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The feasibility of the carrier decay length extraction from scanning photocurrent profiles in ultra-thin silicon nanowire ohmic-contact devices is theoretically studied. Accurate carrier decay length can be extracted with a typical diffraction-limited excitation spot size of 500 nm for silicon nanowires with diameter down to 20 nm.

We present a surface potential based analytical model for double gate tunnel field effect transistor (DGTFET) for the current, terminal charges, and terminal capacitances. The model accounts for the effect of the mobile charge in the channel and captures the device physics in depletion as well as in the strong inversion regime. The narrowing of the tunnel barrier in the presence of mobile charges in the channel is incorporated via modeling of the inverse decay length, which is constant under channel depletion condition and bias dependent under inversion condition. To capture the ambipolar current behavior in the model, tunneling at the drain junction is also included. The proposed model is validated against TCAD simulation data and it shows close match with the simulation data.

In this report, we describe improvement of image resolution in surface plasmon resonance microscopy (SPRM) which suffers from poor quality due to severe surface plasmon (SP) propagation. Our approach takes two-channel momentum sampling by switched light incidence followed by minimum filtering to implement spatially switched SPRM (ssSPRM). The performance evaluated with periodic wires in comparison with conventional SPRM and bright-field microscopy shows that the effect of SP propagation can be circumvented and the effective decay length of SPRM is calculated to increase by only 7% compared to that of bright-field images.

The narrow scrape-off layer power component observed in COMPASS inner wall limiter circular discharges by means of IR thermography is investigated by Langmuir probes embedded in the limiter. The power flux profiles are in good agreement with IR observations and can be described by a double-exponential decay with a short decay length (

Quartz resonators have become a promising tool in bioanalytical sensing during the past decades. They allow for detecting oscillation changes (motional impedance and resonance frequency) arising from changes of the mechanical properties at the sensor interface, or more precisely within the decay length of the acoustic wave (∼250 nm in water).

International audience; This conference report summarizes the contributions to, and discussions at, the 21st Joint EU-US Transport Task Force workshop, held in Leysin, Switzerland, during 5-8 September 2016. The workshop was organized under 8 topics: progress towards full-F kinetic turbulence simulation; high and low Z impurity transport, control and effects on plasma confinement; 3D effects on core and edge transport (including MHD, external fields and stellarators); predictive experimental design; electron heat transport and multi-scale integration; understanding power decay length in the SOL; role of the SOL in the L-H transition; validation of fundamental turbulence properties against turbulence measurements. This report follows the same structure.

A core-shell nanosensor was fabricated by molecular self-assemble and evaporation technique in this paper. The optical property of that was measured based on the detection system of LSPR. The sensitivity of this core-shell nanosensor is 300nm/RIU and the decay length is 26nm based LSPR detection system. The results show that this nansensor can reach high sensitivity and be applied for the small molecule or low concentration detection.

cited By 26; International audience; We perform a theoretical investigation of individual and coupled gold nanorods as plasmonic nanosensors using the finite-difference time-domain method. Key features of single-nanorod sensors are discussed. The sensitivity distribution of an individual nanorod is anisotropic. The characteristic sensitivity decay length of a single-nanorod sensor is comparable to its diameter. Plasmonic sensing abilities are additive, so analyte-detection sensitivity is not affected by substrates or surface treatments; shifts caused by analytes are only determined by their positions relative to the sensor. Coupled nanorods enhance and concentrate plasmonic sensitivities, and the sensitivity within the gap can be over an order of magnitude higher than that at the nanorod cylinder. The sensitivities of coupled nanorods are only higher than those of individual nanorods when the analytes are anchored within the gaps between nanorods. The calculations show that a single biological molecule can be detected by optimizing nanostructure design and surface treatments to anchor analytes locally on high-sensitivity areas of the sensor surface. Our simulation results assist the design and optimization of plasmonic nanosensors, using single or coupled nanorods. © 2011 American Chemical Society.

We have utilized the discrete dipole approximation to study the localized surface plasmon resonance in infinite, periodic two-dimensional arrays of gold nanospheres with the nanospheres arranged according to the {100} face of an fcc crystal. Specifically, we have performed a systematic study of the sensitivity of both the plasmon resonance wavelength shift and extinction properties considering nanosphere diameters ranging from 20 to 100 nm, and for nanosphere gap distances ranging from 0.5 to 6 times the nanosphere diameter. In doing so, we find that the same universal decay length of the plasmon resonance wavelength shift of about 0.2 units of the nanosphere size that was previously found by Jain et al.(1) for nanoparticle dimers is also operant for two-dimensional arrays. However, we also find that the universality of the plasmon ruler is only valid for arrays with nanospheres smaller than a critical nanosphere diameter of about 70 nm, whereas for larger nanosphere diameters, a decrease in the extinctio...

A Bragg waveguide is analyzed from the viewpoint of obtaining slow light. It is shown that, for this system, a complete mathematical analysis of the pulse propagation with allowance for leakage is possible. Calculations are presented that show that, in a TiO2/SiO2-based Bragg waveguide, one can obtain a group index of ∼1000 with a spatial decay length of ∼3 mm for a nanosecond-scale pulse. Distortion of the pulse due to the group index dispersion proves to be acceptable, in this case, for the pulse propagation length of about 3 mm, which corresponds to the fractional pulse delay ∼10. We also analyze the propagation of the light pulse in the Bragg waveguide with a quantum well inside and show possibility of obtaining a group index of ∼10000.

The results of the study of features of the Ge film transition from two- to three-dimensional growth in different SiGe/Si(001) heterostructures with buried stressed layers are presented. It is shown that deposition of a stressed planar SiGe layer results in a significant decrease in the critical thickness of two-dimensional Ge growth. It was detected that the effect of SiGe layers on Ge film growth is very significant not only in the case of growth directly on the strained SiGe layer, but also if this layer is capped by an unstrained Si layer to thicknesses of ∼3.5 nm. It is shown that the model in which the effect of buried strained SiGe layers is taken into account by introducing the phenomenological parameter “decay length of the effective elastic energy” allows description of experimental result data with good accuracy.

Edge effects in a rock mass near a system of periodic mine workings crossed by a crack (fold fault) are considered. The stress state near the mine workings is determined by solving an elastic problem using the piecewise-homogeneous medium model. The original differential problem is reduced to a discrete problem based on the concept of a base scheme. Methods are proposed to solve the discrete problem, and the issue of optimizing the numerical analysis is discussed. The stress distribution around mine workings is analyzed. The stress isolines that represent the boundaries of edge effect zones and indicate their maximum decay length are plotted

Corrosion is typical of the damage that occurs in ageing pressure vessels and pipelines used in industrial processes as a result of reactive products inside or harsh environmental conditions on the outside. Structural integrity of such components needs to be evaluated periodically to establish the continued suitability of the vessels under operating conditions. The present paper develops a method for Level 2 (as categorized by API 579) fitness-for-service (FFS) evaluation of spherical pressure vessels with localized corrosion. The decay lengths for spherical shells subject to different sizes of corroded areas are calculated based on elastic effects in shells so as to identify the reference volume participating in plastic action. Lower bound “remaining strength factors” of spherical pressure vessels containing corrosion damage are formulated by the application of Mura's variational formulation and the m α -multiplier method. Three alternative design recommendations are given. The effectiveness of the proposed methods is evaluated and demonstrated through illustrative examples and comparison with Level 3 inelastic finite element analyses.

AES sputter depth profiles of multilayers with constituents of very different backscattering factors show characteristic distortions in the shape of the intensity–depth profiles. These distortions are quantified by introducing an extension of the local effective backscattering factor concept developed in an earlier paper in the mixing-roughness-information depth (MRI) model for profile quantification. The extension is based on a linear superposition of two newly defined parameters, the effective backscattering factors for each interface that are diminished with distance from the respective interface by another characteristic parameter, the mean effective backscattering decay length. As shown for a Ni/C multilayer structure of six alternating layers of Ni (38 nm) and C (25 nm) on a Si substrate, AES intensity depth profiles calculated with the presented modification of the MRI model, yield an excellent agreement with the measured profile after some adjustment of the initial mean effective backscattering decay lengths and, sometimes, after a slight change of the backscattering factors given by the Ichimura–Shimizu relations. The backscattering effect is studied as a function of the single layer thickness. A critical layer thickness can be determined, below which the backscattering influence becomes negligible for typical AES depth profiling results. Copyright © 2007 John Wiley & Sons, Ltd.

The possible role of growing static order in the dynamical slowing down toward the glass transition has recently attracted considerable attention. On the basis of random first-order transition theory, a new method to measure the static correlation length of amorphous order, called "point-to-set" (PTS) length, has been proposed and used to show that the dynamic length grows much faster than the static length. Here, we study the nature of the PTS length, using a polydisperse hard-disk system, which is a model that is known to exhibit a growing hexatic order upon densification. We show that the PTS correlation length is decoupled from the steeper increase of the correlation length of hexatic order and dynamic heterogeneity, while closely mirroring the decay length of two-body density correlations. Our results thus provide a clear example that other forms of order can play an important role in the slowing down of the dynamics, casting a serious doubt on the order-agnostic nature of the PTS length and its relevance to slow dynamics, provided that a polydisperse hard-disk system is a typical glass former.

In nanoplasmonic sensing, the bulk refractive index sensitivity is often used as a metric for performance evaluation. However, for biosensing applications, which involve molecular binding events, only the refractive index in a confined region close to the metal surface is altered. The correlation between the bulk and the surface sensitivity strongly depends on the nanostructure geometry, especially in strongly coupled systems. In this paper, we thoroughly investigate the surface sensing performance of diffractively coupled plasmonic crystals using the atomic layer deposition of conformal Al2O3 layers with well-defined thickness and refractive index. It is demonstrated that the surface sensing capacity cannot be fully described by the bulk sensitivity. It not only shows opposite dependence on the coupling strength compared to the bulk sensitivity, but also the bulk sensitivity cannot reflect the fact that the surface sensitivity could be different in different thickness ranges on the metal surface. The reason rests on the different decay lengths of the plasmonic crystal arrays with different coupling strengths and can be well explained by the second order surface sensitivity that has recently been proposed. Furthermore, we provide a quantitative method to evaluate the surface sensing performance of specific target analyte. This method is generic and can be applied to other nanoplasmonic systems and a broad range of biomolecules with various sizes. ispartof: ACS Photonics vol:2 issue:3 pages:425-431 status: published

International audience; The present study compares the near-field and far-field sensitivities of localized surface plasmon resonance (LSPR) sensors. To put into evidence the difference between far-field and near-field sensors, optical extinction measurements have been performed on gold nanoparticle gratings coated with dielectric superstrates of varying thicknesses. The potential of LSPR sensors is usually considered to lie in the near-field regime. Therefore, a comparison of the near-field sensitivities for gold nanoparticle gratings and continuous gold films of 50 nm in thickness is provided. The difference in refractive index sensitivities of both sensors is discussed in relation with the decay length of the evanescent near-field. SPRs sensors are usually considered more sensitive than LSPRs in terms of the m factor, refractive index sensitivity. We argue that the m factor sensitivity can only be defined for thick (15--100 nm) superstrates; for thin superstrates (d < 15 nm), the decay length of the evanescent field must be taken into account to properly compare both sensors.

Ultrashallow junctions in semiconductors and multi-quantum wells (MQW) in lasers demand high depth resolution for accurate depth profiling. SIMS has been widely used in depth profiling and the use of ultralow-energy SIMS has demonstrated a narrower surface transient and an improvement in depth resolution. In this work, we use an ATOMIKA 4500 SIMS depth profiler with O 2 + primary ions at an ultralow-energy (Ep) of 250 eV and incidence angles (0) between 0 and 70° without oxygen flooding. A sample with 10 delta layers of Si 0.7 Ge 0.3 nominally grown 11 nm apart is used. We observe that for applications like characterizing ultrashallow junctions, 0 ∼ 0° provides the narrowest surface transient (z tr ) of 0.7 nm, which is marginally better than at 0 ∼ 40° with z tr of 1.0 nm. The depth resolution denoted by the full width at half maximum (FWHM) of the 70 Ge + peaks is comparable for both θ ∼ 0 and 40° at 1.6 and 1.4 nm, respectively. However, in the case of MQW profiling, whereby the quantum wells are normally located deeper, 0 ∼ 40° is preferable. At this angle, the average sputter rate of 47 nm min -1 nA -1 cm -2 is significantly higher, more than double that at 0 ∼ 0° and a better depth resolution with decay length (λ d ) of 0.64 nm compared to 0.92 nm at 0 ∼ 0°. Moreover, the dynamic range possible is also better at 0 ∼ 40°. 0 ∼ 60° is not ideal, even though there is no sign of the onset of roughening. Although the higher sputter rate is an advantage, the depth resolution deteriorates as the profile gets deeper.

An enhanced analytical model is derived to calculate the junction depth and Hg interstitial profile during n-on-p junction formation in vacancy-doped HgCdTe. The enhanced model expands on a simpler model by accounting for the Hg interstitials in the p-type, vacancy-rich region. The model calculates junction depth during both the initial, reaction-limited regime of junction formation and the diffusion-limited regime. It also calculates junction depth under conditions when the abrupt junction approximation of the simpler model fails. The enhanced model can be used to determine the limits of the annealing conditions and times for which the junction depth calculated analytically is valid. The decay length of interstitials into the p-type region estimated analytically places an upper bound on the grid spacing needed to accurately resolve the junction in a numerical simulation.

We consider the effects of a small, intruding object in the bulk of a flat Alexander polymer brush in a melt state. A pointlike object creates a pressure field that has a quadrupolar form at short distances but decays exponentially away from the source. The induced surface deformation also decays exponentially away from the source, and in both cases, the decay length is of the order of the brush thickness. We also discuss the interaction between two immersed objects.

In this letter, we show that the bandwidth of optical band-stop filters made of subwavelength metal structures can be significantly increased by the strong plasmonic near-field coupling through the corners of the periodic metal squares. The effect of small gap coupling on the spectral bandwidth is investigated by varying the gap size between the metal squares. An equivalent transmission line model is used to fit the transmission and reflection spectra of the metal filters. The transmission line model can characterize well the metal structures with the gap size larger than the near-field decay length. However, it fails to model the transmission and reflection spectra when the gap size reaches the decay range of the near-field in the small gaps.

This chapter introduces the basics of plasmon-based refractometric sensing, its application in label-free biomolecular analysis, and discusses differences between propagating plasmons and localized plasmons in terms of refractive index sensitivity, sensing volume and measurement methodology. Based on some recent nanoplasmonic sensing studies, we discuss plasmon–substrate interactions and the possibility to perform long-range nanoplasmonic sensing. We also discuss an experimental comparison between particle-based and thin film plasmonic biosensing, and we describe a method to enhance the sensitivity of nanoplasmonic sensing towards the single molecule limit using enzymatic signal amplification.

The elastic interactions between dislocations in a finite lamellar system of N layers are calculated as a function of the size of the system, surface tension and lamellar elastic constants. For large surface tension the in-plane interactions are repulsive for like dislocations and attractive for opposite ones, decaying exponentially with the decay length proportional to √N. Their strength is inversely proportional to √N. For small surface tension the elastic interactions are attractive at large distances for like dislocations and repulsive for opposite ones. In thin films with small surface tension like dislocations are stabilized at finite separations (~ √N), while in thick films they unbind due to Helfrich forces. The unbinding transition is extremely sensitive to the surface tension and surface bending elastic constant.

19th International Conference on Plasma-Surface Interactions in Controlled Fusion Devices (PSI), Univ Calif, Gen Atom, San Diego, CA, MAY 24-28, 2010; International audience; Massive gas injection was used on Tore Supra to study disruption mitigation. The cooling time between the injection and the thermal quench drops to 2 ms for larger gas flow rates (similar to 5e24 atoms/s) limiting the radiated energy to similar to 10% of the plasma thermal energy content. A significant reduction of the heat load on the limiter is nevertheless observed in the mitigated cases. The broadening factor of the power decay length in the scrape-off layer during the thermal quench estimated around 10 (+/-5) does not change significantly between mitigated and unmitigated. Reached densities with He injections are sufficient to suppress primary runaway electrons (dominant on Tore Supra) but still far too low to avoid avalanche process (dominant in ITER). The extension of the current quench time, which is observed in mitigated disruptions (typically by 50%), could be an attractive feature to reduce the requirements on the density. (C) 2011 Elsevier B.V. All rights reserved.

The refractive index sensitivity of localized surface plasmon resonance sensors can be improved by placing the plasmonic metal particles on pillars instead of on a planar substrate. In this paper, a simple and versatile colloidal lithography method for the fabrication of plasmonic Au islands on top of polymer nanopillars is described. The pillar height is controlled by varying the thickness of the initial polymer film. An increased pillar height results in a blue shift of the absorption spectrum of the Au islands. This is explained by a decreased effective refractive index around the islands. For pillars higher than approximately 40nm no further blue shift is observed, in agreement with the decay length of the electromagnetic field around the islands. Pillar-supported Au islands were also fabricated on a flexible foil, demonstrating the potential of the method described here for the fabrication of flexible plasmonic substrates. Benefits and limitations of the method and of using polymers as the pillar material are discussed. © 2011 IOP Publishing Ltd.

Computed disjoining pressure isotherms are compared with experimentally measured isotherms obtained using ellipsometry. A detailed charge regulation model for amphoteric surfaces has been used to describe the glass-brine interface. The results of this model together with an electrochemical description of the mercury-brine interface have been used to numerically compute disjoining pressure isotherms for aqueous films between glass and mercury. These isotherms allow us to predict the stability of aqueous films in various systems of interest. A comparison between measured and computed disjoining pressure isotherms indicates a good agreement when a decay length of 35 A is chosen for the hydration forces. The effects of brine pH, electrolyte concentration, and the potential on the mercury surface on the disjoining pressure isotherms and on the stability of thin aqueous films are discussed.

Using the Greens function method for nonequilibrium processes, we study the potential oscillations near a barrier in both coherent- and incoherent-transport regimes. In the fully coherent regime the local electrochemical potential oscillates near the barrier, due to interference of the incident and reflected waves. The inclusion of phase-breaking scattering leads to suppression of these oscillations as a result of increasing contribution from the incoherent processes. As one goes away from the barrier, the amplitude of oscillations is found to decay with a decay length equal to the phase-scattering length. © 1992 The American Physical Society.

Today the magnetic properties of multilayers and nanostructures including a metal or an insulator as a nonmagnetic spacer layer are rather well understood. But they are much more controversial for semiconductor spacers. For instance, for Co/Si multilayers short period coupling oscillations are predicted by ab initio computations but have yet to be observed. Here we show in Co/Si multilayers prepared at low temperature (90 K) strong saturation field oscillations that are consistent with the predicted coupling oscillations. However, the decay length of the oscillations is much longer than the expected one and cannot be explained within the framework of available theories.

The generation of surface plasmon polaritons (SPP's) at isolated nanoholes in 100 nm thick Au films is studied using near-field scanning optical microscopy (NSOM). Finite-difference time-domain calculations, some explicitly including a model of the NSOM tip, are used to interpret the results. We find the holes act as point-like sources of SPP's and demonstrate that interference between SPP's and a directly transmitted wave allows for determination of the wavelength, phase, and decay length of the SPP. The near-field intensity patterns can be manipulated by varying the angle and polarization of the incident beam., 12 pages, 3 figures

By structuring the surface of a metal with an array of holes, photonics researchers show that it is possible to tightly confine terahertz surface waves, reducing their decay length into air by two orders of magnitude. The results could lead to new approaches to waveguiding.

We have observed ballistic electron transport beyond 100 microm in the 2D electron system of an ultra-high mobility GaAs(AlGa)As heterostructure employing a magnetic electron focusing technique through wide point contacts. The amplitude of the characteristic magneto-oscillations is found to depend exponentially on electron propagation distance with a decay length λ a = 15 microm. λ a differs by about a factor of 2 from the mobility mean free path of 28 microm. This may indicate the determination of a different angular average of scattering events in focusing experiments as compared to standard mobility measurements.

We appreciate the detailed response from Professor Horgan, discussing our letter to the editor concerned with end effects when mechanical testing soft tissues (Anssari-Benam et al., 2012a), and providing further insightful analysis. The concepts of end effects and characteristic decay length have indeed been well established for a long time in the context of solid mechanics, with substantial contributions from Professor Horgan, towards establishing theoretical and analytical criteria for their characterisation, as referenced in our previous publication (Anssari-Benam et al., 2012b; from Horgan (1972), Choi and Horgan (1977).

We report on the investigation of spin-wave propagation in a micro-structured Co2Mn0.6Fe0.4Si (CMFS) Heusler waveguide. The reduced magnetic losses of this compound compared to the commonly used Ni81Fe19 allow for the observation of spin-wave propagation over distances as high as 75 μm via Brillouin light scattering (BLS) microscopy. In the linear regime, a maximum decay length of 16.7 μm of the spin-wave amplitude was found. The coherence length of the observed spin-wave modes was estimated to be at least 16 μm via phase-resolved BLS techniques.

Localization of bending waves is observed on a steel plate decorated with Lucite blocks. A significant experimental feature of the localized modes is an exponential decay of the mode intensity from their peaked centers, with a decay length that increases as (f 0 -f 1 ) -1 when the mode frequency f approaches a quasi mobility edge f 0 . Our experimental results, together with finite-element calculations, support the mechanism of strong bending wave scattering by the Lucite block resonances as the source of the localization phenomenon

The results of the study of the effect of strained SiGe layers on the critical thickness of two-dimensional growth of Ge layer in different SiGe/Si(001) structures are presented. A significant influence of buried strained SiGe layer on the growth of Ge has been found out, which remains considerable even for SiGe layers capped by unstrained Si layer of thickness up to 3.5 nm. The experimental results are well described by the proposed model, where obtained features are explained by means of introducing a phenomenological parameter called “effective decay length” of the strain energy accumulated in the structure.

The subject of this review is the secondary ion mass spectrometry (SIMS) analysis of ultrathin or delta layers of impurity in a semiconductor matrix and their use in establishing the limitations of SIMS depth profiling, exploring the fundamental processes occurring during analysis, and enhancing the quantification of SIMS data. Methods for extracting accurate information for the grower (concerning the material) and the analyst (concerning the SIMS instrument) are described. It is demonstrated that sets of SIMS profiles obtained over a range of analytical conditions are desirable if accurate information is required. In this context, the observation of dopant interaction occurring in codoped samples during SIMS analysis is reported for the first time. It is shown that quite large discrepancies exist between different measurements of decay length and associated parameters for the same impurity/matrix combination. These need to be explained before attempting to relate delta profile shape to primary ion beam i...

Hydration forces between two hydrophilic surfaces are generated by the overlap between the two polarization layers which are formed near each of them. The differential equation that describes the polarizatin field as well as the corresponding boundary conditions are derived on the basis of electrostatics. Expressions for the decay length and for the magnitude of the force have been derived and compared with experiment.

Buttiker's analysis of the Larmor clock is extended to the local situation in which a uniform transverse magnetic field is confined to an arbitrary part of a barrier. The resulting local characteristic electron-barrier interaction times for transmission and reflection are complex quantities whose real and imaginary parts are measurable, at least in principle. Analytic expressions for the local interaction times of a rectangular barrier are derived and their properties investigated. The effects of a multiple image potential are examined numerically. Quite apart from the question of local interaction times, it is shown that in the tunnelling regime the transverse magnetic field produces significant precession only when it extends to within a decay length κ−1 of either edge of a rectangular barrier.

The lateral energy distribution and the lateral decay length of the shear horizontal wave (SH wave) at 5.6 MHz are investigated experimentally by using a waveguide for the SH wave made by evaporating a conductive Al film onto a PZT ceramic plate polarized parallel to its surface. Experimental results are well explained by a simplified theory along the same line as Tiersten's. The propagation loss of the guided SH wave is 0.18 dB/µsec. Moreover it is shown that the Bleustein-Gulyaev wave which corresponds to the zeroth-order SH wave in the case of an infinitely thick plate can be guided by a conductive film. A circular waveguide of diameter 40 mm prepared on a PZT disk of thickness 0.25 mm, polarized radially and parallel to the surface, has a delay time 53 µsec and an insertion loss 39.7 dB.

We calculate the response of an ice crystal to a spatially varying applied electric field. The dielectric polarization of the ice is not assumed to be proportional to the local macroscopic electric field. Instead, we formulate an expression for the free-energy density of an ice crystal with non-uniform polarization and derive the functional forms of the electric and polarization fields which minimize the free energy of the whole system. In general, the two fields have different spatial variation. Their behaviour is governed by two characteristic lengths: the Debye length and a polarization decay length, determined, respectively, by the concentration of ions and Bjerrum defects in bulk ice. The model is a generalized Poisson–Boltzmann theory which includes the effects of the microscopic structure of the medium in a description of electrostatic screening of external charges.

We show for the first time that the reoxidation step after the gate patterning strongly affects the transistor short channel behavior. This particular oxidation induces a laterally non-uniform channel profile. From the comparison of simulation and experimental transistor data an effective interstitial decay length L i is extracted, determining the extent of local OED effects. We find L i =1.4µm for dry oxidation at 900°C.

Initiated by the demand for improved depth resolution, we have carried out a series of depth profiling experiments at various angles of incidence between s = 0° and s = 85°, while maintaining a high primary beam energy, namely 12 keV. In order to reduce the experimental difficulties involved with high angles of incidence, we took advantage of our “mini-chip” sample preparation technique and our “checkerboard” data evaluation technique [1].