1. Single- and multilayer graphene wires as alternative interconnects.
- Author
-
Politou, Maria, Asselberghs, Inge, Soree, Bart, Lee, Chang Seung, Sayan, Safak, Lin, Dennis, Pashaei, Parham, Huyghebaert, Cedric, Raghavan, Praveen, Radu, Iuliana, Tokei, Zsolt, De Gendt, Stefan, and Heyns, Marc
- Subjects
- *
GRAPHENE , *INTEGRATED circuit interconnections , *COPPER wire , *CONTACT resistance (Materials science) , *CHARGE carrier mean free path - Abstract
In this work, we evaluate the material properties of graphene and assess the potential application of graphene to replace copper wires in Back-End-Of-Line (BEOL) interconnects. Based on circuit and system-level simulations, high restrictions are imposed to graphene with respect to contact resistance and mean free path. Experimentally we evaluate single and multi-layer graphene wires and we measure carrier mean free paths (MFPs) above ~ 110 nm. However, contact engineering will be the key issue for integration of graphene as interconnect. [ABSTRACT FROM AUTHOR]
- Published
- 2016
- Full Text
- View/download PDF