1. Highly Coupled and Low Frequency Vibrational Energy Harvester Using Lithium Niobate on Silicon
- Author
-
Ausrine Bartasyte, Djaffar Belharet, Merieme Ouhabaz, Samuel Margueron, Ludovic Gauthier-Manuel, Florent Bassignot, Bernard Dulmet, Giacomo Clementi, Miguel Angel Suarez, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and Femto-st, MN2S
- Subjects
[PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics] ,[SPI.OTHER]Engineering Sciences [physics]/Other ,Materials science ,Fabrication ,Physics and Astronomy (miscellaneous) ,Silicon ,[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,Lithium niobate ,chemistry.chemical_element ,02 engineering and technology ,[SPI.MAT] Engineering Sciences [physics]/Materials ,7. Clean energy ,01 natural sciences ,[SPI.MAT]Engineering Sciences [physics]/Materials ,chemistry.chemical_compound ,0103 physical sciences ,Figure of merit ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,ComputingMilieux_MISCELLANEOUS ,Power density ,010302 applied physics ,[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,[SPI.ACOU] Engineering Sciences [physics]/Acoustics [physics.class-ph] ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,[SPI.OTHER] Engineering Sciences [physics]/Other ,business.industry ,021001 nanoscience & nanotechnology ,Piezoelectricity ,chemistry ,Optoelectronics ,0210 nano-technology ,business ,Energy harvesting ,Beam (structure) - Abstract
LiNbO3 has been little studied for the piezoelectric energy harvesting applications. Although it is a cheap piezoelectric material without lead and toxic elements, it beneficiates of technological maturity in single crystal fabrication for optical and acoustic applications. In this Letter, we propose to investigate a (YXlt)/128°/90° LiNbO3 cut as it offers a transverse piezoelectric coupling of k23 = 0.49, which is comparable to that of commonly used PZT ceramics. A flexible beam of 65 mm length and a tip mass made of a LiNbO3 thick film bonded on silicon were studied under 0.1 g sinusoidal acceleration. The beam presented an open-circuit resonance frequency of 105.9 Hz and a displacement up to 1.5 mm. In the frame of a single degree of freedom lumped model with a rectifying bridge, the electromechanical coupling of the device (km2), the figure of merit km2Q, and the normalized average power density were compared to both Pb-based and Pb-free current devices. The generated power density by our device was 965 μW/cm2/g2, which is among the highest reported values compared to both Pb- and Pb-free vibrational harvesting devices.
- Published
- 2021