1. Piezoelectric micromachined ultrasonic transducers based on PZT thin films
- Author
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Muralt, Paul, Ledermann, Nicolas, Baborowski, Jacek, Barzegar, Abdolghaffar, Gentil, Sandrine, Belgaccem, Brahim, Petitgrand, Sylvain, Bosseboeuf, Alain, and Setter, Nava
- Subjects
Ultrasonic transducers -- Design and construction ,Dielectric films -- Design and construction ,Thin films -- Design and construction ,Titanates -- Electric properties ,Lead compounds -- Electric properties ,Business ,Electronics ,Electronics and electrical industries - Abstract
A study of fabrication and characterization results of piezoelectric micromachined ultrasonic transducers (pMUTs) based on 2-micrometer thick Pb(Zro.53Tio.47O3) (PZT) thin films is described. A transmit-receive experiment with two quasi-identical pMUTs showed significant signal transmission up to a distance of 20cm in air and 2 cm in the test liquid.
- Published
- 2005