7 results on '"Muroya, Yusa"'
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2. Effects of substituents in triphenylsulfonium cation on its radiation-induced decomposition and dissolution kinetics of chemically amplified resists
3. Substituent effects of acid generators on radiation-induced degradation and dissolution kinetics in chemically amplified resist process
4. Dynamics of ionized poly(4-hydroxystyrene)-type resist polymers with tert-butoxycarbonyl-protecting group.
5. Flexible waste management system for the future application of MA P&T technology to the current high-level liquid waste.
6. Extreme Ultraviolet Lithographic Performance and Reaction Mechanism of Polymeric ResistUtilizing Radical- and Acid-Amplified Cross-Linking.
7. Substituent effects of acid generators on radiation-induced degradation and dissolution kinetics in chemically amplified resist process
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