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Your search keyword '"*PHASE change memory"' showing total 1 results
Start Over Descriptor "*PHASE change memory" Search Limiters Full Text Topic extreme ultraviolet lithography Publisher american association for the advancement of science
1 results on '"*PHASE change memory"'

1. Thermally assisted nanotransfer printing with sub-20-nm resolution and 8-inch wafer scalability.

Author

Park, Tae Wan, Myunghwan Byun, Hyunsung Jung, Lee, Gyu Rac, Park, Jae Hong, Hyun-Ik Jang, Lee, Jung Woo, Se Hun Kwon, Seungbum Hong, Lee, Jong-Heun, Yeon Sik Jung, Kwang Ho Kim, and Park, Woon Ik

Subjects
*MATERIALS science, *EXTREME ultraviolet lithography, *PHASE change memory, *MATERIALS, *SCALABILITY, *POLYDIMETHYLSILOXANE
Abstract

The article demonstrates various complex pattern geometries, such as wave, square, nut, zigzag, and elliptical nanostructures, on diverse substrates via thermally assisted nanotransfer printing (T-nTP). It focuses on the state-of-the-art T-nTP process which combined with other emerging patterning techniques for the large-area nanofabrication of various devices; also highlights the use of a heat-rolling press system.

Published
2020
Full Text
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