1. Thermal stability of ε-Ga2O3 polymorph
- Author
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Roberto Fornari, Claudio Ferrari, Maura Pavesi, Andrea Baraldi, Antonella Parisini, Ildikó Cora, E. Gombia, Detlef Klimm, Francesco Boschi, Matteo Bosi, Béla Pécz, Francesco Mezzadri, and V. Montedoro
- Subjects
010302 applied physics ,Materials science ,Polymers and Plastics ,Annealing (metallurgy) ,Metals and Alloys ,02 engineering and technology ,Crystal structure ,021001 nanoscience & nanotechnology ,Epitaxy ,01 natural sciences ,Endothermic process ,Electronic, Optical and Magnetic Materials ,Crystallography ,Differential scanning calorimetry ,Transmission electron microscopy ,0103 physical sciences ,Ceramics and Composites ,Sapphire ,Thermal stability ,0210 nano-technology - Abstract
The thermal stability of e-Ga 2 O 3 polymorph was studied by complementary methods. Epitaxial films of e-Ga 2 O 3 grown on c-oriented sapphire were annealed at temperatures in the range 700–1000 °C and then investigated by X-ray diffraction (XRD) and Transmission Electron Microscopy (TEM). In addition, Differential Scanning Calorimetry (DSC) up to 1100 °C was carried out on fragments of pure e-Ga 2 O 3 taken from a very thick layer. The results clearly indicate that e-Ga 2 O 3 initiates modifying its crystallographic structure above 650 °C, as demonstrated by a mild endothermic bent of the DSC curves. However, the effective transition to β-phase occurs quite suddenly at 880–920 °C, depending of the DSC heating rate. XRD and TEM results confirm this evidence. TEM investigation in particular shows that after annealing at 1000 °C and rapid cooling the film is completely made of β-Ga 2 O 3 grains, most of them with orientation (310) respect to the sapphire substrate. However, if the cooling rate is substantially reduced, the converted β-Ga 2 O 3 layer assumes the standard orientation (−201) parallel to (00.1) of the Al 2 O 3 substrate. Based on the results of this study we conclude that e-Ga 2 O 3 may conveniently be used for device fabrication, exploiting its higher crystallographic symmetry and better matching to sapphire. However, all fabrication steps must be carried out at temperatures below 700 °C.
- Published
- 2017
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