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This paper proposes a new Al-Ge eutectic bonding method for MEMS hermetical packaging based on network-like patterning. This kind of patterning provides inner space for eutectic metals to fill inside when Al and Ge turn into liquid phase at their eutectic melting point during bonding process. This is a very promising alternative approach to eutectic bonding that improves the reliability of the bonding procedure with a low requirement for temperature and pressure control. Preliminary experimental results shows an acceptable reduction of the eutectic side leakage.

Current calibration for high-g accelerometer is mainly based on Hopkinson bar trail. On practical application, we found that there are deviations between calibrated results and the response of an accelerometer. In this work, relevant experiments are designed to verify this deviation. A method for compensating the results obtained by shock excitation with short duration was proposed, which is expected to become a new test standard for high-g accelerometers through subsequent improvement and verification.

This paper proposes a MEMS thermal and vibration isolator to be integrated with micro devices. The isolator is able to generate an attenuated thermal and vibration condition via lock-shaped polydimethylsiloxane (PDMS) beam arrays due to the ultra-low thermal conductivity and Young modulus of PDMS. Thermal simulations have been carried out to indicate the efficient heat resistance of the isolator in both static and transient heat transfer processes. And harmonic response simulations have also been conducted to test the performance of vibration isolation. This approach decouples the design of harsh environment resistance from the device design, guaranteeing device performance in both thermal and vibration working conditions. It may broaden the application domains of MEMS devices, especially in military and space missions.

This paper reports a novel shock protector on the basis of compliant latching system for the shock resistance enhancement of microelectromechanical systems (MEMS) devices applied in high shock environment. For the first time, MEMS latches have been employed to dissipate energy during impact. Through the machine logic, the MEMS latches have realized different shock protection functions upon relative impact amplitudes to reduce the impact force applied on microstructures. In this work, the compliant latching stopper has been verified to provide multi-fold shock resistance improvement compared with some traditional shock protection structure such as hard stopper and compliant spring stopper.

Urban traffic noise has become a growing public concern and the public is requiring 'quieter pavement' be constructed to abate traffic noise levels. On the traffic noise concerned by developed countries, the research and development of traffic noise control and quieter pavement were introduced and discussed, some program of quieter pavement research and test methods and research results were presented. The tire/pavement noise is greatly influenced by pavement surface characteristics such as gradation, macro texture, age, and presence of distresses.