1. Spectroscopic ellipsometry characterization of coatings on biaxially anisotropic polymeric substrates
- Author
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Stefan Schoeche, Bill Dodge, James N. Hilfiker, Brandon Pietz, Jianing Sun, and Nina Hong
- Subjects
Materials science ,Optical anisotropy ,General Physics and Astronomy ,02 engineering and technology ,Substrate (electronics) ,engineering.material ,010402 general chemistry ,01 natural sciences ,Optics ,Coating ,Polymer substrate ,Mueller calculus ,Composite material ,Anisotropy ,business.industry ,Surfaces and Interfaces ,General Chemistry ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,0104 chemical sciences ,Surfaces, Coatings and Films ,Characterization (materials science) ,engineering ,Spectroscopic ellipsometry ,0210 nano-technology ,business - Abstract
Spectroscopic ellipsometry characterization of coatings on polymeric substrates can be challenging due to the substrate optical anisotropy. We compare four characterization strategies for thin coating layers on anisotropic polymeric substrates with regard to accuracy of the resulting layer thickness and coating optical constants. Each strategy differs in measured data type, model construction, implementation complexity, and inherent capabilities and sensitivity to the coating properties. Best practices and limitations are discussed for each strategy.
- Published
- 2017