1. Mapping the Spatial Dependence of Charge-Collection Efficiency in Semiconductor Devices Using Pulsed-Laser Testing.
- Author
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Hales, Joel M., Khachatrian, Ani, Buchner, Stephen, Ildefonso, Adrian, Monahan, Daniele M., Lalumondiere, Stephen D., and Mcmorrow, Dale
- Subjects
- *
PULSED lasers , *LINEAR energy transfer , *HEAVY ions , *SEMICONDUCTOR devices - Abstract
By scanning the charge-deposition profile produced by a pulsed laser throughout a device, the spatially dependent charge-collection efficiency (CCE) can be determined. This is demonstrated by extracting the depth-dependent CCE in two photodiodes. The resulting collection efficiency curves are found to be consistent with their device structures and the expected charge-collection mechanisms. By applying the efficiency curves to the charge-deposition curves for both heavy ions and pulsed X-rays, the calculated collected charge values show very good agreement with experimental results. This suggests that the profiles extracted using the laser can help predict charge-collection data from other excitation sources and could improve modeling efforts by determining sensitive volumes. [ABSTRACT FROM AUTHOR]
- Published
- 2021
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