1. Combustion synthesis of nontoxic water-induced InYO thin film and application in thin film transistor
- Author
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Zhi-Lin Zhang, You-Hang Zhou, Wenqing Zhu, Jun Li, and Jianhua Zhang
- Subjects
010302 applied physics ,Aqueous solution ,Materials science ,business.industry ,Mechanical Engineering ,Doping ,Oxide ,chemistry.chemical_element ,02 engineering and technology ,Yttrium ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,Threshold voltage ,chemistry.chemical_compound ,chemistry ,Mechanics of Materials ,Thin-film transistor ,0103 physical sciences ,Optoelectronics ,General Materials Science ,Thin film ,0210 nano-technology ,business ,Indium - Abstract
In the work, novel indium yttrium oxide (InYO) thin films are prepared by an environmentally friendly aqueous solution process. Y element is added to suppress the generation of oxygen vacancies. The effect of Y doping on the performance and stability of nontoxic water-induced InYO thin film transistors (TFTs) is firstly examined. With the increase of Y doping contents, off-state current is decreased and mobility decreases from 15.8 to 11.7 cm2 V−1 s−1. Furthermore, the stability under positive bias stress is also obviously improved. The device with 2 mol% Y element shows an optimized electrical performance and good stability, including mobility of 12.8 cm2/V s, threshold voltage of 1.4 V, subthreshold swing of 0.33 V/decade and threshold voltage shift of 2.31 V under positive voltage stress of 5 V for 10,000 s. The performance improvement is attributed to the decrease of oxygen vacancies and the decline of interface trap density by Y addition.
- Published
- 2019
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