneling from a photonic crystal laser cavity to a nano-antenna: overcoming the diffraction limit in optical energy transfer down to the nanoscale
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Dusan Nedeljkovic, Pierre Viktorovitch, Jean-Yves Rauch, Geoffrey W. Burr, Elie M. Atie, Ali El Eter, Mathieu Mivelle, Ségolène Callard, Thierry Grosjean, Zhihua Xie, Than-Phong Vo, and Fadi Issam Baida more...
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Materials science ,business.industry ,Photonic integrated circuit ,Physics::Optics ,Atomic and Molecular Physics, and Optics ,law.invention ,Optics ,Optical tweezers ,law ,Optical cavity ,Optoelectronics ,Near-field scanning optical microscope ,Laser power scaling ,Photonics ,business ,Plasmon ,Photonic crystal - Abstract
We show that the near-field coupling between a photonic crystal microlaser and a nano-antenna can enable hybrid photonic systems that are both physically compact (free from bulky optics) and efficient at transferring optical energy into the nano-antenna. Up to 19% of the laser power from a micron-scale photonic crystal laser cavity is experimentally transferred to a bowtie aperture nano-antenna (BNA) whose area is 400-fold smaller than the overall emission area of the microlaser. Instead of a direct deposition of the nano-antenna onto the photonic crystal, it is fabricated at the apex of a fiber tip to be accurately placed in the microlaser near-field. Such light funneling within a hybrid structure provides a path for overcoming the diffraction limit in optical energy transfer to the nanoscale and should thus open promising avenues in the nanoscale enhancement and confinement of light in compact architectures, impacting applications such as biosensing, optical trapping, local heating, spectroscopy, and nanoimaging. more...
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- 2014
13. Ridge-shaped periodically poled transducer for wide band R-F filter
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Fabien Henrot, Jean-Yves Rauch, Gwenn Ulliac, Sylvain Ballandras, and Florent Bassignot
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Materials science ,business.industry ,Interdigital transducer ,Acoustics ,Surface acoustic wave ,Lithium niobate ,Poling ,chemistry.chemical_compound ,Transducer ,chemistry ,Band-pass filter ,Optoelectronics ,Radio frequency ,Phase velocity ,business - Abstract
Transducer on Periodically Poled Lithium Niobate (PPLN) exhibiting an electromechanical coupling about 20% and an equivalent phase velocity about 10 km.s−1 were shown in [1]. These transducers are 3D structured to overcome Surface Acoustic Wave (SAW) and Bulk Acoustic Wave (BAW) technological limits, such as short circuit between electrodes for SAW and precise thickness control for BAW. The present work shows the use of these 3D structured transducers for Radio Frequency (RF) filtering. An acoustic filter showing a band pass of about 5MHz has been realized on Lithium Niobate at 250MHz. This filter is made of PPLN exhibiting a poling period of 14.9μm. more...
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- 2014
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14. Characterization of (Ti 1−x Al x )N films prepared by radio frequency reactive magnetron sputtering
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Jean-Yves Rauch, Ch Rousselot, Nicolas Martin, Ch Jacquot, and J. Takadoum
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Materials science ,Metallurgy ,chemistry.chemical_element ,Tribology ,chemistry.chemical_compound ,chemistry ,Aluminium ,Ternary compound ,Sputtering ,Vickers hardness test ,Cavity magnetron ,Materials Chemistry ,Ceramics and Composites ,Cubic zirconia ,Composite material ,Tribometer - Abstract
(Ti1−xAlx)N films were deposited by radio frequency reactive magnetron sputtering on a high speed steel substrate. The structure and composition of the coatings were analysed by various techniques. Hardness and adhesion of the films were investigated using Vickers micro-indentation and scratch test respectively, whereas their tribological properties were studied using a pin-on-disk tribometer. The results show that increasing aluminium content leads to increase hardness of the films and to decrease their wear resistance when sliding against a magnesia-stabilized zirconia ball. On the contrary, no clear dependence of the film adhesion on the aluminium concentration was detected. more...
- Published
- 2000
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15. The effect of bias power on some properties of titanium and titanium oxide films prepared by r.f. magnetron sputtering
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Christophe Rousselot, Dominique Baretti, Jean-Yves Rauch, and Nicolas Martin
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Materials science ,Analytical chemistry ,Oxide ,chemistry.chemical_element ,Surfaces and Interfaces ,General Chemistry ,Substrate (electronics) ,Sputter deposition ,Condensed Matter Physics ,Surfaces, Coatings and Films ,Titanium oxide ,chemistry.chemical_compound ,chemistry ,Sputtering ,Physical vapor deposition ,Materials Chemistry ,Thin film ,Titanium - Abstract
Titanium and titanium oxide thin films have been deposited on (100) silicon wafers and glass substrates by r.f. reactive sputtering magnetron. Substrates have been r.f. biased during the growth of the film and the influence of the bias power on some properties of the coatings has been investigated. The results of the deposition rate measurements show that this is weakly affected when bias power is low. As the r.f. bias power increases, the deposition rate decreases strongly due to an increase of the layer density and resputtering phenomena. Atomic force microscopy showed that the surface morphology of metallic and oxide films can be modified using bias treatment. Roughness analyses exhibited a similar evolution as the deposition rate and surface topography when bias power changes. Optical properties like refractive index followed the same variations as previous results. So, when r.f. bias power increases, various phenomena take place and different zones can be defined from these investigations. Argon ion to atom arrival rate ratio and average energy per deposited atom have been calculated from experimental values of current density applied to the substrate and energy of argon ions impinging on the growing film. Their evaluations have been discussed for metallic and oxide materials. more...
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- 1998
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16. Highly coupled resonator based on ridge-shaped periodically poled materials for radio-Frequency applications
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Fabien Henrot, Sylvain Ballandras, Blandine Guichardaz, Jean-Yves Rauch, Florent Bassignot, and Clément Guyot
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chemistry.chemical_compound ,Resonator ,Materials science ,Planar ,Transducer ,chemistry ,Acoustics ,Surface acoustic wave ,Lithium niobate ,Surface acoustic wave sensor ,Radio frequency ,Phase velocity - Abstract
Surface Acoustic Wave (SAW) and Bulk Acoustic Wave (BAW) devices are largely used in telecommunication for radio Frequency (RF) signal processing. Nevertheless, these devices are limited by various factors such as short-circuit between electrodes for SAW and precise thickness control for BAW. This paper shows the interest of a new kind of transducer using Periodically Poled Lithium Niobate (PPLN) developed to overcome SAW and BAW technological limits. A former PPLN-based wave-guide was presented some years ago exploiting planar technologies. The novelty of the present work lies in the 3D structuring of the transducer allowing for very high aspect ratio structures exhibiting a theoretical electromechanical coupling about 20% and a phase velocity up to 20 km.s-1. more...
- Published
- 2013
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17. SAW sensor exploiting palladium layer properties for selective detection of hydrogen
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Benjamin Mazal, Sylvain Ballandras, David Rabus, Jean-Yves Rauch, Virginie Blondeau-Patissier, and Meddy Vanotti
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Materials science ,Atmospheric pressure ,Hydrogen ,business.industry ,chemistry.chemical_element ,Yttrium ,Hydrogen sensor ,Transducer ,chemistry ,Optoelectronics ,Surface acoustic wave sensor ,business ,Palladium ,Leakage (electronics) - Abstract
For an increasing number of application (energy production, car industry, space, etc.), hydrogen appears as a solution of the future as it is the most common body in the Universe (and therefore on Earth). However, due to its unstable properties, a particular care must be dedicated to control possible gaseous leaks close to facilities using this resource. Here we propose surface acoustic wave sensors for detecting gaseous hydrogen in standard environmental conditions (atmospheric pressure and room temperature). The proposed SAW sensors consists in two Rayleigh-wave delay lines built on Quartz. One equipped with a Palladium overlay and the other exhibiting a free path between the two interdigitated transducers. A dedicated hermetical gas test cell has been developed to test the efficiency of the sensor when exposed to hydrogen-composed atmospheres. A particular care was paid to avoid hydrogen leakage in the working environment and to perform the regeneration of the gas absorbing layer. The developed SAW devices exploiting hydrogen absorption capabilities of palladium layers exhibiting different thicknesses have been here used to make the detection and the identification of hydrogen concentrations (in the 0.25-2% range) diluted in nitrogen and is also able to make detection in current atmosphere. The effect of the palladium thickness variations along with the influence of an Yttrium doping of the palladium layer on the sensor behavior will be studied here. more...
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- 2013
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18. New acoustic resonator based on a ridge built in a periodically poled ferroelectric material for RF applications
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F. Bassignot, Fabien Henrot, Jean-Yves Rauch, Emilie Courjon, Blandine Guichardaz, Gwenn Ulliac, and Sylvain Ballandras
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Resonator ,chemistry.chemical_compound ,Transducer ,Materials science ,chemistry ,Acoustics ,Surface acoustic wave ,Lithium niobate ,Phase (waves) ,Radio frequency ,Piezoelectricity ,Ferroelectricity - Abstract
The development of transducers alternative to usual surface acoustic wave (SAW) and bulk acoustic wave (BAW) devices for RF signal processing is strongly motivated by the need for improved operating characteristics to face modern telecommunication challenges. This paper shows the interest of a new concept of periodically poled transducers (PPT) on Lithium Niobate (LiNbO 3 ). This new kind of transducer has been developed to overcome technological limits of SAW inter-digitated transducers (short-circuits between electrodes for instance) or precise thickness control of BAW devices piezoelectric material. The novelties of the structure compared to already achieved work on PPT lies in the 3D structuring of the transducer. High aspect ratio ridges are achieved on PPT plates and an adapted metallization allows for the excitation of modes exhibiting theoretical electromechanical coupling in excess of 20% with predicted phase velocities close to 18000m.s−1. more...
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- 2012
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19. Optimization of RF sputtered PZT thin films for MEMS cantilever application
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Jean-Yves Rauch, Dhananjay Bodas, Abhay Joshi, and S. A. Gangal
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Bulk micromachining ,Materials science ,Fabrication ,Piezoelectric coefficient ,Silicon ,chemistry ,Annealing (metallurgy) ,Sputtering ,chemistry.chemical_element ,Composite material ,Thin film ,Piezoelectricity - Abstract
Optimization of RF sputtered piezoelectric PZT thin films for thickness and stoichiometry for use in MEMS application is discussed in this paper. The effect of sputtering parameters on PZT film stoichiometry is studied using EDS and XPS techniques. 600 nm thin PZT film with Zr:Ti ratio of 52∶48 is achieved in single sputtering cycle. The film is annealed using conventional furnace annealing technique and the effect of annealing process on phase formation is studied using XRD technique. The optimized PZT thin film shows sufficiently good stoichiometry. A piezoelectric coefficient (d33) value for PZT thin film deposited at optimum parameters is 450pm/V. Optimized PZT thin film parameters are used for successful fabrication of cantilever using silicon bulk micromachining. more...
- Published
- 2012
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20. Bowtie nano-aperture as interface between near-fields and a single-mode fiber
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Mathieu Mivelle, Fadi Issam Baida, Daniel Charraut, I. A. Ibrahim, Thierry Grosjean, Geoffrey W. Burr, Roland Salut, Jean-Yves Rauch, Dusan Nedeljkovic, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), IBM Almaden Research Center [San Jose], IBM, Lovalite S.A.S., and AUTRES more...
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Optical fiber ,Materials science ,business.industry ,Single-mode optical fiber ,Physics::Optics ,Polarization-maintaining optical fiber ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Atomic and Molecular Physics, and Optics ,law.invention ,010309 optics ,Nanolithography ,Optics ,Fiber optic sensor ,law ,0103 physical sciences ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,Optoelectronics ,Near-field scanning optical microscope ,Fiber ,0210 nano-technology ,business ,Photonic-crystal fiber - Abstract
International audience; We present the development and study of a single bowtie nano-aperture (BNA) at the end of a monomode optical fiber as an interface between near-fields/nano-optical objects and the fiber mode. To optimize energy conversion between BNA and the single fiber mode, the BNA is opened at the apex of a specially designed polymer fiber tip which acts as an efficient mediator (like a horn optical antenna) between the two systems. As a first application, we propose to use our device as polarizing electric-field nanocollector for scanning near-field optical microscopy (SNOM). However, this BNA-on-fiber probe may also find applications in nanolithography, addressing and telecommunications as well as in situ biological and chemical probing and trapping more...
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- 2010
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21. The OmniSaw device concept (OmniSAW: Omnidirectional band gap for surface acoustic wave)
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Hanane Moubchir, V. Petreni, Jean-Yves Rauch, Vincent Laude, Sarah Benchabane, A. Choujaa, and A. Khelif
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Brillouin zone ,Total internal reflection ,Optics ,Materials science ,Band gap ,business.industry ,Surface acoustic wave ,Elastic energy ,Wave vector ,business ,Omnidirectional antenna ,Photonic crystal - Abstract
We report the theoretical evidence for the occurrence of omnidirectional elastic band gap in one-dimensional phononic crystal structures. The structure is constituted by a periodic layered deposited on a specific substrate that exhibit total reflection of waves for all incident angles and polarizations in a given frequency range the omnidirectional band gap. We present the influence of the nature and filling fraction of the layered structures as well as the substrate nature on the omnidirectional band gap. By introducing a defect piezoelectric layer, for instance AlN or ZnO, in the finite size layered structure, under certain condition a selective resonance modes occur within the omnidirectional bang gap. In this case, the elastic energy is localized in the defect layer. The frequencies of the defect modes are sensitive to the nature of the material and to the layer thicknesses. In order to excite the localized mode in the defect layer. We introduce interdigital transducers on the top of the surface. This implies the introduction of a new spatial periodicity and the reduction of the parallel wave vector in the first Brillouin zone. The omnidirectional character of the bad gap in this case is crucial to confine the elastic energy in the defect layer. more...
- Published
- 2008
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22. Evidence for complete surface wave band gap in a piezoelectric phononic crystal
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Abdelkrim Khelif, Vincent Laude, Sarah Benchabane, Laurent Robert, and Jean-Yves Rauch
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Materials science ,Condensed matter physics ,business.industry ,Band gap ,Surface acoustic wave ,Lithium niobate ,Substrate (electronics) ,Radiation ,Piezoelectricity ,Crystal ,chemistry.chemical_compound ,Optics ,chemistry ,Surface wave ,business - Abstract
A complete surface acoustic wave band gap is found experimentally in a two-dimensional square-lattice piezoelectric phononic crystal etched in lithium niobate. Propagation in the phononic crystal is studied by direct generation and detection of surface waves using interdigital transducers. The complete band gap extends from 203 to 226 MHZ, in good agreement with theoretical predictions. Near the upper edge of the complete band gap, it is observed that radiation to the bulk of the substrate dominates. This observation is explained by introducing the concept of the sound line. more...
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- 2006
23. Lithium niobate phononic crystal for surface acoustic waves
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A. Khelif, Jean-Yves Rauch, Vincent Laude, Sarah Benchabane, Laurent Robert, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS) more...
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Materials science ,Interdigital transducer ,Band gap ,Wave propagation ,Plane wave expansion method ,Lithium niobate ,Physics::Optics ,02 engineering and technology ,7. Clean energy ,01 natural sciences ,Condensed Matter::Materials Science ,chemistry.chemical_compound ,Optics ,Condensed Matter::Superconductivity ,0103 physical sciences ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,010306 general physics ,[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,business.industry ,Surface acoustic wave ,Acoustic wave ,021001 nanoscience & nanotechnology ,[PHYS.MECA.ACOU]Physics [physics]/Mechanics [physics]/Acoustics [physics.class-ph] ,chemistry ,Surface wave ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,0210 nano-technology ,business - Abstract
International audience; The recent theoretical and experimental demonstrations of stop bands for surface acoustic waves have greatly enlarged the potential application field for phononic crystals. The possibility of a direct excitation of these surface waves on a piezoelectric material, and their already extensive use in ultrasonics make them an interesting basis for phononic crystal based, acoustic signal processing devices. In this paper, we report on the demonstration of the existence of an absolute band gap for surface waves in a piezoelectric phononic crystal. The Surface Acoustic Wave propagation in a square lattice, two-dimensional lithium niobate phononic crystal is both theoretically and experimentally studied. A plane wave expansion method is used to predict the band gap position and width. The crystal was then fabricated by reactive ion etching of a bulk lithium niobate substrate. Standard interdigital transducers were used to characterize the phononic structure by direct electrical generation and detection of surface waves. A full band gap around 200 MHz was experimentally demonstrated, and close agreement is found with theoretical predictions. more...
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- 2006
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24. Design, fabrication and CFD modeling of a Stirling engine microregenerator
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Emna Dellali, Sylvie Bégot, François Lanzetta, Eric Gavignet, Ravinder Kumar Chutani, jean-yves Rauch, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS) more...
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[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,[INFO.INFO-DS]Computer Science [cs]/Data Structures and Algorithms [cs.DS] ,[SPI.NRJ]Engineering Sciences [physics]/Electric power ,[PHYS.MECA.THER]Physics [physics]/Mechanics [physics]/Thermics [physics.class-ph] ,[PHYS.MECA.MEFL]Physics [physics]/Mechanics [physics]/Fluid mechanics [physics.class-ph] ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,[SPI.AUTO]Engineering Sciences [physics]/Automatic ,[SPI.MAT]Engineering Sciences [physics]/Materials - Abstract
International audience; This paper reports the design, fabrication and CFD modeling of a microregenerator in order to be integrated in a multiphase piezoelectric smart membrane Stirling engine. The application aims to recover waste heat at low temperatures and to convert it into electricity via the piezoelectric element. The suggested geometry for the microregenerator is a microchannel integrated with staggered DRIE etched silicon micropillars, the whole is encapsulated between two glass wafers. The porosity ranges from 0.8 to 0.9. A 2D numerical study of the microregenerator thermofluidic performances was investigated. Three gases (air, helium andhydrogen) were investigated. The gas flow is set to be incompressible and viscous under laminar unidirectional steady flow conditions for low Reynolds number ( more...
25. Ammonia gas sensors based on polypyrrole films: Influence of electrodeposition parameters
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Tilia Patois, Boris Lakard, Patrick Fievet, Franck Berger, Jean-Baptiste Sanchez, Jean-Yves Rauch, Univers, Transport, Interfaces, Nanostructures, Atmosphère et environnement, Molécules (UMR 6213) (UTINAM), Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)-Institut national des sciences de l'Univers (INSU - CNRS), Laboratoire Chrono-environnement - CNRS - UBFC (UMR 6249) (LCE), Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Univers, Transport, Interfaces, Nanostructures, Atmosphère et environnement, Molécules ( UTINAM ), Institut national des sciences de l'Univers ( INSU - CNRS ) -Centre National de la Recherche Scientifique ( CNRS ) -Université de Franche-Comté ( UFC ), Laboratoire Chrono-environnement ( LCE ), Université Bourgogne Franche-Comté ( UBFC ) -Centre National de la Recherche Scientifique ( CNRS ) -Université de Franche-Comté ( UFC ), Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies ( FEMTO-ST ), and Université de Technologie de Belfort-Montbeliard ( UTBM ) -Ecole Nationale Supérieure de Mécanique et des Microtechniques ( ENSMM ) -Centre National de la Recherche Scientifique ( CNRS ) -Université de Franche-Comté ( UFC ) more...
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Materials science ,Silicon ,Inorganic chemistry ,chemistry.chemical_element ,02 engineering and technology ,010402 general chemistry ,Electrochemistry ,Polypyrrole ,01 natural sciences ,Ammonia ,chemistry.chemical_compound ,Adsorption ,Materials Chemistry ,Electrical and Electronic Engineering ,Instrumentation ,ComputingMilieux_MISCELLANEOUS ,Conductive polymer ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,[ PHYS.PHYS.PHYS-OPTICS ] Physics [physics]/Physics [physics]/Optics [physics.optics] ,Metals and Alloys ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,0104 chemical sciences ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Microelectrode ,chemistry ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,[ SPI.OPTI ] Engineering Sciences [physics]/Optics / Photonic ,0210 nano-technology ,Platinum - Abstract
International audience; A gas sensor consisting in polypyrrole films electrochemically deposited on microelectrodes arrays was fabricated using silicon microtechnologies. Polypyrrole was electrodeposited on platinum microelectrodes using four different electrodeposition potentials, five counter-ions and three salt concentrations to assess the effects of these parameters on the sensing properties of polypyrrole films. The change in conductance of thin polymer layers, due to adsorption of ammonia gas, was used as a sensor signal. The behaviors of the polymer-based gas sensors, including response time, response amplitude, reproducibility and reversibility, to various ammonia gas concentrations ranging from 1 to 100 ppm were investigated. The experimental results showed that these ammonia gas sensors were efficient since they were sensitive to ammonia, and since their response was fast and reproducible at room temperature. The most efficient ammonia gas sensor was obtained with a 248 nm-thick polypyrrole film electrosynthesized from 0.1 M pyrrole and 0.1 M LiClO4 under an electrodeposition potential of +2.0 V/SCE. more...
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26. Assessment of the gaz permeation through thin coated polymeric membranes : improvement of the gas barrier ability for hydrogen storage
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Liping Feng, Jean-Yves Rauch, David Chapelle, Philippe Nardin, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and Northwestern Polytechnical University [Xi'an] (NPU) more...
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Materials science ,02 engineering and technology ,engineering.material ,010402 general chemistry ,01 natural sciences ,hydrogen storage ,Hydrogen storage ,Coating ,Deposition (phase transition) ,General Materials Science ,Composite material ,ComputingMilieux_MISCELLANEOUS ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,Radiation ,Adhesion ,[PHYS.MECA]Physics [physics]/Mechanics [physics] ,Permeation ,[SPI.MECA]Engineering Sciences [physics]/Mechanics [physics.med-ph] ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,0104 chemical sciences ,Membrane ,engineering ,Polymeric membrane ,0210 nano-technology ,gas permeation ,Order of magnitude ,hydrogen barrier - Abstract
International audience; We investigate and simulate the permeation behavior of PET membranes on which thin coatings are deposited. Depending on the parameters of deposition and on the thin coating thickness, we assume this alteration could make it possible to decrease by one order of magnitude the permeation coefficient. Some specific developments have been necessary, all the more not only a decrease of permeation is expected but also the mechanical strength of the thin coating during severe mechanical loadings. We consequently design devices dedicated to the permeation test but also to the bulge and blister tests which permit to check the mechanical properties of the film and its adhesion on the PET surface. This paper focuses on the permeation test. more...
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27. Selective Detection of Hydrogen with Surface Acoustic Wave Devices Using Palladium Layer Properties
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Meddy Vanotti, Virginie Blondeau-Patissier, David Rabus, jean-yves Rauch, Sylvain Ballandras, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS) more...
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SAW device ,lcsh:Technology (General) ,lcsh:T1-995 ,Rayleigh waves ,Gas sensors ,Palladium layer ,Hydrogen ,[SPI.TRON]Engineering Sciences [physics]/Electronics - Abstract
International audience; For an increasing number of applications, hydrogen represents a solution of the future as it is the most common element in the Earth. However, due to its unstable properties in gas phase, a particular care must be dedicated to control possible gaseous leaks close to tanks and facilities using this resource. In this paper, surface acoustic wave sensors are proposed for detecting gaseous hydrogen in standard environmental conditions (atmospheric pressure and room temperature). The proposed Surface Acoustic Wave sensors consists in two Rayleigh-wave delay lines built on Quartz, one equipped with a palladium overlay and the other exhibiting a free path between the two interdigited transducers. A specific gas test cell has been developed to test various sensor configurations submitted to hydrogen-composed atmospheres. A particular care was paid to avoid hydrogen leakage in the working environment and to perform the regeneration of the gas absorbing layer. The developed device allows for identifying different concentrations of hydrogen (in the 1-4 % range) diluted in nitrogen and is also able to detect hydrogen in current atmosphere. Surface Acoustic Wave devices exploiting hydrogen absorption capabilities of palladium thin films have been here used to make the detection and the identification of hydrogen concentrations in the 1-4 % range and the influence of outer parameters such as temperature and relative humidity variations on the sensor operation are also reported. more...
28. Investigation of amorphous SiOx layer on gold surface for Surface Plasmon Resonance measurements
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Jean-Yves Rauch, Etienne Herth, Rabah Zeggari, Fabien Remy-Martin, Wilfrid Boireau, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS) more...
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Amorphous silicon ,Materials science ,Silicon dioxide ,[INFO.INFO-DS]Computer Science [cs]/Data Structures and Algorithms [cs.DS] ,Nanotechnology ,02 engineering and technology ,01 natural sciences ,[SPI.AUTO]Engineering Sciences [physics]/Automatic ,[SPI.MAT]Engineering Sciences [physics]/Materials ,Contact angle ,chemistry.chemical_compound ,Plasma-enhanced chemical vapor deposition ,0103 physical sciences ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,Electrical and Electronic Engineering ,Surface plasmon resonance ,[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,010302 applied physics ,Thin layers ,business.industry ,technology, industry, and agriculture ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Atomic and Molecular Physics, and Optics ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Amorphous solid ,chemistry ,Optoelectronics ,0210 nano-technology ,business ,Layer (electronics) - Abstract
International audience; The present study demonstrates that thin layers of amorphous silicon oxide (SiOx) grown by inductivelycoupledplasma enhanced chemical vapor deposition (ICPECVD) technology at lower temperatures can besuccessfully combined with biosensors. In particular, gold-amorphous silica (Au/SiOx) interfaces were investigatedfor their potential applications as a low-cost Surface Plasmon Resonance (SPR) sensor chip.ICPECVD silicon dioxide films up to 25 nm-thick were deposited at different pressure. Details of the SiOxthin layer properties in terms of refractive index, deposition rate, roughness, chemical bonds, Si2p andO1s bending energies, residual stress and contact angle were studied. The refractive index was found to decreasewith increasing pressure for all the films. The depositions rates were lower for films deposited athigher pressures. We report here on the fabrication and characterization of stable and good reliabilities ofSiOx deposited at two temperature 80 °C and 130 °C at pressures ranging from 2 Pa to 20 Pa. The resultsshow that the SPR responses were very sensitive to any changes in the deposition parameters. In thisstudy, we have shown that SiOx has good potential for further developments, as a wideband biosensor applicationwith a higher sensitivity in SPR response. more...
29. SAW pressure sensor on quartz membrane lapping
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Baron, T., Hermelin, D., P Romand, J., Alzuaga, S., Queste, S., jean-yves Rauch, F Leguen, J., Belgasem, B., Ballandras, S., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM), SENSEOR SAS, and Société Française d'Acoustique - SFA more...
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[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,Grinding ,Lapping ,SAW ,Pressure sensor ,[PHYS.MECA.ACOU]Physics [physics]/Mechanics [physics]/Acoustics [physics.class-ph] - Abstract
National audience; The fabrication of SAW quartz-based pressure sensors has received a strong interest for many years, yielding various development using either delay lines or resonators. However, most approaches have been developed exploiting quartz machining along standard chemical or mechanical etching, rarely compatible with batch processes as used for Micro-ElectroMechanical Systems (MEMS). In this work, we propose a temperature/pressure sensor fabricated on compound Quartz/Silicon substrates obtained by Au/Au bonding at room temperature and lapping/polishing of Quartz. This approach allows for a collective and accurate production of sensors, the sensor sensitivity being controlled by the membrane thickness and diameter. As the pressure is intricately connected with temperature, an objective estimation of this parameter requires accurate temperature measurements as well. As a consequence, the proposed sensor combines a reference resonator designed to be temperature compensated (AT,X cut of quartz) together with a resonator which propagation direction is chosen according the targeted temperature coefficient of frequency in order to give access to a linear differential temperature measurement. In addition, a third resonator with propagation axis along X is placed at the right center of a circular membrane. When the membrane is bent by pressure effects, the corresponding resonance frequency drifts linearly, allowing for another differential pressure measurement. Hence, with three resonators, one can easily demonstrate the unambiguous determination of temperature and pressure at once. Until now pressure sensor based on SAW with quartz material are unity processed. This process allows us a collective manufacturing of sensors. We start by seal the quartz wafer with the silicon substrate using the thin gold layer. This process yields an homogeneous and high quality bond. It is subsequently thinned and polished to an overall thickness of 100 microns. Aluminum electrodes are deposited on the quartz to achieve three SAW resonators. Process flow based on collective manufacturing is now developed. Electrical responses of SAW resonators are done. Results show the operability of the sensors and the responses are conformed to the design. Electrical test under pressure is currently under development. more...
30. The OmniSAW device concept
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Abdelkrim Khelif, Abdelkrim Choujaa, jean-yves Rauch, Valérie Pétrini, Hanane Moubchir, Sarah Benchabane, Vincent Laude, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS) more...
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[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] - Abstract
International audience; We report the theoretical evidence for the occurrence of omnidirectional elastic band gap in one-dimensional phononic crystal structures. The structure is constituted by a periodic layered deposited on a specific substrate that exhibit total reflection of waves for all incident angles and polarizations in a given frequency range the omnidirectional band gap. We present the influence of the nature and filling fraction of the layered structures as well as the substrate nature on the omnidirectional band gap. By introducing a defect piezoelectric layer, for instance AlN or ZnO, in the finite size layered structure, under certain condition a selective resonance modes occur within the omnidirectional bang gap. In this case, the elastic energy is localized in the defect layer. The frequencies of the defect modes are sensitive to the nature of the material and to the layer thicknesses. In order to excite the localized mode in the defect layer. We introduce interdigital transducers on the top of the surface. This implies the introduction of a new spatial periodicity and the reduction of the parallel wave vector in the first Brillouin zone. The omnidirectional character of the bad gap in this case is crucial to confine the elastic energy in the defect layer. more...
31. Nanoscale silver depositions inhibit microbial colonization and improve biocompatibility of titanium abutments
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Supriya Kheur, Nimisha Singh, jean-yves Rauch, Shantanu Jambhekar, Mohit Kheur, Jyutika Rajwade, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS) more...
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[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,[INFO.INFO-DS]Computer Science [cs]/Data Structures and Algorithms [cs.DS] ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,[SPI.AUTO]Engineering Sciences [physics]/Automatic ,[SPI.MAT]Engineering Sciences [physics]/Materials - Abstract
International audience; Although titanium dental implants are biocompatible, exhibit excellent corrosion resistance and high mechanical resistance, the material fails in providing resistance to infection because it exhibits poor antimicrobial activity. To address these issues, we deposited silver onto titanium abutments (Grade 5 titanium discs) using direct current (DC) sputtering and assessed the antimicrobial activity and biocompatibility of the modified implant material. Atomic absorption spectrometry and X-ray photoelectron spectroscopy were employed to investigate the concentration and elemental composition of the deposited silver. As expected, silver deposited using DC plasma was uniform and good control over the deposition could be achieved by varying the sputtering time. Moderate biocompatible responses (up to 69% viability) were observed in primary human gingival fibroblast cells incubated in the presence of Ti sputtered with Ag for 5 min. Silver deposited titanium (Ti-Ag) showed excellent antibacterial effects on Pseudomonas aeruginosa and Streptococcus mutans at a very low concentration (Ag content 1.2 and 2.1 μg/mm2). However, higher concentration of silver (6 μg/mm2) was required to achieve a reduction in cell viability of Staphylococcus aureus and Candida albicans. The silver sputtered Ti abutments could maintain a long-term antibacterial activity as evidenced by the release of silver up to 22 days in simulated body fluid. Our study illustrates that silver deposited titanium is indeed a promising candidate for soft tissue integration on dental abutments and prevents initial microbial adhesion. more...
32. Light funneling from a photonic crystal laser cavity to an optical nano-antenna: toward antenna-based laser nano-emission
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Mathieu Mivelle, Pierre Viktorovitch, Fadi Issam Baida, Ali El Eter, Zhihua Xie, Than-Phong Vo, Elie Atie, Burr, Geoffrey W., Dusan Nedeljkovic, jean-yves Rauch, Ségolène Callard, Thierry Grosjean, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), INL - Nanophotonique (INL - Photonique), Institut des Nanotechnologies de Lyon (INL), École Centrale de Lyon (ECL), Université de Lyon-Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-École Centrale de Lyon (ECL), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), IBM Almaden Research Center [San Jose], IBM, Lovalite s.a.s. (Lovalite s.a.s.), Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), and Pyon, Sandrine more...
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[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,Physics::Optics ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics - Abstract
International audience; We show that the near-field coupling between a photonic crystal microlaser and a nanoantenna can enable hybrid photonic systems that are both physically compact and highly efficient at transferring optical energy into the nano-antenna. Up to 19.4% of the laser power from a micron-scale photonic crystal laser cavity is experimentally transferred to a bowtie aperture nano-antenna (BNA) whose area is 400-fold smaller than the overall emission area of the microlaser. Instead of a direct deposition of the nano-antenna onto the photonic crystal, it is fabricated at the apex of a fiber tip to be accurately placed in the near-field volume of the microlaser. Such light funneling within a hybrid structure provides a path for overcoming the diffraction limit in optical energy transfer to the nanoscale and should thus open promising avenues in the nanoscale enhancement and confinement of light in compact architectures, impacting applications such as biosensing, optical trapping, heating, spectroscopy, and nanoimaging. more...
33. Temperature dependence of electrical resistivity in oxidized vanadium films grown by the GLAD technique
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Alain Billard, Mohammad Arab Pour Yazdi, P. Pedrosa, Marta Horakova, Nicolas Martin, Jean-Yves Rauch, Verónica Collado, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and Czech Technical University in Prague (CTU) more...
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Materials science ,Annealing (metallurgy) ,[INFO.INFO-DS]Computer Science [cs]/Data Structures and Algorithms [cs.DS] ,Analytical chemistry ,chemistry.chemical_element ,Vanadium ,02 engineering and technology ,01 natural sciences ,Oxygen ,Vanadium oxide ,[SPI.AUTO]Engineering Sciences [physics]/Automatic ,[SPI.MAT]Engineering Sciences [physics]/Materials ,Sputtering ,Electrical resistivity and conductivity ,0103 physical sciences ,Materials Chemistry ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,Porosity ,[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,010302 applied physics ,Metallurgy ,Surfaces and Interfaces ,General Chemistry ,Sputter deposition ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Surfaces, Coatings and Films ,chemistry ,0210 nano-technology - Abstract
Vanadium and vanadium oxide thin films are deposited by DC magnetron sputtering. A first series of pure vanadium films are prepared by glancing angle deposition (GLAD). The incident angle α of the particle flux is systematically changed from 0 to 85°. For the second series, the angle α is kept at 85° and oxygen gas is injected during the growth by means of the reactive gas pulsing process (RGPP). A constant pulsing period P = 16 s is used whereas the oxygen injection time t ON is varied from 0 to 6 s. After depositing, films are annealed in air following 11 incremental cycles from room temperature up to 550 °C. For both series, the DC electrical resistivity is systematically measured during the annealing treatment. Vanadium films sputter deposited by GLAD become sensitive to the temperature for incident angles α higher than 60°. The most significant annealing effect is observed for films prepared with α = 85° with a strong increase of resistivity from 2.6 × 10 − 5 to 4.9 × 10 − 3 Ωm. It is mainly assigned to the oxidation of GLAD vanadium films, which is favoured by the high porous morphology produced for the highest incident angles. The resistivity vs. temperature evolution is also measured and related to the occurrence of the VO 2 phase. By combining GLAD and RGPP processes, the reversible variation of resistivity associated to the VO 2 phase is even more pronounced. Oxygen pulsing during deposition and the voided structure produced for the highest incident angles enhance the oxidation of vanadium through the films thickness. The porous architecture by GLAD and the oxygen injection by RGPP have to be carefully controlled and optimized for the growth of vanadium oxide compounds, especially to favour the formation of the VO 2 phase. more...
34. Dynamic micro-assembly of LiNbO3 microresonators with low-loss suspended waveguides
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Roland Salut, Philippe Lutz, Nadège Courjal, Alexis Caspar, Miguel Angel Suarez, Maria-Pilar Bernal, Clément Eustache, Florent Behague, Cédric Clévy, Olivier Lehmann, Venancio Calero, Jean-Yves Rauch, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS) more...
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Materials science ,Lithium niobate ,[INFO.INFO-DS]Computer Science [cs]/Data Structures and Algorithms [cs.DS] ,Physics::Optics ,02 engineering and technology ,01 natural sciences ,law.invention ,[SPI.AUTO]Engineering Sciences [physics]/Automatic ,[SPI.MAT]Engineering Sciences [physics]/Materials ,010309 optics ,chemistry.chemical_compound ,law ,0103 physical sciences ,Coupling efficiency ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,business.industry ,021001 nanoscience & nanotechnology ,Finite element method ,chemistry ,Optoelectronics ,Wafer dicing ,Photonics ,0210 nano-technology ,business ,Effective refractive index ,Waveguide - Abstract
International audience; We report on a LiNbO3 microresonator integrated in a low-loss free-suspended waveguide. The photonic elements are made by optical-grade dicing, and are assembled dynamically. This method opens the way to new 3D photonic architectures. more...
35. Experimental Thermal Performance Of A Stirling Machine Milli-Regenerator Made By Multiple Jet Molding
- Author
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Emna Dellali, François Lanzetta, Sylvie Bégot, Eric Gavignet, jean-yves Rauch, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and Femto-st, Energie more...
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[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,[SPI.ACOU] Engineering Sciences [physics]/Acoustics [physics.class-ph] ,[PHYS.MECA.THER] Physics [physics]/Mechanics [physics]/Thermics [physics.class-ph] ,[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,[INFO.INFO-DS]Computer Science [cs]/Data Structures and Algorithms [cs.DS] ,[SPI.NRJ]Engineering Sciences [physics]/Electric power ,[INFO.INFO-DS] Computer Science [cs]/Data Structures and Algorithms [cs.DS] ,[SPI.MAT] Engineering Sciences [physics]/Materials ,[SPI.MAT]Engineering Sciences [physics]/Materials ,[SPI.AUTO]Engineering Sciences [physics]/Automatic ,[SPI.AUTO] Engineering Sciences [physics]/Automatic ,[PHYS.MECA.THER]Physics [physics]/Mechanics [physics]/Thermics [physics.class-ph] ,[PHYS.MECA.MEFL] Physics [physics]/Mechanics [physics]/Fluid mechanics [physics.class-ph] ,[PHYS.MECA.MEFL]Physics [physics]/Mechanics [physics]/Fluid mechanics [physics.class-ph] ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,[SPI.NRJ] Engineering Sciences [physics]/Electric power - Abstract
International audience
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