1. Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition.
- Author
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Popovici, Mihaela, Van Elshocht, Sven, Menou, Nicolas, Favia, Paola, Bender, Hugo, Rosseel, Erik, Swerts, Johan, Adelmann, Christoph, Vrancken, Christa, Moussa, Alain, Tielens, Hilde, Tomida, Kazuyuki, Pawlak, Malgorzata, Kaczer, Ben, Schoofs, Geert, Vandervorst, Wilfried, Wouters, Dirk J., and Kittl, Jorge A.
- Subjects
THIN films ,STRONTIUM ,TITANATES ,HEAT treatment ,DIELECTRICS ,PEROVSKITE ,CAPACITORS ,CRYSTALS - Abstract
Strontium titanate (STO) is a dielectric with a cubic perovskite type structure and of increasing interest for microelectronics, especially in the metal-insulator-metal (MIM) capacitors due to its high dielectric constant. The dielectric constant of the STO films and consequently the performance of the MIM capacitors appear to be strongly influenced by the process conditions. In this work the authors report on the influence of various thermal treatments upon the crystallinity and morphology of strontium titanate crystals. The influence of spike, laser, or rapid thermal anneals on the morphology with respect to grain size and topography of the crystalline stoichiometric STO films is studied. Also, the use of a stack containing a Sr-rich STO (62% Sr) bottom seed layer and a stoichiometric STO top layer in combination with a thermal treatment was found to affect the microstructure of the STO film. A comparison of the electrical properties for various thermal treatments has been made. [ABSTRACT FROM AUTHOR]
- Published
- 2011
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