1. Dependence of the V/III Ratio on Indium Incorporation in InGaN Films Grown by Metalorganic Vapour Phase Epitaxy
- Author
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Takashi Hanada, Yuantao Zhang, Takeshi Kimura, V. Suresh Kumar, Ryuji Katayama, S. Y. Ji, Jung Hun Choi, Kanako Shojiki, and Takashi Matsuoka
- Subjects
Photoluminescence ,Materials science ,Biomedical Engineering ,Analytical chemistry ,chemistry.chemical_element ,Bioengineering ,02 engineering and technology ,General Chemistry ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Epitaxy ,Reciprocal lattice ,Wavelength ,chemistry ,Surface roughness ,Sapphire ,General Materials Science ,Metalorganic vapour phase epitaxy ,0210 nano-technology ,Indium - Abstract
InGaN epitaxial layers were grown on c-plane sapphire substrates using the metalorganic vapour phase epitaxy (MOVPE) system at 760 °C. By varying the total flow rate of group-III sources (TMI+TEG) with a fixed molar ratio of group-III sources [TMI/(TMI+TEG)], the influence of V/III ratio were investigated from 4500 to 20000. The grown N-polar InGaN layers were investigated by atomic force microscopy and it is found that the surface roughness decreases with increasing the V/III ratios. High resolution X-ray diffraction analyses show that the phase separation decreases with increasing the V/III ratios. Photoluminescence measurements reveal that the peak position of the band-edge emission shifted toward the shorter wavelength with increasing the V/III ratios. Reciprocal space mapping (RSM) analyses were carried out on InGaN films. At low V/III ratio, the phase separation can be detected in InGaN films.
- Published
- 2020
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