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This study implements a highly uniform 3D vertically stack resistive random‐access memory (VRRAM) with a four‐layer contact hole structure. The fabrication process of a four‐layer VRRAM is demonstrated, and its physical and electrical properties are thoroughly examined. X‐ray photoelectron spectroscopy and transmission electron microscopy are employed to analyze the chemical distribution and physical structure of the VRRAM device. Multilevel capability, reliable endurance (>104 cycles), and retention (104 s) are successfully obtained. Synaptic memory plasticity, such as spike time‐dependent plasticity, spike rate‐dependent plasticity, excitatory post‐synaptic current, paired‐pulse facilitation, and long‐term potentiation and depression is presented. Finally, the vector‐matrix multiplication (VMM) operation is conducted on a 4 × 12 VRRAM array, according to the low resistance state ratio. It is ascertained that the accuracy drop, which can occur due to VMM error, can be limited to a decrease of less than 0.44% point. Utilizing the high‐density, multilevel, and biological characteristics of VRRAM, it is possible to implement high‐performance neuromorphic systems that require densely integrated synaptic devices. [ABSTRACT FROM AUTHOR]

HfO2-based ferroelectric tunnel junctions (FTJs) are promising nonvolatile memory types for neural network applications because of their speed, low power, and excellent complementary metal-oxide semiconductor compatibility. Specifically, HfAlOx (HAO) has led to extensive research efforts owing to its outstanding ferroelectric performance. This is a result of the fact that the atomic radius of Al is smaller than that of Hf. In this study, we investigate the metal–ferroelectric–semiconductor device with an Al doping concentration of 2% that was annealed at 900 °C. A high-remnant polarization (Pr) value of 39.85 µC/cm2 and endurance were achieved by using the polarization switching positive-up-negative-down measurement method at this annealing condition. Our device shows long-term potentiation and depression properties, including high linearity and multiple conductance states for neuromorphic applications. Moreover, paired-pulse facilitation was implemented to mimic human synaptic functions. The construction of 16 states comprising four bits was achieved by employing reservoir computing with the FTJ device functioning as a physical reservoir. Finally, the results obtained from the experiment show promising outcomes for the ferroelectric memory characteristics and synaptic properties of the manufactured HAO device. [ABSTRACT FROM AUTHOR]

Since HfOx‐based ferroelectric tunnel junctions (FTJs) are attractive compared to perovskite‐based FTJs and other emerging memory devices, they are being actively studied recently. They have advantages such as a simple metal–insulator–metal structure, complementary metal oxide semiconductor (CMOS) compatibility, non‐destructive operation, and low power consumption. Moreover, doped HfOx‐based FTJs are in the spotlight in terms of neuromorphic engineering as a way of advancing from the von Neumann structure. In particular, Al dopant is effective for inducing ferroelectric properties due to its smaller radius than that of Hf. The optimal concentration of Al varies depending on the device materials and the annealing conditions during deposition. Therefore, in‐depth research is required for neuromorphic applications. Herein, the properties of FTJ devices according to Al doping concentrations are analyzed. Subsequently, using the device with the highest remanent polarization, neuromorphic applications are implemented, including spike‐timing‐dependent plasticity (STDP), paired‐pulse facilitation (PPF), long‐term potentiation, and depression. The characteristics in different frequency regions are also studied to satisfy the demand for fast switching. Finally, the FTJ device is used as a physical reservoir in reservoir computing for efficient processing of time‐dependent inputs. [ABSTRACT FROM AUTHOR]