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Abstract: Polychromatic microdiffraction uses small X-ray beams to characterize the local crystallographic structure of materials. When combined with a depth resolving technique called differential aperture microscopy, the phase and local orientation of femto-liter volumes (0.5×0.5×0.7μm3) can be resolved beneath the surface of a sample. In addition, the local elastic strain and dislocation tensors can also be determined and the local dislocation type can be modeled. Here we present recent technical developments, including example applications and emerging research directions. [Copyright &y& Elsevier]

Abstract: X-ray microdiffraction is a non-destructive technique that allows for depth-resolved, strain measurements with submicron spatial resolution. These capabilities make this technique promising for understanding the mechanical properties of MicroElectroMechancial Systems (MEMS). This investigation examined the local strain induced by irradiating a polycrystalline diamond thin film with a dose of 2×1017 H+/cm2 protons. Preliminary results indicate that a measurable strain, on the order of 10−3, was introduced into the film near the End of Range (EOR) region of the protons. [Copyright &y& Elsevier]