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Beam shaping is becoming increasingly important for synchrotron X-ray applications. Although routine for visible light lasers, this is challenging for X-rays due to the limited source coherence and extreme optical tolerances required for the shaping mirrors. In deliberate defocusing, even surface errors <5 nm r.m.s. introduce damagingly large striations into the reflected beam. To counteract such problems, surface modifications with alternating concave and convex curvature on equal segments were polished onto the surface of non-active mirrors of fixed curvature. Such optics are useful for providing a fixed size of X-ray beam, but do not provide the adaptability required by many experiments. In contrast, deformable piezo bimorph mirrors permit a continuous range of X-ray beam sizes and shapes. A new theory is developed for applying non-periodic modifications of alternating curvature to optical surfaces. The position and length of the segments may be freely chosen. For the first time, surface modifications of alternating curvature are applied to bimorph mirrors to generate non-Gaussian X-ray beam profiles of specified width. The new theory's freedom is exploited to choose the segments to match the polishing errors of medium wavelength (>10 mm) and the piezos' influence on the mirror's figure. Five- and seven-segment modifications of alternating curvature are calculated and verified by visible light and X-ray metrology. The latter yields beam profiles with less striation than those made by defocusing. Remaining beam striations are explained by applying geometrical optics to the deviations from the ideal surface modifications of alternating curvature. [ABSTRACT FROM AUTHOR]

We present a comprehensive investigation of the systematic and random errors of the nanometrology instruments used to characterize synchrotron X-ray optics at Diamond Light Source. With experimental skill and careful analysis, we show that these instruments used in combination are capable of measuring state-of-the-art X-ray mirrors. Examples are provided of how Diamond metrology data have helped to achieve slope errors of <100 nrad for optical systems installed on synchrotron beamlines, including: iterative correction of substrates using ion beam figuring and optimal clamping of monochromator grating blanks in their holders. Simulations demonstrate how random noise from the Diamond-NOM's autocollimator adds into the overall measured value of the mirror's slope error, and thus predict how many averaged scans are required to accurately characterize different grades of mirror. [ABSTRACT FROM AUTHOR]

Piezo bimorph mirrors are versatile active optics used on many synchrotron beamlines. However, many bimorphs suffer from the `junction effect': a periodic deformation of the optical surface which causes major aberrations to the reflected X-ray beam. This effect is linked to the construction of such mirrors, where piezo ceramics are glued directly below the thin optical substrate. In order to address this problem, a next-generation bimorph with piezos bonded to the side faces of a monolithic substrate was developed at Thales-SESO and optimized at Diamond Light Source. Using metrology feedback from the Diamond-NOM, the optical slope error was reduced to ∼0.5 µrad r.m.s. for a range of ellipses. To maximize usability, a novel holder was built to accommodate the substrate in any orientation. When replacing a first-generation bimorph on a synchrotron beamline, the new mirror significantly improved the size and shape of the reflected X-ray beam. Most importantly, there was no evidence of the junction effect even after eight months of continuous beamline usage. It is hoped that this new design will reinvigorate the use of active bimorph optics at synchrotron and free-electron laser facilities to manipulate and correct X-ray wavefronts. [ABSTRACT FROM AUTHOR]