1. Investigation and Optimization of Pirani Vacuum Gauges With Monocrystal Silicon Heaters and Heat Sinks
- Author
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Le-Min Zhang, Binbin Jiao, Chen Dapeng, Yun Shichang, and Yanmei Kong
- Subjects
Wheatstone bridge ,Materials science ,Silicon ,business.industry ,Mechanical Engineering ,010401 analytical chemistry ,Electrical engineering ,chemistry.chemical_element ,02 engineering and technology ,Heat sink ,021001 nanoscience & nanotechnology ,01 natural sciences ,0104 chemical sciences ,law.invention ,Pirani gauge ,chemistry ,law ,Torr ,Eutectic bonding ,Electrical and Electronic Engineering ,Resistor ,Composite material ,0210 nano-technology ,business ,Temperature coefficient - Abstract
This paper presents micro-Pirani vacuum gauges using low-resistivity monocrystal silicon for the heaters and the heat sinks. We designed a new Pirani gauge with an embedded Wheatstone bridge made by thick-silicon resistors that allows an improvement in resolution and sensitivity. With the optimized Wheatstone bridge structure, the temperature coefficient of the gauges pressure measure decreases from 2.5%/°C to 0.74%/°C, and the resolution was optimized from 0.071 to 0.008 Torr at 1 Torr. In addition, the gauges were packaged into non-hermetic cavities by wafer-level AlGe eutectic bonding to undergo the wafer-dicing process, with sensitivity improved from 1.65 to 17.1 V/Torr at 1 Torr.
- Published
- 2017