1. Energy minimizers for an asymptotic MEMS model with heterogeneous dielectric properties
- Author
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Katerina Nik, Christoph Walker, Philippe Laurençot, Institut de Mathématiques de Toulouse UMR5219 (IMT), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS), Institut für Angewandte Mathematik [Hannover] (IFAM), Leibniz Universität Hannover=Leibniz University Hannover, Institut für Angewandte Mathematik (IFAM), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS), and Leibniz Universität Hannover [Hannover] (LUH)
- Subjects
Work (thermodynamics) ,Regularized Model ,Dielectric ,01 natural sciences ,35J50 - 49Q10 - 49J40 - 35R35 - 35Q74 ,Physics::Fluid Dynamics ,Mathematics - Analysis of PDEs ,obstacle problem ,Critical point (thermodynamics) ,Electrostatic Mems ,FOS: Mathematics ,[MATH.MATH-AP]Mathematics [math]/Analysis of PDEs [math.AP] ,Boundary value problem ,ddc:510 ,0101 mathematics ,Minimizers ,Mathematics ,Energy functional ,Microelectromechanical systems ,Applied Mathematics ,010102 general mathematics ,Boundary-Value-Problems ,Post-Touchdown Configurations ,Mechanics ,bilaplacian operator ,Dewey Decimal Classification::500 | Naturwissenschaften::510 | Mathematik ,010101 applied mathematics ,Elliptic curve ,shape derivative ,Deformation (engineering) ,Analysis ,Analysis of PDEs (math.AP) - Abstract
A model for a MEMS device, consisting of a fixed bottom plate and an elastic plate, is studied. It was derived in a previous work as a reinforced limit when the thickness of the insulating layer covering the bottom plate tends to zero. This asymptotic model inherits the dielectric properties of the insulating layer. It involves the electrostatic potential in the device and the deformation of the elastic plate defining the geometry of the device. The electrostatic potential is given by an elliptic equation with mixed boundary conditions in the possibly non-Lipschitz region between the two plates. The deformation of the elastic plate is supposed to be a critical point of an energy functional which, in turn, depends on the electrostatic potential due to the force exerted by the latter on the elastic plate. The energy functional is shown to have a minimizer giving the geometry of the device. Moreover, the corresponding Euler–Lagrange equation is computed and the maximal regularity of the electrostatic potential is established.
- Published
- 2020
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