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Start Over Author "L. C. Hopkins" Publisher elsevier bv
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1. Properties and applications of carbon-doped GaAs and AlxGa1-xAs layers grown by MBE with a pyrolytic graphite filament

Author

Timothy D. Harris, Rose Kopf, Y. Anand, L. C. Hopkins, W.D. Braddock, J. Nagle, Robert Hull, M. Geva, M. Micovic, Roger J. Malik, R. W. Ryan, and J. M. Vandenberg

Subjects
Inorganic Chemistry, Secondary ion mass spectrometry, Van der Pauw method, Reflection high-energy electron diffraction, Photoluminescence, Chemistry, Doping, Materials Chemistry, Analytical chemistry, Pyrolytic carbon, Thin film, Condensed Matter Physics, Epitaxy
Abstract

Carbon-doped GaAs and Al x Ga 1-x As epilayers have been grown by solid source MBE using resistively heated, pyrolytic graphite filaments for the carbon source. These films were characterized by SIMS, Van der Pauw, X-ray diffraction, photoluminescence. TEM, I-V, and RHEED measurements. The diffusion coefficients and minority carrier lifetimes for C- and Be-doped epilayers are compared. Some potential device applications for C-doped layers are discussed

Published
1993
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