1. Crystallization of piezoceramic films on glass via flash lamp annealing
- Author
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Song, Longfei, Cardoletti, Juliette, Martinez, Alfredo Blazquez, Bencan, Andreja, Kmet, Brigita, Girod, Stephanie, Defay, Emmanuel, and Glinsek, Sebastjan
- Subjects
Physics - Applied Physics ,Condensed Matter - Materials Science - Abstract
Integration of thin-film oxide piezoelectrics on glass is imperative for the next generation of transparent electronics to attain sensing and actuating functions. However, their crystallization temperature (above 650 {\deg}C) is incompatible with most glasses. We developed a flash lamp process for growth of piezoelectric lead zirconate titanate films. The process enables crystallization on various types of glasses in a few seconds only. Functional properties of these films are comparable to the films processed with standard rapid thermal annealing at 700 {\deg}C. A surface haptic device was fabricated with a 1 $\unicode{x00B5}$m-thick film (piezoelectric e$_{33,f}$ of -5 C m$^{-2}$). Its ultrasonic surface deflection reached 1.5 $\unicode{x00B5}$m at 60 V, sufficient for its use in surface rendering applications. This flash lamp annealing process is compatible with large glass sheets and roll-to-roll processing and has the potential to significantly expand the applications of piezoelectric devices on glass., Comment: 53 pages, 18 figures
- Published
- 2023