101. Development of p-i-n radiation detectors based on semi-insulating 4H-SiC substrate via dual-face ion implantation
- Author
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Qing Liu, Youdou Zheng, Rong Zhang, Hai Lu, Fang-Fang Ren, Qunsi Yang, Weizong Xu, and Dong Zhou
- Subjects
Materials science ,Annealing (metallurgy) ,business.industry ,Detector ,Substrate (electronics) ,Condensed Matter Physics ,Thermal conduction ,Particle detector ,Electronic, Optical and Magnetic Materials ,Reverse leakage current ,Ion implantation ,Materials Chemistry ,Optoelectronics ,Electrical and Electronic Engineering ,business ,Diode - Abstract
To explore the potential of semi-insulating (SI) SiC substrate for radiation detector applications, p-i-n diodes with thick depletion layers are fabricated by using a dual-face ion implantation technique on SI 4H-SiC substrate. The Poole-Frenkel (P-F) emission is found responsible for the reverse leakage current transport of the p-i-n diode at elevated temperatures. The derived emission barrier height is likely induced by the residual boron-related shallow-level states, which are located ∼ 0.3 eV above the top of the valence band. Detection tests of α-particles are performed on each side of the p-i-n detector to determine the location of the depleted region, which reveals weak p-type conduction of the SI 4H-SiC substrate after high temperature post-implantation annealing. The energy resolution of the detector operating in photovoltaic mode is ∼ 4.3%, which would degrade at higher biases. The saturated charge collection efficiency (CCE) of ∼ 99% for detection of 5.48 MeV α-particles is obtained as reverse bias exceeds 80 V.
- Published
- 2022