1. Simulation Study on Frequency Characteristics of AlN/ β-Ga2O3 HEMT.
- Author
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HE Xiaomin, TANG Peizheng, LIU Ruoqi, SONG Xinyang, HU Jichao, and SU Han
- Subjects
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FREQUENCIES of oscillating systems , *CHARACTERISTIC functions , *FUNCTION spaces , *ELECTRIC capacity , *MODULATION-doped field-effect transistors - Abstract
The influence of frequency characteristics of devices is complex. The effects of AlN barrier thickness, gate length, gate-drain spacing and work function on the frequency characteristics of AlN/ β-Ga2O3 high electron mobility transistor (HEMT) were studied by Sentaurus TCAD in this paper. The following conclusions are obtained: as the thickness of the AlN barrier layer increases from 10 nm to 25 nm, the cutoff frequency (fT) and maximum oscillation frequency (fmax ) rise by 18 and 17 GHz respectively. The decrease of gate capacitance is the main reason for the increase of fT . Furthermore, it was found that the thinner barrier layer enhanced the gate's ability to control the channel electrons. When the gate length is scaled down from 0. 9 μm to 0. 1 μm, fT and fmax increase by 84 and 98 GHz, respectively, representing a far more profound influence on frequency characteristics than the barrier layer thickness. However, when the gate length fell below 0. 1 μm, short-channel effects emerged. As the gate-drain spacing increase, fT exhibits a slight decrease. Coupled with the concurrent reduction in source resistance, this led to a synchronized trend in fmax and fT only when the gate-source voltage (VGS ) exceeds - 1. 2 V. The work function, on the other hand, has minimal impacts on fT and fmax, but an increase in the work function positively influenced the device' s pinch-off characteristics. In summary, this paper indicates that by shortening the gate length while concurrently augmenting the thickness of the AlN barrier layer, gate-drain spacing, and work function, one can enhance the frequency characteristics while also improving the pinch-off characteristics of the device, which has certain guiding significance for the design of HEMT devices. [ABSTRACT FROM AUTHOR]
- Published
- 2024