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Your search keyword '"De Gendt, Stefan"' showing total 2 results
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2 results on '"De Gendt, Stefan"'

1. Integrating high-k dielectrics: etched polysilicon or metal gates?

Author

Schram, Tom, Beckx, Stephan, De Gendt, Stefan, Vertommen, Johan, and Lee, Steve

Subjects
*DIELECTRICS, *SILICON, *ELECTRODES, *ELECTRIC capacity
Abstract

Assesses the compatibility of dielectric layers with conventional polysilicon gate electrodes. Use of standard processing equipment; Power capacity; Level of performance.

Published
2003

2. Improving workfunction control of metal gate electrodes.

Author

Pantisano, Luigi, Schram, Tom, Heyns, Marc, O'Sullivan, Barry, De Gendt, Stefan, and Groeseneken, Guido

Subjects
*ELECTRON work function, *ELECTRODES, *METAL oxide semiconductor field-effect transistors, *DIELECTRICS, *TEMPERATURE effect, *SEMICONDUCTORS
Abstract

The article discusses the means of improving the workfunction control of metal gate electrodes. The author cites that the key challenge for applying metal gates for metal-oxide-semiconductor field-effect transistor is the choosing of a metal with suitable workfunction. The author also defines a novel route to workfunction control through the alteration of the interface polarization layer by cautious deposition of dielectric stack and metal gate, then, by a temperature treatment.

Published
2006

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