1. Low-temperature fabricated TFTs on polysilicon stripes
- Author
-
Brunets, Ihor, Holleman, Jisk, Kovalgin, Alexey Y., Boogaard, Arjen, and Schmitz, Jurriaan
- Subjects
Complementary metal oxide semiconductors -- Evaluation ,Oscillators (Electronics) -- Design and construction ,Polysilicon -- Electric properties ,Polysilicon -- Thermal properties ,Thin film devices -- Design and construction ,Business ,Electronics ,Electronics and electrical industries - Abstract
A novel approach is described for making high-performance CMOS at low temperatures. CMOS inverters and fully functional 51-stage ring oscillators are fabricated in this process and this process is used for large-area TFT electronics as well as a functional stack layer in 3-D integration.
- Published
- 2009