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The novel use of SiCN underneath TEOS oxide as a bonding surface in the wafer bonding of Backside-illuminated (BSI) sensor is proposed and the mechanism of void control by SiCN is clarified. In general, high-temperature processing results in generating voids between the wafer interfaces after bonding due to the release of high-pressure H 2 O contained in TEOS. In the proposed mechanism, the SiCN exposed to high-temperature H 2 O is oxidized thereby preventing the emission of high-pressure H 2 O gas. This paper analyzes the role of SiCN in this mechanism.

A clear yield point was not seen in the tensile strength of the aluminum sintering body. As for the molding pressure, 170MPa was the upper limit value. Hardness, the radial crushing strength increased, but the oil content. As for the sintering temperature, 545°C were the upper limit values. Hardness, the radial crushing strength increased, but the oil content increased to 545°C, too. The friction examination of molding pressure 170MPa showed limit PV value 6.46MPa.m/s. The friction examination of sintering temperature 545°C showed aspect pressure 17MPa. The life examination maintained friction temperature to approximately 40°C until 30hours.

Machine designers are sometimes confronted with high contact pressure conditions which generate plastic deformation. However there is no clear design method for such severe condition. We investigate the contact condition in the high contact pressure by using a ball-on-glass disc type test. According to the test results, the following conclusions were obtained. 1) The ratio of calculating contact pressure and the hardness in consideration of working hardness, the number of the ratio is settled about 0.4 for any loading condition. 2) In the condition of high contact pressure generating plastic deformation, the contact pressure converges with constant value according to the work hardening behavior of material.

The purpose of this study is to investigate the effect on oil film thickness and traction coefficient by the sudden change of loaded torque on traction drives. The experimental measurements of oil film thickness and traction force were performed using the optical interferometic observation method. And the comparison of experimental results with calculations of the two dimensional non-steady thermal elastohy-drodynamic lubrication (TEHL) was performed. We obtained that oil film thickness and traction coefficient decrease though the rotating speed of roller and disc increase, and our discussion lead that the reason of the decrease is the effect of the increase of oil film temperature by shear. The consideration of frictional heating improved the accuracy of calculations about oil film thickness and traction coefficient.

In cross head type marine diesel engines, cylinder oil is supplied at regular intervals and constant quantity from oil-feed holes to lubricate the running surface of piston rings and cylinder liner. Accordingly it is important to determine position of oil-feed holes, timing of oil-feed, running surface profile of piston rings and cylinder liner and so on to make cylinder oil spread wider and form thicker oil film. In this study, the authors examined how the factors influence the extension of cylinder oil using the tester which simulated cross head type marine diesel engines for the purpose of utilizing small quantities of cylinder oil effectively. We found that wave-cut surface of cylinder liner has better spreadability of cylinder oil than honed surface and wave-cut surface with oil grooves has the effect of circumferential spreadability especially.

In the case of large-size marine diesel engines, it is advantageous to measure lubricating condition between piston rings and cylinder liner to prevent scuffing and abnormal wear. The authors have developed the oil film condition monitoring system using electro-conductivity sensor on cylinder liner running surface. This sensor could recognize the condition of oil film formation easily. It was found that when the sensors were attached in 10% stroke area from top dead center, where the lubricating condition is severe, the difference of lubricating condition could be evaluated well. The lubricating condition between piston rings and cylinder liner was strongly influenced by the change of running surface roughness, bot by the change of oil feed ratio in the range of 0.8∼1.5g/PS·hr.

外ケーブル方式を用いたプレキャストセグメントPC桁は, 軸方向筋が連続配筋されていないため, 継目部に局部変形が集中し, 一体構造桁とは異なる挙動を示す. 本研究では, 外ケーブル方式プレキャストセグメントPC桁の局部変形の影響を実験的に明らかにするとともに, 継目部の局部変形を考慮した解析手法を提案し, 実験結果と比較検討を行った. その結果, 本解析手法を用いることで曲げ性状を終局に至るまで精度良く評価できることが明らかになった. また, 数値解析によりスパン/有効高さ比, デビエータ間隔, 載荷形式, セグメント長, コンクリート強度の各種要因を考慮した終局曲げ耐力の算定式を提案した.

This paper describes and discuss the results of an experimental study on the bond characteristics of fiber reinforced plastics in concrete and the transfer length for pretensioned type prestressed concrete structures.The experimental results are then used to derive a simple relationship by using a family of curves with varying coefficient of friction μ, and poisson ratio ν against transfer length of FRP rods.

One of the most challenging issues in the metal hard mask (MHM) process is controlling the residual stress in TiN mask. This becomes more important as the feature sizes of trenches and vias continue to shrink and the low k-value dielectrics are introduced to Cu interconnect. It is found that the deformation of trenches due to the residual stress in TiN results in Cu voids forming. To overcome this problem, the correlation between the residual stress and the film property of TiN has been investigated. The residual stress in TiN is found to strongly correlate with both the grain size and the crystal structure of TiN, and low residual stress in TiN is accomplished by suppressing the grain growth of TiN. By applying TiN that has a quite fine needle-like structure, the trench deformation can be suppressed and thus the gap filling is perfectly achieved. The MHM process using TiN film that has a needle-like structure is a promising technology for 32-nm node Cu interconnect and beyond.

In order to reduce the effective dielectric constant (keff) for the 32 nm technology node and beyond, Direct-CMP of a porous low-k film without a protective cap layer is required. However, the degradation of breakdown electric field (Ebd) has been one of critical issues. This study clarified that the Ebd degradation was caused by the pit defects on the surface of porous low-k film during Direct-CMP. In order to suppress the pit defects, we evaluated dependency of micro-pores density of CMP pads. As a result, we demonstrated that CMP pads with low-density micro-pores drastically reduced them and improved the Ebd degradation. In this paper, the mechanism for their reduction is also discussed.

We have studied electromigration (EM) and stress-induced voiding (SV) behaviors based on our 90 nm-node Cu/low-k interconnect processes, and demonstrated successful improvement of the interconnect reliability. In EM study wide bimodal failure distribution was found only in the particular EM test structure. We identified that it caused by the lack of wettability between Cu and the barrier metal in the vias, and demonstrated that the optimization of the barrier metal thickness could suppress it. In SV behavior, we revealed a mechanism of the voiding under the vias that was due to the initial existence of the nuclei of the void before high temperature storage test. The failure mode was suppressed by optimizing preheat temperature of M2 barrier metal deposition.

The JT-60U (JAERI Tokamak-60 upgrade) vacuum vessel is supported at the midplane of the outboard and inboard of the torus by 18 rod supports each. The electromagnetic forces in plasma disruptions cause very severe slide conditions for the support structures, which far exceed the previously experienced endurance limit. In order to overcome this problem, sliding tests of various candidates were conducted, and it was shown that the bronze-base solid lubricant with a composite layer for PTFE-Pb and bronze was applicable. The solid lubricant was imbedded in the bearing base metal to form contact surfaces facing the Inconel 625 support rod. >

各種FRPロッドのクリープ, 疲労破壊等の時間依存的な破壊特性を定量的に解明し, その特性の評価手法を提案することを目的として, FRPロッドの構成材料である繊維単体のクリープ及び疲労試験を実施し, それらの特性を実験的に評価すると共に破壊確率理論に基づき定量的に把握することを試みた. さらに, 繊維や樹脂の特性及びFRPロッド内部の応力状態を考慮した破壊シミュレーションモデルを構築し, これまでに報告されている実験データと比較しその妥当性を検討した. その結果, 本モデルにより各種FRPロッドの時間依存特性の定量的な評価が可能であることを確認した.