1. AlO-CuO composite charge-trapping nonvolatile memory.
- Author
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Liu, Jinqiu, Xu, Bo, Xia, Yidong, Yin, Jiang, Liu, Zhiguo, and Lu, Jianxin
- Subjects
NONVOLATILE memory ,COMPUTER storage devices ,CHARGE carriers ,ATOMIC layer deposition ,PHOTOELECTRON spectroscopy - Abstract
In this work, we have fabricated and thoroughly characterized dielectric-stacked memory devices with AlO-CuO composites as the charge trapping layer which are prepared by using atomic layer deposition and RF-magnetron sputtering techniques. The devices exhibit a large memory window of 13.27 V and a density of the trapped charges of 9.37 × 10 cm at a working voltage of ±11 V. The microstructural observations by using high resolution transmission electron microscopy and the analysis on X-ray photoelectron spectroscopy indicate that the strong charge-trapping ability of AlO-CuO composite should be ascribed to the occurrence of Cu, resulted by the inter-diffusion at the interface of CuO/AlO. Such an interesting composite layer has very attractive application in nonvolatile memory. [ABSTRACT FROM AUTHOR]
- Published
- 2017
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