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This work is focused on the design, fabrication, and characterization of silicon laterally resonant microcantilevers for measuring absolute pressure. The authors have demonstrated the integration of resonance electrostatic actuation and capacitive readout with a microstructure based on a couple of electrodes and an external amplifier. The microcantilevers have been fabricated with a standard silicon on insulator micromachining process. The characterization method is based on measuring the current at the third harmonic of the excitation frequency flowing through the time-varying cantilever-based capacitor. The variation in resonance response of microcantilevers has been investigated as a function of pressure (10-2-105 Pa), both in terms of resonance frequency and quality factor. Theoretical models and experimental data show very good agreement. The microstructure behavior demonstrates the feasibility of an absolute pressure sensor working over a six-decade range with integrated electrical actuation and readout. [ABSTRACT FROM AUTHOR]

This work is focused on the developing of silicon resonant microcantilevers for the measurement of the absolute pressure. The microcantilevers have been fabricated with a two-mask bulk micromachining process. The variation in resonance response of microcantilevers was investigated as a function of pressure (10-1–105 Pa), both in terms of resonance frequency and quality factor. A theoretical description of the resonating microstructure is given according to different molecular and viscous regimes. Also a brief discussion on the different quality factors contributions is presented. Theoretical and experimental data show a very satisfying agreement. The microstructure behavior demonstrates a certain sensitivity over a six decade range and the potential evolution of an absolute pressure sensor working in the same range. [ABSTRACT FROM AUTHOR]