1. Magnetic Sector Secondary Ion Mass Spectrometry on FIB-SEM Instruments for Nanoscale Chemical Imaging
- Author
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Olivier De Castro, Jean-Nicolas Audinot, Hung Quang Hoang, Chérif Coulbary, Olivier Bouton, Rachid Barrahma, Alexander Ost, Charlotte Stoffels, Chengge Jiao, Mikhail Dutka, Michal Geryk, and Tom Wirtz
- Subjects
Imaging, Three-Dimensional ,Magnetic Phenomena ,Microscopy, Electron, Scanning ,Spectrometry, Mass, Secondary Ion ,Analytical Chemistry - Abstract
The structural, morphological, and chemical characterization of samples is of utmost importance for a large number of scientific fields. Furthermore, this characterization very often needs to be performed in three dimensions and at length scales down to the nanometer. Therefore, there is a stringent necessity to develop appropriate instrumentational solutions to fulfill these needs. Here we report on the deployment of magnetic sector secondary ion mass spectrometry (SIMS) on a type of instrument widely used for such nanoscale investigations, namely, focused ion beam (FIB)-scanning electron microscopy (SEM) instruments. First, we present the layout of the FIB-SEM-SIMS instrument and address its performance by using specific test samples. The achieved performance can be summarized as follows: an overall secondary ion beam transmission above 40%, a mass resolving power (
- Published
- 2022
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