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In biomedical studies as well as in clinical trials, it is often useful to have a reliable measure of the force exerted by the body (e.g., clenching force at the teeth or pinch force at fingertips) or on the body by external stimuli (e.g., taps to elicit reflexes or local pressure for nociceptive stimulation). Thin-film sensors such as FlexiForce® provide a very handy and versatile solution for these applications, but can be easily damaged and offer poor accuracy and repeatability, being heavily affected by the surface material they come into contact with. The aim of the study is the realization of a 3D-printed housing that completely embeds the sensor, thus providing mechanical protection and increasing the reliability of the measurement. The increasing availability of 3D printers and of printing materials for medical use allows the user to shape the housing according to specific needs, with short developing time and low cost. [ABSTRACT FROM AUTHOR]

We discuss the effect of topological inhomogeneity of very thin metallic conductometric sensors on their response to external stimuli, such as pressure, intercalation, or gas absorption, that modify the material's bulk conductivity. The classical percolation model was extended to the case in which several independent scattering mechanisms contribute to resistivity. The magnitude of each scattering term was predicted to grow with the total resistivity and diverge at the percolation threshold. We tested the model experimentally using thin films of hydrogenated palladium and CoPd alloys where absorbed hydrogen atoms occupying the interstitial lattice sites enhance the electron scattering. The hydrogen scattering resistivity was found to grow linearly with the total resistivity in the fractal topology range in agreement with the model. Enhancement of the absolute magnitude of the resistivity response in the fractal range thin film sensors can be particularly useful when the respective bulk material response is too small for reliable detection. [ABSTRACT FROM AUTHOR]

Excess heat capacity in a bolometric detector has the consequence of increasing or leading to multiple device time constants.  The Mo/Au bilayer transition edge sensor (TES) bolometric detectors initially fabricated for the high resolution mid-infrared spectrometer (HIRMES) exhibited two response thermalization scales, one of which is a few times longer than estimates based upon the properties of the bulk materials employed in the design. The relative contribution of this settling time to the overall time response of the detectors is roughly proportional to the pixel area, which ranges between ∼0.3 and 2.6 mm2.  Use of laser ablation to remove sections of the silicon membranes comprising the pixels results in a detector response with a smaller contribution from the secondary time constant.  Additional information about the nature of this excess heat capacity is gleaned from glancing incidence X-ray diffraction, which reveals the presence of molybdenum silicides near the silicon surface which is a consequence of the bi-layer deposition.  Quantitative analysis of the concentration of excess molybdenum, estimated with secondary ion mass spectroscopy, is commensurate to the additional heat capacity needed to explain the anomalous time response of the detectors. [ABSTRACT FROM AUTHOR]

This study reports an insightful portable vector network analyser (VNA)‐based measurement technique for quick and selective detection of Hg2+ ions in nanomolar (nM) range using homocysteine (HCys)‐functionalised quartz‐crystal‐microbalance (QCM) with cross‐linked‐pyridinedicarboxylic acid (PDCA). The excessive exposure to mercury can cause damage to many human organs, such as the brain, lungs, stomach, and kidneys, etc. Hence, the authors have proposed a portable experimental platform capable of achieving the detection in 20–30 min with a limit of detection (LOD) 0.1 ppb (0.498 nM) and a better dynamic range (0.498 nM–6.74 mM), which perfectly describes its excellent performance over other reported techniques. The detection time for various laboratory‐based techniques is generally 12–24 h. The proposed method used the benefits of thin‐film, nanoparticles (NPs), and QCM‐based technology to overcome the limitation of NPs‐based technique and have LOD of 0.1 ppb (0.1 μg/l) for selective Hg2+ ions detection which is many times less than the World Health Organization limit of 6 μg/l. The main advantage of the proposed QCM‐based platform is its portability, excellent repeatability, millilitre sample volume requirement, and easy process flow, which makes it suitable as an early warning system for selective detection of mercury ions without any costly measuring instruments. [ABSTRACT FROM AUTHOR]

In this study, the authors demonstrate the fabrication, calibration, and testing of a piezoresistive microcantilever‐based sensor for biomedical microelectromechanical system (BioMEMS) application. To use any sensor in BioMEMS application requires surface modification to capture the targeted biomolecules. The surface alteration comprises self‐assembled monolayer (SAM) formation on gold (Au)/chromium (Cr) thin films. So, the Au/Cr coating is essential for most of the BioMEMS applications. The fabricated sensor uses the piezoresistive technique to capture the targeted biomolecules with the SAM/Au/Cr layer on top of the silicon dioxide layer. The stiffness (k) of the cantilever‐based biosensor is a crucial design parameter for the low‐pressure range and also influence the sensitivity of the microelectromechanical system‐based sensor. Based on the calibration data, the average stiffness of the fabricated microcantilever with and without Au/Cr thin film is 141.39 and 70.53 mN/m, respectively, which is well below the maximum preferred range of stiffness for BioMEMS applications. The fabricated sensor is ultra‐sensitive and selective towards Hg2+ ions in the presence of other heavy metal ions (HMIs) and good enough to achieve a lower limit of detection 0.75 ng/ml (3.73 pM/ml). [ABSTRACT FROM AUTHOR]

This article describes a simple though extremely effective sensor for acetone monitoring in the breath. The sensor is capable of monitoring the presence of acetone at parts per million (ppm) concentrations, thus being suitable for a diabetes diagnosis. It has a dimension of $3 {\,\,\mathrm {mm}} \times 6 {\,\,\mathrm {mm}}$ and a cost of less than one dollar. The small dimensions allow one to greatly limit the power required to increase its temperature, and its high selectivity with respect to other gases present in the breath reduces the risk of false-positive responses. The sensor is based on a thin alumina substrate on which platinum strips are deposited on both faces. A thin Nb2O5 layer with a nanometric thickness provides the required sensitivity and selectivity. Sensor prototypes have been characterized by field emission scanning electron microscopy (FESEM) and X-ray photoelectron spectroscopy (XPS) and proved an inherent linear response up to a few ppm of acetone. [ABSTRACT FROM AUTHOR]

This study describes a low‐cost sensor‐based scheme for online moisture measurement in transformer oil. Considering a harsh environment, moisture measurement of oil at ppm level is challenging, so the sensor should be highly sensitive and thermally and chemically stable. The conventional methods are mostly offline, have long test times and are costly. A thin‐film parallel plate capacitive moisture sensor has been fabricated using inexpensive materials to measure the moisture of fresh, aged and 0.5% water content oil samples. The moisture sensing film is highly hydrophilic and is made of alumina oxide, a very stable material. Experiments were conducted to determine the response parameters of the sensor in the presence of moist nitrogen gas, the concentration of which was measured by a commercial SHAW dew point meter. Experiments were also performed to measure the moisture of different oil samples in the laboratory. Results show that the output of the sensor is sensitive (6 pF/ppm moisture), has negligible hysteresis (∼1% at 1 kHz) and has fast response and recovery times (Tres = 70 s, Trec = 170 s). [ABSTRACT FROM AUTHOR]

To diagnose the running state of bushing and avoid serious power grid accidents, online multi‐parameter monitoring equipment for dissolved hydrogen, oil pressure and temperature in bushing oil was developed. The equipment includes three units: signal acquisition, control cabinet and data analysis. A new hydrogen sensor without oil–gas separation membrane and based on palladium alloy film technology was developed. A three‐in‐one sensor for hydrogen, oil temperature and pressure monitoring has been developed, which has the advantages of miniaturisation, lightweight and easy installation. Test results show the hydrogen measurement range of the sensor is 0–5000 ppm, and the accuracy can reach 10% or 15 ppm (with larger values). The pressure measurement range is 0–1.0 MPa, the resolution is 0.1 kPa, and the accuracy can reach 0.25 grade. The temperature measurement range is −40 to 105°C, and the accuracy is ±1°C. The measurement performance of the device fully meets the requirement of online monitoring of transformer bushing. The equipment has been put into operation in a 330 kV substation, which can monitor the bushing status online and help eliminate the early latent fault of bushing in the weak budding state. [ABSTRACT FROM AUTHOR]

This paper discloses two high-sensitivity probes for Eddy Current Nondestructive Test (NDT) of buried and surface defects. These probes incorporate eight and 32 magnetoresistive sensors, respectively, which are optimized for high sensitivity and spatial resolution. The signal processing and interfacing are carried out by a full-custom application-specific integrated circuit (ASIC). The ASIC signal chain performs with a thermal input-referred noise of 30 nV/ $\sqrt{\text{Hz}}$ at 1 kHz, with 66 mW of power consumption, in a die with 3.7×3.4 mm $^2$. NDT results are presented, showing that there is an increase in spatial resolution of surface defects when contrasted to prior art, enabling the probes to resolve defects with diameters of 0.44 mm, pitches of 0.6 mm, and minimum edge distance as low as 0.16 mm. The results also show that the probe for buried defects is a good all-round tool for detection of defects under cladding and multiple-plate flat junctions. [ABSTRACT FROM AUTHOR]

A kirigami-based strategy was investigated for strain transduction, using serpentine gold traces embedded in thin-film Parylene C. Multiple kirigami slit designs were evaluated via COMSOL simulation and mechanical force testing; sensors having tightly packed slits stretched up to 17.5 mm (350% strain) before mechanical failure and 9 mm (180% strain) before electrical failure. Strain transduction was achieved by monitoring DC resistance changes during stretching. DC resistance linearly increased with strain, with sensitivities up to 0.16 $\Omega$ /mm (gauge factor = 0.007) and minimal hysteresis. High-frequency trace impedance and inter-trace capacitance were also investigated during strain cycling. Capacitance increased with strain and high-frequency impedance show a nonlinear strain relationship. The biocompatible construction and extremely low profiles (20 $\mu \text{m}$ thick) of these sensors are attractive for minimally invasivein vivostrain sensing applications. [2018-0130] [ABSTRACT FROM AUTHOR]

The authors report quartz crystal microbalance (QCM) integrated with hexagonal boron nitride–graphene (hg) monolayer heterostructure as a sensor to detect mass flow of sulphur hexafluoride (SF6), an important electrical insulating gas, under humid conditions. Their recent work demonstrated an enhancement in QCM sensing characteristics upon attaching monolayer 2D materials onto the QCM electrode surface and its application for improved relative humidity measurement. Here, they extend this approach to detect flow of SF6 gas causing variation in relative humidity. They fabricated a hg-QCM sensor by transferring the heterostructure thin film onto the QCM electrode surface using a standard wet transfer technique and measured return loss of the QCM under SF6 gas flow at a selected RH condition. The mass flow of the humid SF6 gas effects perturbation in damping at the QCM surface as indicated by changes in the motional resistance of the QCM. The motional resistance changes introduced significant variation in loaded Q-factor, the magnitude of which was gas species-dependent, thus allowing to distinguish SF6 from other common electronics gases. [ABSTRACT FROM AUTHOR]

Superconducting titanium thin films are good candidates for transition edge sensors. In this paper, we deposit titanium thin films on cooled silicon-on-insulator substrates by using electron-beam evaporation. The deposition rate dependence of the film stress, resistivity, and superconducting transition temperature are presented and analyzed. The relationship between film electrical properties and thickness is discussed. For investigating the heating influence on thin Ti films, a depth profile of oxygen diffusion in the films is also analyzed by X-ray photoelectron spectroscopy. [ABSTRACT FROM AUTHOR]

A new selective and sensitive optical sensor based on the incorporation of new synthesized N′-(2-hydroxy-5-iodobenzylidene) isonicotinohydrazide (HIBIN) as an effective reagent into the nanoporous of a transparent glass like material through the sol–gel process was developed which was suitable for the determination of copper (II) ions in aqueous solutions. The thin film sensors were constructed by spin-coating of prepared sol onto glass plate and their surface morphology were studied by field emission scanning electron microscopy (FE-SEM) and atomic force microscope (AFM) technique. Influence of sonication time on immobilization of HIBIN into silica matrix was investigated through calculation of leaching percentage. The Results shown that sonication time of 35 min is suitable to give more stable thin films without fluctuation in sensitivity and response time of presented sensor for a long period of time. The proposed optical sensor can be used for determination of copper (II) ions in the range of 9.1 × 10 −8 –1.12 × 10 −5  mol L −1 with a detection limit of 1.8 × 10 −8  mol L −1 . It also showed relative standard deviation 3.4 and 0.72% for reproducibility and repeatability respectively, along with a fast response time about of 2 min. The constructed optode is stable in wet conditions and could be stored for at least 6 weeks without observing any change in its sensitivity. The developed sensor was successfully applied to the determination of copper (II) in fruit juice and water samples which results were confirmed by atomic absorption spectrometry method. [ABSTRACT FROM AUTHOR]

The effects of UV-ozone (UVO) treatment on the sensing behaviours of extended-gate field-effect transistors (EGFETs) that use Al2O3 as the sensing film have been investigated. The Al2O3 sensing films are UVO-treated with various duration times and the corresponding EGFET sensing behaviours, such as sensitivity, hysteresis and long-term stability, are electrically evaluated under various measurement conditions. Physical analysis is also performed to characterize the surface conditions of the UVO-treated sensing films using X-ray photoelectron spectroscopy and atomic force microscopy. It is found that UVO treatment effectively reduces the buried sites in the Al2O3 sensing film and subsequently results in reduced hysteresis and improved long-term stability of EGFET. Meanwhile, the observed slightly smoother Al2O3 film surface post UVO treatment corresponds to decreased surface sites and slightly reduced pH sensitivity of the Al2O3 film. The sensitivity degradation is found to be monotonically correlated with the UVO treatment time. A treatment time of 10 min is found to yield an excellent performance trade-off: clearly improved long-term stability and reduced hysteresis at the cost of negligible sensitivity reduction. These results suggest that UVO treatment is a simple and facile method to improve the overall sensing performance of the EGFETs with an Al2O3 sensing film. [ABSTRACT FROM AUTHOR]

We report on investigation of the mechanical properties of paper electronics (printed and made out of paper). One key objective of such paper electronics is to achieve ultraflexibility. Therefore, it is important to understand electrical functionality and reliability of paper electronics under various physical (mechanical) deformations. Here, we show the general mechanical properties of the cellulose paper used and its electrical behavior under applied strain, tackling the main effects that need to be identified when building paper-based systems, from product performance and stability perspective. An overview of the stress–strain behavior of silver ink on paper is discussed, and then, we tackle a more specific analysis of the performance variations of paper sensors made with recyclable household materials when exposed to various mechanical conditions of tensile and compressive bending. This paper is important for developing stable wearable sensors for incorporation into Internet of Everything applications. [ABSTRACT FROM PUBLISHER]

A thermal stress range analysis of tungsten-rhenium thin film thermocouples based on ceramic substrates is presented to analyze the falling off and breakage problems caused by the mismatch of the thermal stresses in thin film thermocouples (TFTCs) and substrate, and nano-indentation experiments are done to measure and calculate the film stress to compare with the simulation results. Optimal design and fabrication of tungsten-rhenium TFTCs based on ceramic substrates is reported. Static high temperature tests are carried out, which show the optimization design can effectively reduce the damage caused by the thermal stress mismatch. [ABSTRACT FROM AUTHOR]

This paper presents a ferroelectric polymer-based temperature sensor designed for microfluidic devices. The integration of the sensor into a system-on-a-chip platform facilitates quick monitoring of localized temperature of a biological fluid, avoiding errors in the evaluation of thermal evolution of the fluid during analysis. The contact temperature sensor is fabricated by combining a thin pyroelectric film together with an infrared source, which stimulates the active element located on the top of the microfluidic channel. An experimental setup was assembled to validate the analytical model and to characterize the response rate of the device. The evaluation procedure and the operating range of the temperature also make this device suitable for applications where the localized temperature monitoring of biological samples is necessary. Additionally, ease of integration with standard microfluidic devices makes the proposed sensor an attractive option for in situ analysis of biological fluids. [ABSTRACT FROM AUTHOR]

Capacitive fringing field sensors have been used in some non‐contact detections. A lateral displacement measurement method based on fringing field capacitors is investigated by simulations and experiments in this study. For the conventional interdigitated structure, the periodic electric field distribution is obtained because of those alternate electrodes, which produces periodic capacitances along with the target displacement. However, it is inconvenient to construct measurement systems due to the non‐linear capacitance output. A dentate structure is proposed to improve the output characteristics of displacement measurement. The periodic uniform electric field is achieved by the dentate electrodes, which brings the linear capacitance variation in every period. Indium–tin oxide film was employed to fabricate a prototype, and the experiment results indicate that the dentate structure can be used in the lateral displacement measurement for its linear output characteristics. [ABSTRACT FROM AUTHOR]

Latent insulation defects introduced in manufacturing process of gas-insulated switchgears can lead to partial discharge during long-time operation, even to insulation fault if partial discharge develops further. Monitoring of decomposed components of SF6, insulating medium of gas-insulated switchgear, is a feasible method of early-warning to avoid the occurrence of sudden fault. Polyaniline thin-film with protonic acid deposited possesses wide application prospects in the gas-sensing field. Polyaniline thin-film sensors with only sulfosalicylic acid deposited and with both hydrochloric acid and sulfosalicylic acid deposited were prepared by chemical oxidative polymerization method. Gas-sensing experiment was carried out to test properties of new sensors when exposed to H2S and SO2, two decomposed products of SF6 under discharge. The gas-sensing properties of these two sensors were compared with that of a hydrochloric acid deposited sensor. Results show that the hydrochloric acid and sulfosalicylic acid deposited polyaniline thin-film sensor shows the most outstanding sensitivity and selectivity to H2S and SO2 when concentration of gases range from 10 to 100 μL/L, with sensitivity changing linearly with concentration of gases. The sensor also possesses excellent long-time and thermal stability. This research lays the foundation for preparing practical gas-sensing devices to detect H2S and SO2 in gas-insulated switchgears at room temperature. [ABSTRACT FROM AUTHOR]

Paper-based scaffolds are an attractive material for generating 3D tissue-like cultures because paper is readily available and does not require specialized equipment to pattern, cut, or use. By controlling the exchange of fresh culture medium with the paper-based scaffolds, we can engineer diffusion-dominated environments similar to those found in spheroids or solid tumors. Oxygen tension directly regulates cellular phenotype and invasiveness through hypoxia-inducible transcription factors and also has chemotactic properties. To date, gradients of oxygen generated in the paper-based cultures have relied on cellular response-based readouts. In this work, we prepared a luminescent thin film capable of quantifying oxygen tensions in apposed cell-containing paper-based scaffolds. The oxygen sensors, which are polystyrene films containing a Pd(II) tetrakis(pentafluorophenyl)porphyrin dye, are photostable, stable in culture conditions, and not cytotoxic. They have a linear response for oxygen tensions ranging from 0 to 160 mmHg O, and a Stern-Volmer constant ( K) of 0.239 ± 0.003 mmHg O. We used these oxygen-sensing films to measure the spatial and temporal changes in oxygen tension for paper-based cultures containing a breast cancer line that was engineered to constitutively express a fluorescent protein. By acquiring images of the oxygen-sensing film and the fluorescently labeled cells, we were able to approximate the oxygen consumption rates of the cells in our cultures. [Figure not available: see fulltext.] [ABSTRACT FROM AUTHOR]

A fluorescent conjugated polymer thin film sensor via the electropolymerization for fluorescent detection of Fe 3+ in aqueous solution was successfully fabricated using a poly(5-cyanoindole) (P5CI), which was electrochemically prepared in the mixed electrolyte of boron trifluoride diethyl etherate, diethyl ether and tetrabutylammonium tetrafluoroborate on ITO electrodes by successive cyclic voltammetry. The thickness of the electropolymerized P5CI thin film could be precisely controlled by optimizing scan cycles and scan rates. The as-obtained fluorescent P5CI thin film sensor could effectively recognize Fe 3+ with outstanding sensitivity, selectivity, reversibility and reproducibility over other commonly coexistent metal ions and anions, and realize the quantitative determination of Fe 3+ in a linear range of 0.2 μM–0.5 mM with a detection limit of 0.897 ppb. The reversibility and reproducibility of P5CI thin film sensor were assessed. Satisfactory results indicated that fluorescent conjugated polymers via the electropolymerization provided a promising candidate for fluorescent thin film sensor. [ABSTRACT FROM AUTHOR]

This paper deals with the development of an accurate and precise humidity sensor, which is based on the extension of Thompson and Lampard theorem and a sol–gel-based thermally and chemically stable metal oxide thin film. In light of the extension of the theorem, most appropriate conductors are shaped around the material and the resulting sensor has cross conductance, which is the function of thickness only. It is fabricated and tested for different ranges of humidity. It is found that the fabricated sensor has outstanding static and dynamic characteristics. [ABSTRACT FROM PUBLISHER]

In this paper, we are proposing a novel rapid sol–gel thin-film porous metal–oxide-based surface acoustic wave (SAW) humidity sensor. For the SAW sensor, the center frequency of 433.92 MHz has been selected, and the device has been configured in a high-frequency oscillator circuit to explore the frequency response in the presence of water vapor. The sensitive thin film of sol–gel $\gamma $ -Al2O3 coated with a drop dry method offers very high surface-to-volume ratio with the distribution of micropores making the sensor highly sensitive for moisture detection. Pore morphologies of the film have been studied by field emission scanning electron microscope and atomic force microscopy. The \gamma $ phase of alumina of the film has been characterized with X-ray diffraction. The sensor has been tested from 3% relative humidity (RH) to 85% RH. The proposed sensor has very fast ( T_{r}= 1 s) response time and excellent yield ratio in comparison with the conventional commercial capacitive aluminum oxide sensor. The sensitivity (3%–20% RH) and the hysteresis (3%–85% RH) are found to be 120-Hz/% RH and 0.3%, respectively. The sensor can be useful for different applications, including moisture dispersion inside electronic gadgets, dryers, ovens, textile production, semiconductor device processing, food processing, medicine, and sealed packages. [ABSTRACT FROM PUBLISHER]

This study describes a novel floor sensor network being developed to provide a competitive and universal pressure mapping technology for a wide range of medical, research and security applications. The presented sensor network consists of 16 sensor elements distributed in a 4x4 sensor matrix. The sensor elements are made of a special dielectric electro-active polymer film being capable of capacitive sensing of the surface pressure. Each sensor unit is 200x160 mm resulting in an overall sensor matrix size of 800x740 mm. A high precision and high speed sensor interface was realized to provide a differential capacitance measurement method fulfilling the specific measuring requirements of the sensor matrix. Based on the measurement results, the developed sensor network is capable of measuring the distributed weight on their surface with an accuracy of 5 kg, however, this initial measuring accuracy can be significantly increased by improving the manufacturing technology of the sensor elements. [ABSTRACT FROM AUTHOR]

As highly sensitive H2S gas sensors, Au- and Ag-catalyzed SnO2 thin films with morphology-controlled nanostructures were fabricated by using e-beam evaporation in combination with the glancing angle deposition (GAD) technique. After annealing at 500 °C for 40 h, the sensors showed a polycrystalline phase with a porous, tilted columnar nanostructure. The gas sensitivities (S = Rgas/Rair) of Au and Ag-catalyzed SnO2 sensors fabricated by the GAD process were 0.009 and 0.015, respectively, under 5 ppm H2S at 300 °C, and the 90% response time was approximately 5 s. These sensors showed excellent sensitivities compared with the SnO2 thin film sensors that were deposited normally (glancing angle = 0°, S = 0.48). [ABSTRACT FROM AUTHOR]

A new humidity sensor based on graphene oxide quantum dots (GOQDs)/polyelectrolyte [polymer (diallylimethyammonium chloride) (PDDA)] composite sensing films was proposed. A few layers of GOQDs anchor on PDDA were prepared on the substrate via covalent bonds. A 0D scale, hydrophilicity, and super‐permeation of GOQDs endow the sensor an ultrafast response with about 32 ms response time and 48 ms recovery time. Meanwhile, the response was hardly affected due to covalent anchor of the composite film even after the sensor was soaked in water for several times. [ABSTRACT FROM AUTHOR]

Abstract: In this paper, an experimental method for measuring dynamic behavior of materials at high strain rates is developed. The strain and stress of a specimen are obtained using a high-precision photonic Doppler velocimetry system and a sensitive polyvinylidene fluoride thin-film sensor respectively. Based on the assumptions of one-dimensional stress state and negligible volume change at plastic deformation stage, the dynamic stress–strain relationship of materials can be determined. Using Al-2024T351 alloy and copper as model materials, the method demonstrates its effectiveness in measuring dynamic behavior of materials at high strain rates. [Copyright &y& Elsevier]

This paper presents a surface-micromachining technology to fabricate silicon carbide (SiC)-based capacitive micromachined ultrasonic transducers (CMUTs). The use of dc-sputtered amorphous SiC as a structural layer allows the fabrication process to limit the temperature to a thermal budget of 200 °C, which is the lowest reported to date, making this technology ideally suited for above-IC integration. The high Young's modulus of the deposited SiC film, along with its very low residual stress, results in high strength and resilient CMUT membranes. The placement of the suspended aluminum electrode directly at the bottom side of the membrane reduces the effective size of the electrostatic transduction gap, resulting in superior electro-mechanical coupling. Fabricated transducers are tested in air with both continuous-wave and pulsed signals, using a pitch-and-catch configuration. The transducer pair, composed of 110-μm-diameter membrane arrays, exhibits a resonant frequency of 1.75 MHz, a 3 dB-bandwidth of 0.15 MHz, and a transmission gain of -38 dB. The CMUT prototypes showcase the versatility of low-temperature dc-sputtered SiC films applied in the field of MEMS. [ABSTRACT FROM AUTHOR]

We present an enhanced in-plane capacitive readout for sensing out-of-plane displacement in a MEMS acoustic sensor. The sensor is fabricated in a multi-user silicon-on-insulator process, using a thicker device layer to reduce misalignment between moving and fixed comb fingers. This misalignment is found to reduce the sensitivity and render the response nonlinear. In addition, incorporation of a branched comb design doubles the readout capacitor surface area for a given sensor size, to further increase the sensitivity. These two modifications restore linearity to the readout and increase its sensitivity to displacement by an order of magnitude. [ABSTRACT FROM AUTHOR]

We report on the design, fabrication, and characterization of a microfabricated 3D magnetic field sensor that is suitable for co-integration with inertial sensors to form single-chip inertial measurement units. In contrast to classical resonant MEMS magnetometers, which are based on Lorentz force measurement, our sensor uses permanent magnetic materials and piezoresistive detection with silicon strain gauges of nanometric section, leading to low power consumption and high sensitivity for small sensor size. Thin multilayers of CoFe and PtMn as ferro- and antiferromagnetic materials are integrated within the MEMS fabrication process. Sensitivities of 1.09 V/T for x- and y- components of the magnetic field and 0.124 V/T for z- component of the magnetic field were measured, respectively. To be sensitive to magnetic fields along all three spatial directions, two permanent magnetization directions on the same die are required. Implementation of the two magnetization directions was validated by a measured correlation of 99.7% between x- and y- sensitivity axes. Power consumption of the 3D sensor is for polarization with a 100 μA dc current. With resolutions of 100 nT/√Hz for x- and y-component of the magnetic field and 350 nT/√Hz for z- component, the sensor is suitable for precise measurement of earth magnetic field. [ABSTRACT FROM AUTHOR]

This paper presents a theoretical analysis of a new zigzag C-axis inclined multi-layer ZnO thin-film bulk acoustic wave resonator (FBAR) as a viscosity sensor to monitor the lubrication performance of engine oil and other liquids. Free vibration and forced vibration for the FBAR loaded with liquids are analyzed. Equations necessary to calculate the sensitivity are derived. The numerical analysis shows that as the number of layers increases, the absolute sensitivity increases as well. The influences on the sensitivity of C-axis inclined angle, Q-factor, and thickness are also investigated. The results provide a foundation for further design of multi-layer FBAR viscosity sensors. [ABSTRACT FROM AUTHOR]

Abstract: G-protein coupled receptor (GPCRs) drug discovery is a thriving strategy in the pharmaceutical industry. The standard approach uses living cells to test millions of compounds in a high-throughput format. Typically, changes in the intracellular levels of key elements in the signaling cascade are monitored using fluorescence or luminescence read-out systems, which require external equipment for signal acquisition. In this work, thin-film amorphous silicon photodiodes with an integrated fluorescence filter were developed to capture the intracellular calcium dynamics in response to the activation of the endogenous muscarinic M1 GPCR of HEK 293T cells. Using the new device it was possible to characterize the potency of carbachol (EC50=10.5µM) and pirenzepine (IC50=4.2μM), with the same accuracy as standard microscopy optical systems. The smaller foot-print provided by the detection system makes it an ideal candidate for the future integration in microfluidic devices for drug discovery. [Copyright &y& Elsevier]

This paper introduces an improved method for monitoring and controlling the contact condition of terahertz on-wafer probes to enhance the measurement repeatability as well as probe lifetime. This method enables accurate contact force and contact angle measurements without modification to the standard probe station. Both probe contact force and contact angle are crucial for RF measurement repeatability. Repeatable probe contact force can be achieved by properly monitoring and controlling the strain generated at designated positions on the terahertz probe due to probe deformation induced by contacting the test substrate. Contact angle can be measured by asymmetrical strain on symmetrical positions of the probe when the probe is contacting the test substrate with angular misalignment. In this work a WR-1.5 (500 GHz-750 GHz) probe with integrated strain sensor is developed and tested. Mechanical tests show that the integrated sensors have a contact force resolution of 0.2 mN and a contact angle resolution of 0.05^\circ about the center. RF tests show that repeatable measurements can be achieved with 3 mN contact force after adjusting probe contact angle using the integrated sensors, as compared to a previously reported value of 15 mN. [ABSTRACT FROM AUTHOR]

The polyimide layers are prepared by thermal vacuum coevaporation of the precursors pyromellitic dianhydride (PMDA) and 4,4'- oxydianiline (ODA) and subsequent thermal treatment up to 250 or 300°C. In this paper it is investigated the humidity sensing properties of polyimide layers (with thickness of 50 and 630 nm) by measuring the electrical resistance R [Ω] and the capacitance C [pF] as a function of the relative humidity RH [%]. The layers show very good characteristics as humidity sensors operating at room temperature - the electrical resistance changes by more than 4 decades and the capacitance - by 40% in the range of 20-100% RH. [ABSTRACT FROM AUTHOR]

Thermal co-deposition of Sn and TeO2 in vacuum is used for preparing thin Sn-O-Te films, build-up of an oxide matrix and a finely dispersed phase of Te, Sn and/or SnTe. The method allows further doping with desired elements both in the microcrystallites and at their interfaces with the aim to obtain films with improved gas sensing properties. The as-deposited films are amorphous and show very good characteristics as humidity sensors, operating at room temperature. Upon thermal treatment the structure and composition change and depending on the doping elements and the working temperature the observed nanocrystalline films show sensitivity to some reduction gases (ethanol, etc.). No cross-sensitivity of the crystalline films to water vapor is observed. [ABSTRACT FROM AUTHOR]

Preparation of transparent sol-gel thin film immobilized with bromocresol purple (BCP) pH-sensitive indicator was made via the acid catalyzed sol-gel reaction of tetraethylorthosilicate and the bromocresol purple indicator (BCP). Different surfactants include cationic cetyl trimethyl ammonium bromide (CTAB), anionic sodium dodecyl sulfate (SDS), and nonionic Triton X-100 (TX-100) were used to improve the mesostructure of the host material and to increase its porosity. The color change behavior of the immobilized bromocresol purple indicator affected significantly in presence of SDS comparing with its free counterpart in aqueous solution. In presence of CTAB and Triton-X 100, the immobilized bromocresol purple indicator shows similar behavior as its free counterpart in aqueous solution. The BCP retains its structure during the sol-gel reactions in terms of response to pH. Different parameters including concentration of indicator and surfactant, temperature, number of layers, response time, life time, and the number of measurements were investigated. The pKa values of the different prepared BCP immobilized thin films were determined. The BCP thin film sensor showed stability, repeatability, reproducibility, fast response, and long life time behavior. The polarized light microscopy indicated that the bromocresol purple indicator molecules are distributed uniformly within the host silica network. [ABSTRACT FROM AUTHOR]

A very sensitive thin-film sensor was developed using a meandering coplanar line fabricated from Sr33Ti16O51 film (3 \mu \textm thick), amorphous Co85Nb12Zr3 film ( 1~\mathrm mm \times 2.45 mm, 0.3–2 \mu \textm thick), and Cu/Cr film (2/0.1 \mu \textm ). The deposited SrTiO film enhanced the sensitivity of a magnetic field sensor, a phase change of more than 30°/Oe and a gain of over −40 dB being achieved simultaneously. The maximum phase change (sensitivity) was observed for a CoNbZr film thickness of $\sim 0.5$ –1 \mu \textm . The sensitive bias field and carrier frequency increased as the CoNbZr film thickness increased. The optimum CoNbZr film thickness was realized by the tradeoff between the sensitive bias field and the volume of the CoNbZr film. [ABSTRACT FROM AUTHOR]

How the application of commercial (thin film) flat panel display technology, used in the production of flexible displays and flexible digital X‐ray detectors, can also be applied to reduce the manufacturing cost of wearable biomedical devices, as well as potentially improve their diagnostic functionality, is explored. As a technology platform to evaluate the presented new concept, a prototype photoplethysmograph biosensor using a flexible organic light‐emitting diode display and pin photodiode (thin film) sensor technology for optical heart rate monitoring is developed. [ABSTRACT FROM AUTHOR]

Until recently, our work on superconducting thin film phonon sensors for cryogenic detector applications was limited to silicon substrates only. We have now successfully extended low T/sub c/ (/spl les/100 mK) tungsten sensor technology and sensor fabrication capability to include high purity germanium substrates as well. Here, we describe a technique for fabricating low T/sub c/ superconducting tungsten films on germanium, and we present first results from cryogenic characterization experiments with these films. We also summarize our work on the development of a process to independently etch aluminum and tungsten films deposited on the same germanium substrate. The capability to selectively etch aluminum and tungsten films is critical for the fabrication of our silicon and soon also germanium detectors which utilize overlapping thin films of superconducting tungsten and aluminum for the phonon sensors. Due to the nature of their operation, we refer to these sensors as W/Al Quasiparticle trap assisted-Electrothermal feedback-Transition edge (QET) Sensors. [ABSTRACT FROM PUBLISHER]

During the 1980s a SQUID-based superconducting gradiometer prototype utilizing bulk niobium and wire superconducting components cooled by liquid helium was developed by the US Navy. This sensor was successfully utilized in demonstrations for sea mine countermeasures and for the detection of UneXploded Ordnance (UXO). Advances in this sensor technology are being pursued for longer detection ranges and for more versatile operation. An advanced sensor prototype using all thin film niobium circuits and a new liquid helium cooling concept has been built to provide significant increases in sensitivity. In addition, a high Tc sensor concept using liquid nitrogen refrigeration has been developed to reduce package size and to simplify logistic and support requirements for field operation. This paper will review the current status and plans of this program, specifically describing the recent advances in sensor development and results from the demonstration to detect UXO. [ABSTRACT FROM PUBLISHER]

A thin film of silica aerogel has been spin coated on silicon wafers to investigate its super thermal insulating capability. The temperature of the thin film heaters fabricated on the aerogel coated wafer is measured at different applied powers. Simulations are performed to compare the aerogel coated wafers with the micromachined wafers. Both experimental and simulation results show better heat insulation for aerogel coated wafers as compared with simulated micromachined wafers. The measurement and simulation results of aerogel coated wafers are in good agreement. The aerogel film can replace the air cavity created by conventional micromachining of wafers to save power and chip area in metal oxide gas sensor arrays. [ABSTRACT FROM AUTHOR]

The main aim of this work was the design and development simple fiber optic Fabry-Perot interferometer (FPI) sensor devices for relative humidity (RH) sensing with emphasis on high sensitivity and good stability. The RH fiber FPI sensor is fabricated by coating the end of a cleaved standard multi-mode (MM) fiber with hydrophilic Nafion® sensing film. The Nafion® thin film acts as an active resonance cavity of the low-coherence interferometric sensing structure. The fringe pattern, which is caused by interfering light beam in the Nafion® thin film will shift as the RH changes because the water molecules will swell the Nafion® film and thus change optical pathlength of the sensing structure. The operating principle of a FPI sensor based on the adsorption and desorption of water vapour in the Nafion® and the limitations of this sensor type are discussed in this work. The fiber optic hygrometer was tested in the visible (400–900 nm) region of spectra for measurement of relative humidity (RH) in the range of 5.5–80% at room temperature (RT) in air. The fiber optic humidity sensor has a very short response time (t90 = 5–80 s) and a fast regeneration time (t10 = 5–12 s) as good as commercial sensors. [ABSTRACT FROM AUTHOR]

In this paper, we present the fabrication of an efficient thin film temperature sensor utilizing chemical vapor deposited carbon nanotube (CNT) film as the sensing element on Si substrates, with diamond-like carbon (DLC):Ni as a catalyst in assisting CNT growth. The fabricated sensor showed good electrical response with change in temperature. Relative linear change in resistance of 18.4% for an increase in temperature from 22 °C to 200 °C was achieved. Various characterizing techniques, such as scanning electron microscopy (SEM) and Raman spectroscopy, were used to characterize the films. In an effort to study device performance, van der Pauw and Hall measurements were carried out to study the dependence of resistance on temperature and magnetic fields. Temperature coefficient of resistance of the sensor was calculated as 1.03 × 10−3/°C. All implications arising from the study are presented. The results establish the aptness of the as-grown CNT film to be used as an active sensing material in thin film temperature sensors. [ABSTRACT FROM AUTHOR]

A surface plasmon resonance (SPR) sensor based on exposed‐core microstructured optical fibres (EC‐MOFs) is presented and numerically characterised. The exposed section (analyte channel) of the EC‐MOF is coated with a SPR supporting thin film of gold. The asymmetrically coated fibre can support two separate resonance peaks, with orthogonal polarisations (x‐ and y‐polarised peaks). Although the sensitivity of both the polarised peaks is very similar, the narrower linewidth of the y‐polarised peak provides a much enhanced signal‐to‐noise ratio. The SPR sensing performance for a large refractive index (RI) range from 1.33 to 1.42 is evaluated. The sensor has higher sensitivity for detecting the high analyte RI. The feasibility of using EC‐MOFs to develop a fast‐response, real‐time and distributed SPR sensor is determined. [ABSTRACT FROM AUTHOR]

A multi‐stage thin film transistor (TFT)‐based active pixel sensor (APS), capable of successfully detecting small impulses of charge resulting from incident alpha particle strikes, is presented. Detection of alpha particles is important in the field of neutron detection, where fully integrated thin‐film‐based detectors are an attractive alternative to conventional 3He‐based proportional counters owing to their low‐cost and large‐area scaling capability, combined with the use of readily available materials. A typical TFT process, however, produces only N‐type devices with low electron mobilities – making high‐gain CMOS amplifier designs unfeasible. The disadvantages of using a TFT‐only APS design are mitigated by cascading multiple low‐gain TFT amplifiers, which results in a higher overall pixel gain – subsequently allowing for the successful detection and readout of alpha particle strikes. Presented is a new APS fabricated in an indium gallium zinc oxide TFT process is presented, and successful initial alpha response measurements are reported. [ABSTRACT FROM AUTHOR]

A new method to analyse the contact resistance of a carbon nanotubes (CNTs) humidity sensor is proposed. By analysing the Cole‐Cole plots of the sensor impedance, which was tested by an electrochemical workstation in different RH environments, the contact resistance could be achieved. According to this novel analytical method and the experimental data, the contact resistance of the sensor was about 5 Ω, which was much smaller than the resistance of the sensing film. [ABSTRACT FROM AUTHOR]