1. Effect of magnetron sputtering parameters on adhesion properties of tungsten-rhenium thin film thermocouples
- Author
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Qiuyue Yu, Zhe Du, Peng Shi, Zhongkai Zhang, Zhuangde Jiang, Wei Ren, and Bian Tian
- Subjects
010302 applied physics ,Materials science ,Process Chemistry and Technology ,chemistry.chemical_element ,02 engineering and technology ,Substrate (electronics) ,Adhesion ,Rhenium ,Tungsten ,Sputter deposition ,021001 nanoscience & nanotechnology ,01 natural sciences ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,chemistry ,Sputtering ,Torr ,0103 physical sciences ,Materials Chemistry ,Ceramics and Composites ,Thin film ,Composite material ,0210 nano-technology - Abstract
Tungsten-Rhenium (W-Re) thin films were grown on alumina ceramic substrate using the magnetron sputtering technique. The feasibility and reliability of the tungsten-rhenium thin film thermocouples application are largely dependent on the adhesion properties between the W-Re film and substrate. In order to get the good adhesion, we researched the effect of magnetron sputtering parameters on adhesion properties of tungsten-rhenium thin film thermocouples. With the help of three factors and three levels orthogonal table, nine orthogonal experiments were designed to study the influences of argon flow rate, sputtering power and vacuum degree on the performance of adhesion. The result showed that the effect of vacuum degree on adhesion properties was the largest, then come sputtering power, while the effect of the argon flow rate was the least and the optimal parameters combination was: argon flow rate 30 Sccm, sputtering power 400 W and vacuum degree 0.7 × 10−6 Torr.
- Published
- 2018