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Start Over Author "文亮 Wen Liang" Publisher changchun institute of optics, fine mechanics and physics, chinese academy of sciences
1 results on '"文亮 Wen Liang"'

1. Optimization of via etching process of LTPS TFT interlayer dielectric

Author

彭涛 Peng Tao, 郭太良 Guo Tai-liang, 陈丽雯 Chen Li-wen, 文亮 Wen Liang, 周秀峰 Zhou Xiu-feng, and 叶芸 Ye Yun

Subjects
Materials science, business.industry, Etching (microfabrication), Thin-film transistor, Scientific method, Signal Processing, Optoelectronics, Dielectric, business, Instrumentation, Electronic, Optical and Magnetic Materials
Published
2016
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