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One of the main advantages of the hydride vapor phase epitaxy (HVPE) method for crystallizing bulk gallium nitride is the crystallization of GaN with a relatively high growth rate (>100 μm/h). In this paper various growth rates in the c -direction during crystallization of GaN by HVPE on ammonothermally grown GaN crystals are determined and examined. The influence of the highest (380 μm/h) and the lowest (40 μm/h) growth rate on the structural quality and purity of the HVPE-GaN crystals is analyzed. The optimal macroscopically stable growth rate (without cracks and pits) and the way of achieving it are presented and discussed. [ABSTRACT FROM AUTHOR]

The results of the Hydride Vapor Phase Epitaxy (HVPE) on ammonothermal GaN seeds (Am-GaN) with various misorientations: 0.3, 0.5 and 1 degree to the [1 0 −1 0] and [1 1 −2 0] directions are presented. Growth rate and structural quality of the HVPE-GaN layers are analyzed. Morphology of the crystal growing surface at the beginning of the crystallization process (after one and two hours of growth) and at the end of it (after eight hours) is presented as a function of the Am-GaN seed misorientation. Based on these results a rough growth model is proposed and discussed in detail. [ABSTRACT FROM AUTHOR]