1. High In content nitride sub-micrometer platelet arrays for long wavelength optical applications.
- Author
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Cai, Wentao, Furusawa, Yuta, Wang, Jia, Park, Jeong-Hwan, Liao, Yaqiang, Cheong, Hea-Jeong, Nitta, Shugo, Honda, Yoshio, Pristovsek, Markus, and Amano, Hiroshi
- Subjects
NITRIDES ,BLOOD platelets ,INDIUM gallium nitride ,TRANSMISSION electron microscopy ,WAVELENGTHS - Abstract
We demonstrate high, up to 30% In content InGaN sub-micrometer platelets on GaN by metalorganic vapor phase epitaxy. These InGaN platelets were selectively grown on flat GaN seeds formed in sub-micrometer-scale openings in a SiN
x mask. The platelets were highly uniform without any dislocations or pits, with an atomically flat (0001) surface. The typical height was ∼120 nm, which significantly exceeded the normal critical layer thickness of a c-plane InGaN film. The strain state was comprehensively characterized by microbeam x-ray diffraction and transmission electron microscopy. Due to a gradual elastic relaxation of strain, the In content increased almost linearly from bottom to top because of the strong strain-dependent In incorporation. These platelets can serve as high-quality strain-relaxed templates for long wavelength micro-light-emitting diodes. [ABSTRACT FROM AUTHOR]- Published
- 2022
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