1. 19.5 μW ultra‐low‐power 13.56 MHz RFID tag based on transparent zinc‐oxide thin‐film transistors
- Author
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Ye Zhi, Leixiao Han, Han Yan, and Ma Xiaoyu
- Subjects
010302 applied physics ,Materials science ,Fabrication ,business.industry ,020208 electrical & electronic engineering ,Transistor ,Wide-bandgap semiconductor ,02 engineering and technology ,Chip ,01 natural sciences ,law.invention ,Threshold voltage ,Noise margin ,Control and Systems Engineering ,Thin-film transistor ,law ,Low-power electronics ,0103 physical sciences ,0202 electrical engineering, electronic engineering, information engineering ,Optoelectronics ,Electrical and Electronic Engineering ,business - Abstract
A novel systematic technological process for ZnO-thin-film transistors (TFTs) fabrication was developed which turned out to achieve near-zero threshold voltage devices with good performance and stability. A deuterium implantation method was realised as well to fabricate depletion n-type ZnO TFTs. The inverters based on enhancement/depletion ZnO TFTs reached nearly full swing (0.01-5 V at 5 V VDD) and pretty large noise margin (VNML = 1.01 and VNMH = 3.61 V). Moreover, a transparent radio-frequency identification (RFID) tag chip based on ZnO TFTs was developed. This tag with an anti-collision algorithm for ISO-14443 type-A was first realised under 5 μm ZnO-TFT technology. The proposed RFID tag exhibits ultra-low-power dissipation of
- Published
- 2020