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4 results on '"Tortai, J.-H."'

1. Core-shell percolative nanodielectric for high voltage integrated capacitors: comparative study on different metal carbon coated (Co, Ni & Cu) inclusions

Author

Lapeyronie, C., ALFONSO, M.S., Viala, B., TORTAI, J.-H., Clot, Marielle, Laboratoire des technologies de la microélectronique (LTM ), and Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)

Subjects
[PHYS]Physics [physics], ComputingMilieux_MISCELLANEOUS, [PHYS] Physics [physics]
Abstract

International audience

Published
2021

2. Core-Shell Percolative Nanodielectric for High Voltage Integrated Capacitors

Author

Alfonso, M, Viala, B, Tortai, J.-H, Laboratoire des technologies de la microélectronique (LTM ), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA), CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information, Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), and Alfonso, Marco Salvatore

Subjects
Condensed Matter::Soft Condensed Matter, [PHYS]Physics [physics], [SPI]Engineering Sciences [physics], [SPI] Engineering Sciences [physics], dielectric properties, [CHIM] Chemical Sciences, Physics::Optics, [CHIM]Chemical Sciences, carbon coated nanoparticles, high-k composite, [PHYS] Physics [physics]
Abstract

International audience; High-k dielectric nanocomposites are promising materials to miniaturize integrated capacitors. In this work, we investigate core-shell Metal Polymer Composites (MPC) having nanoparticles (carbon-coated nickel, Ni@C) dispersed in a polymer matrix (Polystyrene). A three-step formulation (desagglomeration, surface functionalization and dispersion in a polymeric matrix) was used with simple sonochemical methods. The original core-shell structure of the MPC results of the grafting of a thin second polymer layer on the carbon coating. Finally, films of MPC were deposited on silicon wafers by spincoating and Metal-Insulator-Metal (MIM) capacitors were fabricated. The dielectric response was investigated by using broadband dielectric spectroscopy.Preliminary results show that below the percolation threshold, MPC with a core-shell structure exhibits twice the dielectric constant of the polymer with similar losses that is encouraging for the future (higher dielectric constant, similar loss).

Published
2019

3. Material and processing impact on thermal properties of thin resist films for high resolution lithography

Author

Tortai, J. H., sandrine marceau, Karadimos, G., Vourdas, N., Gogolides, E., Raptis, I., Werden, K., Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS), and Clot, Marielle

Subjects
ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2005

4. Dispositif de caractérisation thermique des résines

Author

Tortai, J-H., Landis, S., Clot, Marielle, Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), and Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[PHYS]Physics [physics], [PHYS] Physics [physics]
Published
2003

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