1. Physical Modeling of Monolithic Self-Rolled-Up Microtube Interdigital Capacitors
- Author
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Zhendong Yang, Mark D. Kraman, Xiuling Li, Luo Xiang, Wen Huang, Yong Zhang, and Lei Sang
- Subjects
Materials science ,business.industry ,Edge (geometry) ,Industrial and Manufacturing Engineering ,Electronic, Optical and Magnetic Materials ,law.invention ,Capacitor ,Planar ,Hardware_GENERAL ,law ,Electrode ,Hardware_INTEGRATEDCIRCUITS ,Optoelectronics ,Electrical performance ,Inner diameter ,Skin effect ,Electrical and Electronic Engineering ,business - Abstract
This paper presents a physical model for monolithic self-rolled-up microtube interdigital capacitors and elaborates their working mechanisms in comparison to on-chip planar interdigital capacitors. Besides the high-frequency phenomena such as the skin effect in thin, wide metal films, the model accounts for the complexities resulting from all possible 3D electrode configurations, such as the inner diameter dependent overlapping capacitances and edge capacitances between electrodes, as well as parasitic inductances within the rolled-up structure between the fingers, for integer and non-integer number of turns. The model is validated by the measured results of fabricated self-rolled-up membrane (S-RuM) interdigital capacitors over a wide range of layout and process parameters. This fully enables the structural design optimization for electrical performance of this 3D device architecture.
- Published
- 2022
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