Author: "Baranowsky, Paul" - Searchworks@Jio Institute Digital Library Search Results

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5 results on '"Baranowsky, Paul"'

1. Novel spin-on overcoat materials for EUV photoresist enhancement

Author: Hou, Xisen, primary, Cen, Yinjie, additional, Baranowsky, Paul, additional, and Petrillo, Karen E., additional
Published: 2024
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2. Chemical trimming overcoat: an advanced spin-on process for photoresist enhancement in EUV lithography

Author: Hou, Xisen, primary, Cen, Yinjie, additional, Baranowsky, Paul, additional, Kang, Doris, additional, Liu, Cong, additional, and Xu, Chengbai, additional
Published: 2023
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3. Chemical trimming overcoat: an advanced spin-on process for photoresist enhancement in EUV lithography

Author: Guerrero, Douglas, Amblard, Gilles R., Hou, Xisen, Cen, Yinjie, Baranowsky, Paul, Kang, Doris, Liu, Cong, and Xu, Chengbai
Published: 2023
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4. Novel spin-on overcoat materials for EUV photoresist enhancement

Author: Guerrero, Douglas, Amblard, Gilles R., Hou, Xisen, Cen, Yinjie, Baranowsky, Paul, and Petrillo, Karen
Published: 2024
Full Text: View/download PDF

5. Chemical trimming overcoat: an advanced spin-on process for photoresist enhancement in EUV lithography.

Author: Hou, Xisen, Cen, Yinjie, Baranowsky, Paul, Kang, Doris, Liu, Cong, and Xu, Chengbai
Published: 2023
Full Text: View/download PDF

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